HitachiメーカーS-3400Nの使用説明書/サービス説明書
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INSTRUCTION MANUAL FOR MODEL S-3400N SCANNING ELECTRON MICROSCOPE (User’s Operation/Maintenance Edition) Please read through this manual carefully before using the instrument. • Before using the instrument, read the safety instructions and precautions carefully.
NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved.
FOREWORD - 1 FOREWORD APPLICATION • The S-3400N SEM utilizes an electron beam accelerated at 300V to 30kV. The instrument is designed mainly for observation and evaluation of specimens prepared for the SEM. • Note that Hitachi Science Systems, Ltd.
FOREWORD - 2 Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1.
FOREWORD - 3 GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period.
FOREWORD - 4 GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption.
FOREWORD - 5 INSTALLATION AND AFTER-SALES SERVICE Installation • Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work • Before installation, refer to section 1 and prepare the necessary utilities.
FOREWORD - 6 Available Training Programs Hitachi service offers various kinds of training programs at its own facilities or at the user's site and facilities to ensure proper and safe operations of the equipment to its full performance. Please contact your sales representative about the details of the training programs and application to them.
For Safe Handlin g SAFETY - 1 For Safe Handling Before operating the machine, read the following instructions carefully. Safety precautions are indicated with the following headings combining the aler.
For Safe Handlin g SAFETY - 2 General Precautions on Safety Before Using the System ■ Before using this product, read the ope rating man ual careful and be sure to under stand its conten ts. ■ The opera ting manual sh ould be kept in a safe pla ce near you fo r ready access and re ference.
For Safe Handlin g SAFETY - 3 General Precautions on Safety (cont’d) Precautions on Using the System ■ When leaving the system unattended , turn o ff the acceleration voltage.
For Safe Handlin g SAFETY - 4 Warnings in the Operating Manual Wa rnings p rovided in this manual and where they occur a re summarized below. ● This system does not have compon ents that requi re Danger signs. Warning Indicators ● Burns from the Rotary Pump ■ If it stops abnormally the rota ry pump remains ho t.
For Safe Handlin g SAFETY - 5 Warning Indicators (cont’d) ● Injury from Splashing Compressor Drain ■ The inside of the compressor tank is pre ssurized. When draining off the co mpressor, jerky mo tion can cause the liquid to splash, causing eye injur ies.
For Safe Handlin g SAFETY - 6 Caution Indicators ● Fatigue due to Long Hours of Oper ation ■ In operating the system while viewing the display, looking at the display for long hou rs at the sa me posture can build up fatigue in the eyes or body.
For Safe Handlin g SAFETY - 7 Caution Indicators (cont’d) ● Burns from Touching the Heated Aperture Plates ■ Heated aperture plates a fter ba king are hot. Touc hing it can cause burns. Do not touch the heated aperture pla tes heated with bare hands.
For Safe Handlin g SAFETY - 8 System War ning Labels Safety pages 7 to 10 sho w W arning labels tha t are a ffixed to the S-3400N. The contents of the warning labels should be chec ked against the ac tual equip ment.
For Safe Handlin g SAFETY - 9 （ Right side view ） (Rear view) Warning Label Past ing Locations on System Unit.
For Safe Handlin g SAFETY - 10 Warning Labels Past ing Locations on Rotary Pump Motion shielding weight Compressor （ Top view ） (Back view ） Warning Label Past ing Locations on W eight/Compresso.
For Safe Handlin g SAFETY - 11 (Front view) (Left side view) Warning Label Past ing Locations Display Unit.
For Safe Handlin g SAFETY - 12 Precautions for Proper Operation ― Precautions for t he Proper Operati on of the S-3400N ― Ab out Electric ity (a) Single-phase AC 100 V ( ± 10%), 50 /60 Hz, 2 kVA (for main unit). When the supplied power line voltage is 100 V, the instrument works by direct connection.
For Safe Handlin g SAFETY - 13 Precautions on Proper Operation (cont’d) Third Party’s Industrial or Propr ietary Rights Hitachi Science Systems, Ltd.
For Safe Handlin g SAFETY - 14 Precautions on Proper Operation (cont’d) Backup of Important Data Trouble-f ree operation c annot be guaran teed f or the co mputer system.
For Safe Handlin g SAFETY - 15 Precautions on Proper Operation (cont’d) Ab out Changes in Computer Setting s Do not change the following system settings o f your PC. These are set up at the optimum co nditions for ope ration of the S-3400N SEM before shipping .
For Safe Handlin g SAFETY - 16 (e) Power Saving mode Do not use the Power Sa ving mode. It will cause trouble in communication between the PC and internal micr oprocessor. (f) Virtual memory setting Do not change the virtual memory se tting. (g) Any saved image data is subject to control by SEM data Manager.
For Safe Handlin g SAFETY - 17 Precautions on Proper Operation (cont’d) OS Operation duri ng S-3400N SEM Operation Although the Wi ndows Task Manager can be launched from t he Taskbar o r by Ctrl+Al.
For Safe Handlin g SAFETY - 18 Precautions on Proper Operation (cont’d) Netwo rk Connection The PC is equipped with Ethernet ports for ne twork connectivity. Performin g a network connection using the Ethernet requires extensive knowledge of t he network environment.
For Safe Handlin g SAFETY - 19 Precautions on Proper Operation (cont’d) Using Other Windo ws Applications Running non-SEM Windows applications (especi ally the Printer or Internet Explorer) du ring a SEM operation, esp ecially image capture, transfer of saved.
For Safe Handlin g SAFETY - 20 Precautions on Proper Operation (cont’d) Transportation and Relocation of In strument (a) The transport o f the s ystem, which carries considerable ris k, should never be attemp ted by a custome r. Any system transport should be perfo rmed with the assistan ce and supervision of Hitachi-approved engineers.
PC - 1 Additional Information of PC Setting Setting of Windows (r) XP Professional Service Pack2 in S-3400N 1. Outline As of February 2005, OS of the personal computer for the PC-SEM control is Windows XP Professional Service Pack2 (SP2).
PC - 2 The Windows Firewall is set as shown in the figure below. To restore all Windows Firewall settings to a default state, select the Advanced tab and click the Restore Defaults button.
PC - 3 2.2 Automatic Updates (1) Click Automatic Updates in the Windows Security Center window or click the Automatic Updates tab in the System dialog. Fig. 3 The Windows Security Center Window (2) Select "Notify me but don't automatically download or install them.
PC - 4 2.3 Virus Protection The anti-virus software is not installed. In SP2, if the anti-virus software is not installed or the date of the virus definitions file is old, message is displayed when OS starts. When the instrument is shipped from factory, the Virus Protection setting is set as follows so that the message is not displayed.
PC - 5 We have tested the following anti-virus software that install in the personal computer of PC-SEM, and confirmed that the SEM control software operates correctly (as of February 2005). Symantec Norton Anti Virus 2004 Symantec Norton Anti Virus 2005 Our company doesn't support above-mentioned anti-virus software.
PC - 6 (3) Appearance tab Windows and buttons: Windows XP style Color scheme: Default (blue) Effects: (Click the Effects button): do not check "Use the following method to smooth edges of screen fonts." (If it is checked, when the SEM image with a high brightness is displayed, the character of the data display becomes hard to see.
PC - 7 3.4 Setting of Taskbar When the instrument is shipped from factory, the setting of the taskbar is set for the following. There is no influence in the operation of the SEM software even if this setting changes.
- i - T able of Contents FOREWORD ....................................................................................................... FOREWORD - 1 Scope of Instruction Manual ........................................................................
- ii - 1 SPECIFICATIONS AND INSTALLATION REQUIREMENTS ......................................... 1 - 1 1.1 Specifications ........................................................................................................ 1 - 1 1.1.1 Resolution ..
- iii - 2.3.6.2 Electron Gun Control Unit ........................................................ 2 - 26 2.3.6.3 Scan Control Windows ............................................................. 2 - 27 2.3.6.4 Auto Control ..........................
- iv - 3 OPERATION .................................................................................................................. 3 - 1 3.1 Starting the System .......................................................................................
- v - 3.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) .... 3 - 57 3.5.7.1 Coordinate Notation ............................................................... 3 - 57 3.5.7.2 Movable Range and Specimen Exchange Position ........
- vi - 3.9.7 Pseudo Color Display ............................................................................. 3 - 129 3.9.8 Data Entry Function ............................................................................... 3 - 130 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation .
- vii - 4.1.3 Maintenance for the Orifice Unit ............................................................... 4 - 10 4.1.4 Maintenance for the Condenser Aperture ................................................4 - 15 4.1.5 Cleaning of Aperture Plates .
- viii - 6.3.1 About the External Communication of S-3400N ....................................... 6 - 10 6.3.1.1 Communication Procedure ....................................................... 6 - 10 6.3.1.2 Function and Limitation ..................
- ix - 6.4.5.2 Display of SEM Image ............................................................ 6 - 82 6.4.5.3 Start of CD Measurement Function ........................................ 6 - 83 6.4.5.4 Setting Measurement Parameters ...................
1.1.1 1 - 1 1. SPECIFICA TIONS AND INST ALLA TION REQUIREMENTS 1.1 Specifications 1.1.1 Resolution Secondary electron image resolution: 3.0 nm (30 kV acceleration voltage, in high vacuum mode) 10 nm (3 kV acceleration voltage, in high vacuum mode) Backscattered electron image resolution: 4.
1.1 Specifications 1 - 2 1.1.4 Specimen Goniometer Stage (a) Type I (80 x 40 stage) Range of motion: X-axis: 0 to 80 mm Y-axis: 0 to 40 mm Z-axis (WD): 5 to 35 mm R-axis (rotation): 360°, continuous .
1.1.6 1 - 3 Scanning mode: TV/FAST Slow Reduced area (320 x 240 pixels) Waveform display Split screen/dual mag mode High-definition capture (5120 x 3840 pixels maximum) Frame integration capture (2560 x 1920 pixels maximum) Scanning speed: TV scanning (640 x 480 pixel display: 25/30* frames/s) FAST scanning (full screen display: 6.
1.1 Specifications 1 - 4 Saving image data: Saved image size: （ 640 x 480 pixels, 1280 x 960 pixels, 2560 x 1920 pixels, and 5120 x 3840 pixels ） Applicable format: BMP, TIFF, and JPEG Image data .
1.2.1 1 - 5 1.2 Installation Requirements Only the persons who have been trained by a certified engineer of the manufacturer are allowed to carry out the installation work described below. 1.2.1 General The following places or conditions should be avoided for installation of the instrument.
1.2 Installation Requirements 1 - 6 NOTICE: (a) Line power fluctuation should be slow, and no abrupt fluctuation is allowable. (b) Allowable line voltage fluctuation is ±10 % max. (c) This instrument over-voltage category is "CAT.II". (d) The instrument provides Main ELB of the following type.
1.2.5 1 - 7 1.2.5 Stray Magnetic Field Image disturbance will be negligible when the stray magnetic field conditions shown in Tables 1.2-1 are satisfied at the instrument installation place. Before proceeding to installation, check the stray magnetic field conditions as required.
1.2 Installation Requirements 1 - 8 (a) Image expansion/contraction (b) Image distortion Fig. 1.2-1 Effect of Stray Magnetic Field Component Synchronous with Power Frequency (AC magnetic field) (a) Appearance of image disturbance (b) DC magnetic field variation Fig.
1.2.5 1 - 9 Table 1.2-1 Allowable Stray Magnetic Field AC magnetic Field (rms value) DC magnetic Field Variation (peak to peak) Resolution Guaranteeing Conditions Horizontal Direction Vertical Direction Horizontal Direction Vertical Direction Accelerating voltage : 3 kV Magnification : × 30,000 WD : 5.
1.2 Installation Requirements 1 - 10 1.2.6 Vibrations Before installing the instrument, measure floor vibration at the site. Image trouble will not occur if the allowable values in Table 1.2-2 are satisfied under the resolution/photographing conditions.
1.2.7 1 - 11 Type II Stage Allowable Value (high-frequency region) Frequency X, Y, Z-direction 10.0 Hz 1.0 cm/s 2 max. 50.0 Hz 2.0 cm/s 2 max. 60.0 Hz 2.0 cm/s 2 max. Acceleration 4 cm/s 2 (gal) is the same as amplitude 10 µm p-p in the frequency 10 Hz.
1.2 Installation Requirements 1 - 12 Table 1.2-3 External Noise Sources Classification Noise Source Source Equipment Electric equipment with contacts Electric discharge (spark, arc) Flasher (neon sign.
1.2.8 1 - 13 1.2.8 Disturbance by Sound Waves Sound waves (vibrations of air) adversely affect the Model S-3400N regardless of their frequency and may cause image trouble. To prevent this, confirm before installation that equipment that may cause a sonic disturbance is not located in the vicinity of the S-3400N.
1.2 Installation Requirements 1 - 14 (2) Minimum required dimensions of the entrance 0.85 m (W) ×1.7 m (H) (3) Required strength of the floor () () 2 2 m space florr 8 . 9 × kg equipment of mass total 3 ) m / N ( strength floor ≧ (4) Other For layout, see Figure 1.
1.3 1 - 15 1.3 Customer-supplied Items The items listed in Table 1.3-1 should be procured prior to the installation work. Table 1.3-1 Customer-supplied Items Name Quantity Comments Ethanol 500 mL Acet.
2 2 - 1 2. FUNCTIONS This chapter explains the mechanical configuration of the S-3400N SEM and describes its software. Figures 2-1a and 2-1b show the appearance of the Model S-3400N Type I and Type II. Fig. 2-1 (a) Model S-3400N Scanning Electron Microscope, Type I Fig.
2.1 Control Knobs and Switches on Main Unit 2 - 2 2.1 Control Knobs and Switches on Main Unit 2.1.1 Main Unit Figure 2.1-1 shows the appearance of the S-3400N main unit (Type II). Fig. 2.1-1 External View of the Column (Type II) NOTICE: Do not touch the Condenser Lens Adjustment Screws (8 places).
2.1.2 2 - 3 2.1.2 Electron Optical Column Figure 2.1-2 sketches the sectional view of the S-3400N column. Fig. 2.1-2 Sectional View of S-3400N Column Electron Gun 1st Condenser Lens 2nd Condenser Lens.
2.1 Control Knobs and Switches on Main Unit 2 - 4 2.1.3 Specimen Stage (Type I) Figure 2.1-3 shows the Type I specimen stage. Fig. 2.1-3 Specimen Stage (Type I) • [X] control: Moves specimen in X direction within a range from 0 to 80 mm. • [Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.
2.1.4 2 - 5 2.1.4 Specimen Stage (Type II) Figure 2.1-4 shows the appearance of specimen stage driven by motors (Type II). Fig. 2.1-4 Large Specimen Stage (Type II) • Range of movement in X directio.
2.1 Control Knobs and Switches on Main Unit 2 - 6 2.1.5 EVAC Panel Figure 2.1-5 shows the EVAC panel. Fig. 2.1-5 EVAC Panel • Key switch: The POWER for the system unit. Insert the key and turn it to the START position to start the system. Releasing the key stops the key at the ON position.
2.1.6 2 - 7 2.1.6 Evacuation System Figure 2.1-6 shows the block diagram of evacuating system. R.P 1 / (DRY POMP ) TMP R.P 2(OPTION) / (DR Y POMP) NV V1 V2 V3 V4 GV V5 V 6 V7 S.
2.1 Control Knobs and Switches on Main Unit 2 - 8 2.1.7 System Power Distribution Board Figure 2.1-7 shows an external view of the system distribution board located in the back of the main unit. Fig. 2.1-7 System Power Distribution Board • MA IN ELB: Main breaker.
2.2.1 2 - 9 2.2 Control Knobs and Switches on Display Unit 2.2.1 Display Console Figure 2.2-1 shows the display unit. Fig. 2.2-1 Display Unit • PC: SEM control personal computer. Placed inside of the door. • Monitor display: Display monitor of PC.
2.2 Control Knobs and Switches on Display Unit 2 - 10 2.2.2 PC (Personal Computer) Figure 2.2-2 shows the front part of the control PC. (Because PCs undergo frequent model changes, the photograph below may not be the same as the model that is actually delivered.
2.2.3 2 - 11 2.2.3 Manual Operation Panel Figure 2.2-3 shows the manual operation panel. Fig. 2.2-3 Manual Operation Panel • Stigma/alignment adjusting section [Stigma/alignment] [X], [Y] knobs: Use for astigmatism correction in a usual practice manual mode.
2.2 Control Knobs and Switches on Display Unit 2 - 12 2.2.4 Mouse and Trackball Figure 2.2-4 shows the mouse. The mouse has an additional two side buttons, S and E button. Fig. 2.2-4 Mouse Figure 2.2-5 shows the trackball unit. It is used for stage X and Y-axis manual operation of Type II model.
2.3.1 2 - 13 2.3 Graphical User Interface (GUI) 2.3.1 Starting the PC and Logging in the S-3400 Program Use the following steps to logon to Windows XP. (1) Starting up the PC Use the key switch to turn on the system and star it. The PC will also start up automatically.
2.3 Graphical User Interface (GUI) 2 - 14 Fig. 2.3-1 Example of Windows Desktop (Windows XP (R) is a trademark of Microsoft Corp.) The S-3400 login dialog window will open. Fig. 2.3-2 S-3400N Login Dialog Window At the first startup after installation of the program, use the login name "S-3400" and click the OK button.
2.3.2 2 - 15 2.3.2 S-3400N SEM Main Window Figure 2.3-3 shows the main window for operation of the microscope. Fig. 2.3-3 S-3400N Main Window (Full screen display) • Title bar: Shows the window title. • Minimize button: Minimizes the window size. The window is iconized and placed on the Task bar.
2.3 Graphical User Interface (GUI) 2 - 16 • Operation panel: The button hides the panel, and alternate shows it again. Position of the panel can be moved to left or right side with and buttons. The display position can be moved to the right or left edge by using the , buttons.
2.3.3 2 - 17 2.3.3 Control Arrangement on the Window Operation tools are placed as follows. (1) Control panel Most frequently used controls are placed on it. (2) Operation panel The Operation Panel is comprised of four tabs: Cond. , Image , Utility , and Stage .
2.3 Graphical User Interface (GUI) 2 - 18 (6) Shortcut keys Some shortcut keys are specified. Refer to <2.3.20 Using Short-cut Keys>. 2.3.4 Menus The menu bar includes the following menus and commands. (1) File menu: The File menu includes commands for opening SEM Data Manager, saving files, photo recording, and image printing.
2.3.4 2 - 19 • Exit Closes SEM operation. (2) Edit menu: The Edit menu includes commands for copying viewing images and attributes to the Windows clipboard. • Copy Image : Copies viewing images to the Windows clipboard. Refer to < 3.9.11 Copy Image>.
2.3 Graphical User Interface (GUI) 2 - 20 • Filament Image : Displays the Filament Image window. This button is used to perform appropriate image adjustments using a filament image. Normally this function is not used by customers. • Image Adjustment : Displays the Image Adjustment window.
2.3.4 2 - 21 • Scan Mode : Selects the size of scanning image display (Screen mode) from Full , Dual and Small . Refer to <3.9.1 Screen Mode>. (6) Image menu: The Image menu includes commands for signal processing of optional detectors. • Opt.
2.3 Graphical User Interface (GUI) 2 - 22 • Optional Setup- Mouse Operation : Opens Mouse tab of the Optional Setup dialog window. Use for setting sensitivity of mouse operation. Refer to <3.9.14 Optional Setting>. • Optional Setup- General : Opens General tab of the Optional Setup dialog window.
2.3.4 2 - 23 (9) Window menu: The Window menu includes commands for opening the Captured Image window, and others. • Captured Image : Opens the Captured Image window. Refer to <2.3.10 Captured Image Window>. • Close All : Closes all dialog windows except for the Scanning Image window.
2.3 Graphical User Interface (GUI) 2 - 24 2.3.5 Popup Menu Click the center (wheel) button of the mouse on the image area to open the Popup menu. The Popup menu includes frequently used commands and changes depending on present status (scan is running or frozen).
2.3.5 2 - 25 (2) Open when frozen • RUN: Runs scanning. • Memory Photo: Photographs a frozen image (optional). • Layout Print: Opens the Report Generation dialog window. Use it for printing viewing images. • PCI transfer : Transfers a frozen image to the PC.
2.3 Graphical User Interface (GUI) 2 - 26 2.3.6 Control Panel Contains the most frequently used controls such as for image observation, and image recording. Usual operation can be performed using the Control Panel and the Manual Operation Panel . 2.3.
2.3.6 2 - 27 2.3.6.3 Scan Control Windows Fig. 2.3-8 Scan Control Block (1) Run button Used to run or freeze scanning. The button is at when scanning and changes to while scan is frozen. To stop scanning, click the button. Scanning continues until it reaches the end of the frame and then stops.
2.3 Graphical User Interface (GUI) 2 - 28 2.3.6.4 Auto Control Fig. 2.3-10 Auto Control (1) ABCC Starts auto brightness/contrast control ( ABCC ). If the results of ABCC are not adequate, you can change the reference brightness and contrast in the Image tab of the Setup dialog window.
2.3.6 2 - 29 (5) Monit Waveform monitor mode is activated. The Focus monitor and B/C monitor modes are set alternately by clicking the button. At the first click, a waveform is displayed for monitoring the focus. The magnification is set at 1,000 × .
2.3 Graphical User Interface (GUI) 2 - 30 2.3.6.5 Magnification Control Fig. 2.3-13 Magnification Control (1) Magnification indicator Window Indicates magnification. In this window, moving the mouse while holding down the left or right button changes magnification.
2.3.6 2 - 31 2.3.6.6 Capture Control This block is used to capture images. Fig. 2.3-15 Capture Control Unit Captures an image with pre-specified image resolution and scanning speed. Displayed figures on the capture button (the number 640 in the above example) indicates the resolution of the captured image.
2.3 Graphical User Interface (GUI) 2 - 32 • Scan speed unlinked mode Fig. 2.3-17 Scan Speed Unlinked Mode Setting Irrespective of the scanning speed currently in effect, the system captures images using a specified scanning speed, Resolution , and Speed/Integration .
2.3.6 2 - 33 2.3.6.7 Image Recording Control This block allows you to record captured images. Fig. 2.3-19 Image Recording Control Recording function buttons Of the recording functions to be used, three functions can be assigned to three buttons here.
2.3 Graphical User Interface (GUI) 2 - 34 Clicking File - Assignment Record Buttons or clicking the button on the Image Recording Control button or right-clicking the Image Recording Control button brings up a Setup window, as shown below. From this window, functions can be assigned to three buttons: Fig.
2.3.6 2 - 35 2.3.6.8 EVAC/AIR Control Fig. 2.3-21 EVAC/AIR Control Clicking the EVAC button initiates the evacuation of the specimen chamber. Similarly, clicking the AIR button causes the AIR processing of the specimen chamber.
2.3 Graphical User Interface (GUI) 2 - 36 2.3.6.9 Stage Control （ With Type II 5-axis motor-drive stage ） Fig. 2.3-22 Stage Control (1) HOME Z10 button Moves the stage to the Exchange Position (X ＝ 60 mm, Y ＝ 25 mm, R ＝ 0°, T ＝ 0°, Z ＝ 10 mm).
2.3.6 2 - 37 2.3.6.10 Extension for Dual Screen Mode When the screen mode is Dual , the control panel is extended as follows. Fig. 2.3-23 Control Panel (Dual screen mode) (1) Right-and-left dual control The Run/Freeze , Capture , Recording, and detector selection control buttons are available in right-left configurations.
2.3 Graphical User Interface (GUI) 2 - 38 2.3.7 Operation Panel The Operation Panel is comprised of four tabs. The Cond. , Image , and Utility tabs relate to SEM operations. On each tab, control view/hide can be specified on a user-to-user basis. The Stage tab is for operating the stage.
2.3.7 2 - 39 2.3.7.1 ELECTRON BEAM Window This block allows you to turn the accelerating voltage on and off, and to set the probe current. Fig. 2.3-25 Electron Beam Window (1) Accelerating voltage sel.
2.3 Graphical User Interface (GUI) 2 - 40 2.3.7.2 Focusing Position (WD) WORKING DISTANCE Window This block allows you to set a focusing position. Fig. 2.3-26 Focusing Position (WD) Window (1) WD setup/display window This window displays the current working distance (the focusing position calculated from the lens current).
2.3.7 2 - 41 2.3.7.3 VACUUM MODE Window This window can be used to switch vacuum modes and set a vacuum level. Fig. 2.3-27 VACUUM MODE Window (1) Vacuum mode selection control This control switches between the VP-SEM and SEM modes.
2.3 Graphical User Interface (GUI) 2 - 42 2.3.7.4 SCAN MODE Window This window sets the Scan Mode. Fig. 2.3-28 SCAN MODE Block (1) Norm Image observation mode (2) Line Displays a line profile of the signal intensity as a horizontal line in the observed image.
2.3.7 2 - 43 2.3.7.5 CONDITION LOAD/SAVE Window This window calls and saves observation conditions and executes the operating guides. Fig. 2.3-29 CONDITION LOAD/SAVE Window (1) Load button This button opens the Op. Cond. tab on the Setup window in the Load mode.
2.3 Graphical User Interface (GUI) 2 - 44 2.3.7.7 DETECTOR Window This window switches and controls detectors. Fig. 2.3-31 DETECTOR Window (1) Detector selection control This control switches detectors. (2) ABCC link check box If this box is checked, switching detectors automatically executes ABCC .
2.3.7 2 - 45 2.3.7.9 R.ROTATION Window The raster rotation rotates the direction of the displayed image by rotating the scanning direction of the electron beam. Fig. 2.3-33 R.ROTATION Window (1) Rotation ON/OFF check box Clicking this box and placing a checkmark on it enables raster rotation.
2.3 Graphical User Interface (GUI) 2 - 46 2.3.7.10 SIGNAL PROCESSING Window Applies real time digital image processing to the scanning image. Fig. 2.3-34 SIGNAL PROCESSING Window (1) Processing selection box Selects a processing. • Smooth: Applies pixel averaging spatial filtering.
2.3.7 2 - 47 2.3.7.11 DATA ENTRY Window Use for drawing texts and graphics on the scanning image. Fig. 2.3-35 DATA ENTRY Window Refer to <3.9.8 Data Entry Function>. 2.3.7.12 TILT COMPENSATION Window Specimen tilting causes defocusing and magnification change in the tilt direction.
2.3 Graphical User Interface (GUI) 2 - 48 (2) Tilt compensation Tilting the specimen causes the specimen to be viewed from a tilted direction such that the specimen appears shrunk in the direction of tilt.
2.3.8 2 - 49 2.3.8 Mouse Operation on the Scanning Image Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are provided.
2.3 Graphical User Interface (GUI) 2 - 50 Area: Coarse focus adjustment: move mouse horizontally while pressing down right button. Fine focus adjustment: move mouse horizontally while pressing down left button. Area: Stigma adjustment (X): move mouse horizontally while pressing down left button.
2.3.8 2 - 51 2.3.8.3 Stage and Image Shift Tools Controls shown below will appear on the scanning image. Type I manual stage Type II motorized stage (X, Y, R, T, Z) Type II motorized stage (X, Y, R) Type II motorized stage (dragging with mouse) Fig. 2.
2.3 Graphical User Interface (GUI) 2 - 52 (1) Type I manual stage It is for image shift operation. Move the mouse pointer to a position and press down left or right button. The pointer will be changed to mark. Move mouse to target position while holding down the button and then release the button.
2.3.9 2 - 53 2.3.9.1 Optics Tab The Optics tab is for setting operating condition of the electron optical column. (1) ELECTRON BEAM Window Sets electron optical system conditions. Fig. 2.3-40 Setup Window – Optics Tab (a) Vacc Sets and accelerating voltage.
2.3 Graphical User Interface (GUI) 2 - 54 Low: Long life mode (so that the filament can be used for a long time) Medium: Standard mode High: High resolution mode (when the filament current is to be se.
2.3.9 2 - 55 2.3.9.2 Image Tab The Image tab is for setting operating condition with respect to image observation. Fig. 2.3-41 Setup Window – Image Tab (1) ABCC Window (SE/BSE) If the results of ABCC are not adequate, you can change the reference brightness and contrast.
2.3 Graphical User Interface (GUI) 2 - 56 (3) LINE PROFILE SIGNAL Window The signal for line profile can be selected independently from the signal for image. For example, you can observe or take a photograph of an X-ray intensity line profile on the secondary electron image.
2.3.9 2 - 57 (d) Back Ground Image checkbox When this box is checked, the data display is overlaid on the scanning image. If it is not checked, the background of the data display area is black. (e) Embed into Image checkbox When this box is checked, the auto data display is embedded into the image data when the image is saved to disk.
2.3 Graphical User Interface (GUI) 2 - 58 (4) FILM Window (a) Film Speed Selects a film speed (sensitivity) of the film. The brightness setting is changed internally according to the selected film speed. (b) Photo Size Selects a size of the film. The magnification is adjusted internally according to the selected size.
2.3.10 2 - 59 2.3.10 Captured Image Window Captured images are displayed as thumbnails on this window. It opens when you have captured an image. Also it will open by selecting Captured Image command from Window menu or using the short-cut key (Ctrl + L).
2.3 Graphical User Interface (GUI) 2 - 60 Close button: Closes the window. Closing the window does not clear thumbnails. You can open them again. : When the box is checked, auto data display at the time of capture and data written with the Data Entry function are recorded with the image.
2.3.11 2 - 61 2.3.11 SEM Data Manager Window SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered to the database automatically when saved. For details, refer to <3.11 Using SEM Data Manager>.
2.3 Graphical User Interface (GUI) 2 - 62 • Default button: The Default button is enabled when the alignment mode is either StigmaAlignX or StigmaAlignY . If the alignment mode is StigmaAlignX , sets the stigma X alignment data to the default value, and the X of stigma to the mid-point.
2.3.15 2 - 63 2.3.15 Oblique Dialog Window The Oblique dialog window is used to display an oblique image. To open the dialog window, select the Oblique command from the Analysis menu. Fig. 2.3-48 Oblique Image Window Refer to <3.9.13 Oblique Image>.
2.3 Graphical User Interface (GUI) 2 - 64 2.3.17 Save Image Dialog Window The Save Image dialog window is used for saving scanning images or captured images. To save scanning images, use the Direct Save button on the Control Panel . Use the save button on the Captured Image window to save captured images.
2.3.19 2 - 65 2.3.19 Split/Dual Mag Controller Split Screen mode displays two images in the viewing area, and allows images having different signals and at different magnifications to be displayed. To open this controller, select the Split DM command from the Scan menu.
3 3 - 1 3. OPERA TION Shown below is the procedural flow of typical S-3400 SEM operation. For details, refer to each subsection. ● Start-up Confirmation Items (3.1.1) ● Startup Operation (3.1.2) ● Precautions Concerning Specimen Preparation (3.2.
3.1 Starting the System 3 - 2 3.1 Starting the System 3.1.1 Start-up Confirmation Items Before starting the system, check the following items: (1) Check the amount and quality of oil in the rotary pump. See 4.2.1 Oil Change. (2) Make sure that the rubber tubes in the evacuation system are not loose or disconnected.
3.1.2 3 - 3 (2) Windows will start up and request to key in Ctrl + Alt + Delete will appear. Press Ctrl + Alt + Delete simultaneously (This request message will be shown or not depending on network setting of SEM computer). The logon dialog window will appear.
3.2 Mounting a Specimen 3 - 4 3.2 Mounting a Specimen 3.2.1 Precautions Concerning Specimen Preparation During specimen preparation, observe the following. (1) Wear clean gloves when exchanging specimens. Holding the specimen or specimen stub with bare hands should be avoided.
3.2.3 3 - 5 3.2.3 Mounting a Specimen on the Type I Stage (Manual Stage) IMPORTANT: The specimen base that comes with the system is round. When loading an angular specimen, select an appropriate specimen base so that the entire specimen will fit on the base.
3.2 Mounting a Specimen 3 - 6 Fig. 3.2-2 Measuring the Specimen Height IMPORTANT: If the specimen is tilted or the Stage Z is short, the specimen can touch the objective lens or the backscattered elec.
3.2.3 3 - 7 3.2.3.4 Procedure for Loading a Specimen (1) Removing the specimen, from the specimen chamber • If the accelerating voltage is on, click the OFF button on the Control Panel to shut it off.
3.2 Mounting a Specimen 3 - 8 IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that clothes are never placed when you bring the hand close to the movement mechanism in the specimen stage by the specimen exchange etc.
3.2.4 3 - 9 3.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage) IMPORTANT: The specimen base comes with the system is round. When loading an irregularly shaped specimen, select an appropriate specimen stub so that the entire specimen will fit on the stub.
3.2 Mounting a Specimen 3 - 10 3.2.4.2 Measuring and Setting the Specimen Height (1) Measuring of the specimen height with the height gauge (a) The specimen is combined with the specimen stub and the specimen base stand.
3.2.4 3 - 11 (2) Setting the Specimen Height and Specimen Height and Size The specimen height and the specimen size measured in (1) are set. This setting limits the amount of the movement of the stage (Z and T direction), and protects the specimen and and components inside the specimen chamber from damage by contact of both.
3.2 Mounting a Specimen 3 - 12 In Set Sample Size/Detector window , select from the pull-down and set the specimen height and size measured with the height gauge.
3.2.4 3 - 13 IMPORTANT: When the stage is in motion, the Replace Z10, Z65 HOME Z10 , Z65 button should not be pressed repeatedly. Pressing the button several times can disable the ! STOP button, and can potentially damage the specimen or components inside the specimen chamber.
3.2 Mounting a Specimen 3 - 14 (2) Loading a Specimen (a) Set the specimen holder on the specimen holder receptacle on the stage. (b) Using the handles on both sides of the specimen stage, push the stage into the chamber. (c) Set the specimen height and specimen size Refer to 3.
3.3.1 3 - 15 3.3 Applying the Accelerating Voltage 3.3.1 Conditions under which Accelerating Voltage can be Applied If Electron Beam box at the left top position on the Control Panel is grayed out, the accelerating voltage can not applied, wait until the ON button is activated with the evacuation of the camber is completed.
3.3 Applying the Accelerating Voltage 3 - 16 (c) Pressing ON on ELECTRON BEAM block on the Cond. tab on the Control Panel. Fig. 3.3-4 Applying the Accelerating Voltage (c) (d) Selecting DETAIL on the Optics tab on the Control Panel, and pressing ON on the ELECTRON BEAM menu.
3.3.2 3 - 17 (1) For accelerating voltage, select the desired accelerating voltage level from the list displayed in the accelerating voltage Vacc input section. If necessary, the Up/Down buttons can be used to set the defined value in 100V increments.
3.4 Adjusting the Electron Optical System 3 - 18 3.4 Adjusting the Electron Optical System 3.4.1 Setting Parameters for the Electron Optical System Parameters for the electron optical system can be se.
3.4.1 3 - 19 (2) Setting electron optical system parameters on DETAIL The DETAIL menu provides a consolidated view of all parameters related to the electron optical system, including Vacc , Filament Current , Gun Bias , Probe Current , WORKING DISTANCE , automated functions ( AFS and ABC ), and DeGauss .
3.4 Adjusting the Electron Optical System 3 - 20 (c) Auto Beam Setting ( ABS ) ABS combines the automation functions of AFS (Auto Filament Saturation), ABA (Auto Beam Alignment), ABCC (Auto Brightness Contrast), and AFC (Auto Focus Control) to produce good-quality SEM images.
3.4.1 3 - 21 When a WD value is selected from the list which is displayed when the ↓ button is clicked, the current for the objective lens will be set so that the specimen is in focus at that WD (the actual position of the specimen can be adjusted by manipulating the Z-axis of the specimen stage).
3.4 Adjusting the Electron Optical System 3 - 22 3.4.2 Axial Alignment To fully exploit the capabilities of the system, it is necessary to perform axis alignment on the electron optical system. The chart below shows axis alignment procedures. The required items should be adjusted after imaging conditions are modified.
3.4.2 3 - 23 3.4.2.2 Axial Alignment Items in Detail (1) Preliminary checks before performing an axial alignment Before commencing an axial alignment, the following preliminary steps should be performed: (a) Place a specimen in the specimen chamber. See 3.
3.4 Adjusting the Electron Optical System 3 - 24 • After the alignment process is finished, click the Off button on the [Alignment] window. • Adjust the contrast so that the screen will be at the best possible brightness to view images.
3.4.2 3 - 25 (3) Performing a mechanical axial alignment on the objective lens movable aperture • Set the objective lens movable aperture to the number to be used (normally 2 or 3). Aperture diameters: 1: 100 µm 2: 80 µm 3: 50 µm 4: 30 µm • If the image becomes dark, adjust the contrast.
3.4 Adjusting the Electron Optical System 3 - 26 (4) Aperture Alignment The Aperture Alignment is designed so that the electron beam will pass through the center of the objective lens. If this alignment is not performed precisely, focusing operations can shift the image, resulting in inadequate resolution or image quality.
3.4.2 3 - 27 NOTICE: An accurate aperture alignment cannot be performed at a low magnification (1.000x or less). After making coarse adjustments at low magnification factor, the final adjustments should be made at 1,000x or higher. Prerequisite to an accurate aperture alignment is the correct focus adjustment.
3.4 Adjusting the Electron Optical System 3 - 28 (5) Stigma Alignment X , Y adjustments The Stigma Alignment function is designed to ensure that the image will not move during the stigma correction process. This function is also necessary for the accurate operation of Auto Stigma.
3.4.2 3 - 29 (B) Using the Auto feature Select either the Stigma Align X or Stigma Align Y button and click the Auto button to run the stigma alignment auto axial alignment ( AAA ) process. Fig. 3.4-11 Selecting the Auto Axial Alignment (AAA) • Click the Stigma Align X button.
3.4 Adjusting the Electron Optical System 3 - 30 (6) AFC Alignment adjustments The AFC Alignment function is designed to the electron beam will pass through the center of the objective lens. This function is also necessary for the accurate operation of Auto Focus and the Auto Stigma and Focus.
3.5.1 3 - 31 3.5 Operation for Image Observation Follow the operation below for observation of a scanning image. 3.5.1 Selecting a Detector A detector can be selected by using the DETECTOR block located in the Image tab on the Operation Panel.
3.5 Operation for Image Observation 3 - 32 As signals detected by a detector have the following characteristics, they should be selected according to the intended purpose: Table 3.
3.5.1 3 - 33 3.5.1.2 Backscattered Electron Detector (BSE) For conducting observations, a backscattered electron detector is normally used in the low- vacuum mode. The backscattered electron detector picks up the electrons reflected from the specimen by means of a semiconductor sensor attached to the underside of the objective lens.
3.5 Operation for Image Observation 3 - 34 IMPORTANT: The BSE uses semiconductor elements in its detection unit. To prevent damage to the semiconductor elements and the specimen, the following precautions should be observed: • The movable range for the stage must be observed strictly.
3.5.1 3 - 35 (1) Setting the backscattered electron detector (BSE) Selecting the BSE option in the DETECTOR block produces a BSE image. This menu can be used to set the type of BSE signal, COMP , TOPO or 3D , and the amount of gains to be produced. Fig.
3.5 Operation for Image Observation 3 - 36 (c) 3D mode This mode produces enhanced Topographic or 3D images with a mixture of specimen surface composition information and topology information. Each pressing of the 3D mode button changes the intensity of shading.
3.5.1 3 - 37 Fig. 3.5-9 BSE Detail Dialog IMAGE MODE: This button switches between detection modes, similar to pressing the COMP/TOPO/3D buttons in the DETECTOR block. ELEMENT SETTING: Either select radio buttons A-E or click elements in the detector sensor diagram to set each element to +/ － /OFF .
3.5 Operation for Image Observation 3 - 38 3.5.2 Selecting Magnification There are several ways to select a magnification. (1) Manual Operation Panel The MAGNIFICATION knob can be used to set a magnification. See 2.2.3 Manual Operation Panel. (2) Dragging the mouse in the Magnification indication area on the Control panel.
3.5.2 3 - 39 3.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low Magnification (1) Range of minimum magnifications Table 3.5-2 shows available minimum magnifications for the various observation parameters. The minimum magnification is subject to restrictions by WD and accelerating voltage, scan speed.
3.5 Operation for Image Observation 3 - 40 (2) Notes on operating at low magnifications. In the light gray range shown in Table 3.5-2, depending on the particular observation parameters employed (especially low accelerating voltages or low-magnification at a short WD), the use of the No.
3.5.2 3 - 41 HINT: The light and dark gray observation conditions shown in Table 3.5-2 permit wide FOV observations, which are suitable for searching for a specimen. Under such conditions, observations should be conducted by changing the objective lens movable aperture to No.
3.5 Operation for Image Observation 3 - 42 3.5.3 Selecting Scanning Speed Twelve scanning speeds are available with four buttons. To select a scanning speed, click one of the Scan speed icons on the Control panel. Fig. 3.5-13 Scanning Control Unit Two scanning speeds are assigned to each button.
3.5.3 3 - 43 (3) Slow Scanning : Slow1 and Slow2 are relatively fast slow scans. These two speeds are asynchronous to AC line frequency. It may cause some field magnetic disturbance at high magnification and/or low kV condition. Use for a field search of the specimen, coarse focus, etc.
3.5 Operation for Image Observation 3 - 44 3.5.4 Image Brightness and Contrast Adjustment Image brightness and contrast can be adjusted both manually and automatically. BC Monitor mode is also available for manual adjustment. A histogram of present image can be shown for reference of adjustment.
3.5.4 3 - 45 (2) Manual adjustment using the mouse on the GUI The cursor changes to the B/C cursor . Drag the mouse while holding down the left button to adjust brightness; and while holding down the right button to adjust contrast. Drag it to the right to increase and to the left to decrease brightness or contrast.
3.5 Operation for Image Observation 3 - 46 (5) Histogram display A histogram of the corrent image can be shown. To show histogram, select Show Histogram from Image menu. This function periodically calculates and displays a histogram of the displayed image.
3.5.5 3 - 47 (b) Adjust the stigmators X and Y alternately for the sharpest image. Fig. 3.5-19 Stigma Adjustment (c) Focus again and check image drift and sharpness.
3.5 Operation for Image Observation 3 - 48 (3) Manual Focus Manual focusing can be done using the control knobs on the operation panel or the mouse in the Scanning Image window. (a) Knob operation Use Focus control knobs COARSE and FINE on the manual operation panel.
3.5.5 3 - 49 (5) Manual astigmatism correction Manual astigmatism correction can be done using the knobs on the manual operation panel or with the mouse operation in the Scanning Image window. (a) Knob operation Use Stigma control knobs X and Y on the operation panel.
3.5 Operation for Image Observation 3 - 50 Fig. 3.5-20 Dynamic Stigma Monitor When placed on the observation image, the cursor becomes a cross-hair cursor.
3.5.5 3 - 51 (5) Focus Monitor mode A waveform is displayed for monitoring the focus. The magnification is set at 1,000 × . To start the Focus Monitor, click the Monitor button on the Control panel and focus the image so that the waveform shows sharp peaks.
3.5 Operation for Image Observation 3 - 52 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage) The S-3400N Type I SEM provides a 5-axis manual stage. 3.5.6.1 Movable Range and Specimen Exchange Position The following table shows movable range and specimen exchange position.
3.5.6 3 - 53 Fig. 3.5-23 Observable Ranges in X and Y Directions by Specimen Size (Type I stage - not using an optional detector) ∅ 77 sample 77 mm ∅ sample （80,0） （0,0） （80,40） （0,4.
3.5 Operation for Image Observation 3 - 54 3.5.6.4 Tilt and Z Axis Limitations The allowable tilting angle depends on both Z-axis position and specimen size. A diagram of the relationship between allowable tilt angles for various Z positions is shown below.
3.5.6 3 - 55 Fig. 3.5-25 Allowable Angle of Tilt (Type I) with respect to the Z Axis (negative angle of tilt) IMPORTANT: Set Z and T within the allowable range; otherwise, the specimen may strike the objective lens or BSE detector and cause damage to both specimen and them.
3.5 Operation for Image Observation 3 - 56 3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk Specimen When observing a specimen that is higher than the Standard pos.
3.5.7 3 - 57 3.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) The S-3400N Type II SEM provides a 5-axis motorized stage. 3.5.7.1 Coordinate Notation S-3400N utilizes two coordinate notation systems, Stage (Mechanical) Coordinate and Sample Coordinate .
3.5 Operation for Image Observation 3 - 58 Fig. 3.5-28 Coordinate System Area NOTICE: The sample coordinate is not exactly the coordinate of the sample.
3.5.7 3 - 59 Table 3.5-5 Restrictions on Operation by Specimen Size (Type II Stage) X Motion Range Y Motion Range ∅ 15 mm 52~68 17~33 ∅ 26 mm 46.5~73.
3.5 Operation for Image Observation 3 - 60 IMPORTANT: The Exchange Z10 [ HOME Z10 ] button moves the Z-axis of the specimen stage to the 10 mm mark. Therefore, if the Exchange Z10 [ HOME Z10 ] button .
3.5.7 3 - 61 (2) When the dialog shown in the figure below appears, click the button to select Size and Height from the list and check the applicable detector. Press the OK button to confirm the settings and close the dialog box. Fig. 3.5-31 Set Window 3.
3.5 Operation for Image Observation 3 - 62 The figure below illustrates the Stage tab on the Operation Panel: Fig. 3.5-32 Stage Operation Panel Disp button Start stage history function Tilt scrollbar & coordinate box Tilt axis coordinate display & spec.
3.5.7 3 - 63 3.5.7.5 X, Y, R Axis Operation (1) Manual operation using trackball Stage moves in the direction of trackball rotation. Fig. 3.5-33 Trackball • Amount of stage motion by ball rotation is linked with magnification. To move a long distance, it is advisable to lower the magnification.
3.5 Operation for Image Observation 3 - 64 (4) Mouse operation on the scanning image Operation of all 5 axes by using the mouse is available. Refer to <3.
3.5.7 3 - 65 (8) Position display The size of the specimen, its present position and rotation angle are displayed on the XYR position monitor area. Fig. 3.5-35 Position Display When sample and stage coordinates are selected, the following scale values apply; the example below applies to a ∅ 15 mm sample.
3.5 Operation for Image Observation 3 - 66 3.5.7.6 Z and Tilt Axis Operation (1) Operation using the Z/TILT box of the Stage tab on the Operation Panel (coordinates specifications) When moving Z and Tilt axis by specifying a set of coordinates, use the Z and Tilt scrollbars to specify coordinates, and then click the GO button.
3.5.7 3 - 67 3.5.7.7 Mouse Operation of Stage on the Scanning Image Use the Mouse Mode on the Option menu or the Mouse Mode on the popup menu to activate the stage and image shift operation mode (the condition in which the Stage Move tool shown in the figure below is displayed).
3.5 Operation for Image Observation 3 - 68 (2) Dragging the image At the outside of tools, where the mouse pointer is MOVE mark , place the mouse cursor at a start point on the scanning image. Move the mouse to an end point holding down the left button (a red line is drawn), and release it.
3.5.7 3 - 69 (5) Electrical image shift The Electrical Image Shift function moves the scanning image electrically. It is useful at high magnifications where mechanical stage motion is not desired. To move the image with Electrical Image Shift, use the same operation as in the above (2) but use right button instead of left button.
3.5 Operation for Image Observation 3 - 70 (7) R axis continuous driving On the rectangles of the R axis tool, mouse pointer will be changed as shown below. Fig. 3.5-42 R-axis Moving Tool (continuous move) Press down the left button on one of the rectangles.
3.5.7 3 - 71 (9) Z axis continuous driving On the rectangles at the top and bottom of Z-axis tool, mouse pointer will be changed as shown below. Fig. 3.5-44 Z-axis Moving Tool (continuous move) Press down the left button on one of the rectangles. The stage will go up or down continuously while holding the button down.
3.5 Operation for Image Observation 3 - 72 (11) Tilt axis continuous driving On the rectangles at the top and bottom of Tilt axis tool, mouse pointer will be changed as shown below. Fig. 3.5-46 Tilt-axis Moving Tool (continuous move) Press down the left button on one of the rectangles.
3.5.7 3 - 73 (12) Rotation adjust tool The rotation adjust tool is convenient for adjusting an image to horizontal. Move the mouse at about the center of the tool. Mouse pointer will be changed to array mark . Press down the left button and move the tool to fit an end to the inclined line part to be rotated to horizontal.
3.5 Operation for Image Observation 3 - 74 (13) To move tools The Z, Tilt and R adjust tools can be placed anywhere in the scanning image. The mouse pointer will be changed as shown below when mouse i.
3.5.7 3 - 75 3.5.7.8 Position Memory Function The stage coordinates, both absolute and relative, can be memorized and retrieved. 200 absolute coordinates (20 points on each of 10 pages) and 20 relative coordinates can be saved in total. Three axes, X, Y, and R, can be registered.
3.5 Operation for Image Observation 3 - 76 (4) Registration of relative stage coordinates by direct input (a) Select page Rel and Number . (b) Input coordinates in X , Y and R boxes using the keyboard followed by the Enter key. Input any comments in the Comment box and click Save .
3.5.7 3 - 77 3.5.7.9 Stage History Function Displays present position and registered positions on a specimen picture with trajectory lines showing the order of registration. Click the Disp button in the XYR block on the Stage tab. The Stage History dialog box will open.
3.5 Operation for Image Observation 3 - 78 (4) Deleting registered points To delete points individually, select the point and click the Delete button. To delete all points, click the Clear button. (5) Saving and reading history data To save displayed position data, click the Save button.
3.5.7 3 - 79 3.5.7.10 Image Navigation The Image Navigation function moves the stage to the position pointed out on the navigation images. Captured SEM images at low magnification as well as imported externally created images, such as optical microscope images or drawings, are available as navigation images.
3.5 Operation for Image Observation 3 - 80 NOTICE: • Use the navigation image function at magnification lower than 5000 × . Capturing of higher magnification image is not allowed.
3.5.7 3 - 81 (5) Alignment operation To use imported images for navigation, alignment operation is necessary. Select two alignment points on a navigation image. These two points shall be separated left - right or upper - lower side of the image center.
3.5 Operation for Image Observation 3 - 82 NOTICE: • The two alignment points on the navigation image shall be separated left - right or upper - lower side of the image center. The navigation image is divided into four areas with cross marker in the alignment operation.
3.5.7 3 - 83 3.5.7.11 Rotation/Tilt Eucentric Function and Calibration The rotation eucentric function serves to keep the present field of view after specimen rotation. It calculates XY position that will recover the present viewing position after rotation axis is driven using the present XY position and the angle to be rotated.
3.5 Operation for Image Observation 3 - 84 NOTICE: For this auxiliary operation, a flat specimen should be used and the specimen height should be measured as accurately as possible using the height gauge. This series of operations will automatically move the R, Z, and T-axes of the stage.
3.5.7 3 - 85 (c) Click the Reset button. The following message will appear. Fig. 3.5-56 Confirming the Operation Method As described in the message, bring the structure of interest to the image center at a magnification of about 500 × , then click Enter button of Tilt 0 deg.
3.5 Operation for Image Observation 3 - 86 (4) Calibration is necessary when accuracy is degraded. Carry out the following three calibrations when accuracy of eucentricity is degraded. (a) Rotation center It measures the deviation of the rotation center from the beam irradiation point.
3.5.7 3 - 87 5) The specimen rotates to an angle of 90°. Again bring the point of interest to the center and click Enter button. 6) In the same way, each click of Enter button rotates the specimen 45° at a time. Bring the point of interest to the center each time and then click Enter .
3.5 Operation for Image Observation 3 - 88 3) Click the Reset button. The following message indicating steps of operation will be shown. Fig. 3.5-60 Verifying the Operating Method As described in the message, bring the point of interest to the image center at a magnification of about 500 × , then click Enter button of Tilt 0°.
3.5.7 3 - 89 3) Click the Reset button. The following message indicating steps of operation will be shown. Fig. 3.5-62 Verifying the Operating Method Upon closing the message, the Z-axis will be driven to 30 mm. Carry out focusing and set magnification to about 500 × , then bring the point of interest to the image center and click Enter button.
3.5 Operation for Image Observation 3 - 90 3.5.7.12 Stopping Stage and Returning to Previous Stage Position If an incorrect position specification must be canceled when the stage is moving to a coordinate specification or the stage keeps moving and does not stop for some reason, click the !STOP button.
3.5.7 3 - 91 (2) Observable range The following page shows the X and Y observable ranges by specimen size, and mutual restrictions on the Z and Tilt axes at the Standard height, and the movable range for the Tilt axis as a function of specimen height by specimen size.
3.5 Operation for Image Observation 3 - 92 Fig. 3.5-65 X and Y Movable Ranges for the Type II Stage by Specimen Size (when an optional detector is not used) ∅ 77 sample 77 mm ∅ sample （79,0） .
3.5.7 3 - 93 Type II stage Movable range of the Tilt axis with respect to Z values st Standard specimen height by specimen size (when an optional detector is not used) • Restrictions on positive angles of tilt Fig.
3.5 Operation for Image Observation 3 - 94 • Restrictions on positive angles of tilt (when an optional detector is not used) Fig. 3.5-67 Tiltable Angles with respect to Z-axis Positions (Type I Stag.
3.6.1 3 - 95 3.6 Saving and Recording Images 3.6.1 Saving and Recording Images It is possible to record images using conventional photo films and printers, and/or as image data files (to disk drive).
3.6 Saving and Recording Images 3 - 96 3.6.2 Preparing Images for Recording The source of images to be recorded is frozen images in the image memory except for direct photographing. (1) Freezing an image (a) Using Run/Freeze button Scanning image will be frozen.
3.6.3 3 - 97 (b) Data Entry When recording scanning images, graphics and texts written using Data Entry function are recorded as they are shown on the scanning image.
3.6 Saving and Recording Images 3 - 98 • 640 x 480: Low resolution Advantageous for small image sizes and faster acquisition times. • 1280 x 960: Medium resolution Adequate image quality with reasonable acquisition times. Recommended for usual operation.
3.6.3 3 - 99 (2) Selecting the number of integration frames and the speed of slow scanning capture Either click the Capture Setting button ( ) in the upper right section of the Capture button on the Control Panel or right-click the Capture button to bring up a list of capture settings.
3.6 Saving and Recording Images 3 - 100 Fig. 3.6-3 No Link to a Scanning Capture Link • The Scanning Speed Link is not check-marked: Irrespective of the current scanning speed, the capturing process is executed at the scanning rate selected on the TV/Fast/Slow radio button.
3.6.3 3 - 101 (3) Image Capture To start Image Capture, click the Capture button on the Control panel . Image capture can be started either in RUN or FREEZE status. (4) Displaying a captured image After the scanning is finished, the Captured Image window opens and the captured image is added in the list as a thumbnail.
3.6 Saving and Recording Images 3 - 102 3.6.4 Saving a Scanning Image (Direct Save) The scanning image, simply frozen or captured, can be saved. Resolution of saved image is 1280 x 960 or 640 x 480 depending on present screen mode when saved just after freezing the image.
3.6.4 3 - 103 Fig. 3.6-6 Settings Window Record Tab In the above case, resulting file names are [S3400_i001.TIFF], [S3400_i002.TIFF] and so on. If the Auto Increment is not set when the Data Number Save is selected, Following message will be shown. Fig.
3.6 Saving and Recording Images 3 - 104 (3) Input INFORMATION. User Name , Sample Name , Keywords can be selected from already used names or created newly. Entry of these items is not necessary but useful for selection of files in the SEM Data Manager .
3.6.5 3 - 105 3.6.5 Saving Captured Images Captured images can be saved using the Save button in the Captured Image window. To save captured images, select an image by clicking a thumbnail or multiple images by clicking thumbnails and pressing Ctrl key.
3.6 Saving and Recording Images 3 - 106 3.6.6 Taking Photographs (Option) To take a photograph of an image, use one of two modes: Direct Photo mode and Memory Photo mode. Direct Photo: Direct Photo mode takes a photograph while directly scanning the electron beam.
3.6.6 3 - 107 (1) Photo Speed • Direct Photo Recommended selection is 80 seconds. Use a 40-second scan for beam-sensitive specimens, or to shorten recording time. A selection of 160 or 320 seconds is recommended for recording X-ray mapping images. Number of scanning lines is shown below the selection box.
3.6 Saving and Recording Images 3 - 108 3.6.6.2 Direct Photo Recording Direct Photo mode takes a photograph while directly scanning the electron beam. It generally shows better image quality compared to the Memory Photo mode. To start recording, click the Photo button on the Control panel or select the Direct Photo command from the File menu.
3.6.7 3 - 109 3.6.7 Recording Data Display with Images Text and graphics drawn using Auto Data Display and Data Entry function are embedded into image data as follows.
3.6 Saving and Recording Images 3 - 110 3.6.7.2 Captured Image Recording Using Buttons on the Captured Image Window When images are captured, text and graphics shown on the image at the moment of starting capture are memorized as the data for the captured image.
3.6.7 3 - 111 3.6.7.3 Record Captured Images without Embedding Text or Graphic Data When the Embed into Image checkbox on the Captured Image window is not checked, captured images are recorded without embedding text or graphic data even if the data has been memorized at the moment of capture.
3.8 Shutting Down 3 - 112 3.8 Shutting Down 3.8.1 Turning High Voltage Off (1) Close opening dialog windows. Save data if necessary. (2) Click the Acceleration Voltage OFF button on the Control Panel to turn off the acceleration voltage.
3.8.3 3 - 113 3.8.3 Withdrawing the Specimen The following procedures can be employed to withdraw a specimen from the specimen chamber: (1) On the EVAC panel located on the front side of the main unit, press the AIR button. Alternatively, click the AIR button located in the upper right section of the Control Panel.
3.8 Shutting Down 3 - 114 (3) If the vacuum mode is set to Low Vacuum ( VP-SEM ) on the Operation Panel, change it to High Vacuum ( SEM ). (4) Grasp the handle. Insert the specimen stage into the specimen chamber. On the EVAC panel on the front side of the main unit, press the EVAC button.
3.8.5 3 - 115 If the processing is not completely finished, the following message appears. If this happens, take appropriate action: • Some of the captured images still need to be saved: [There are unsaved images in the capture area. Do you want to save them?] Click "Yes" to save.
3.9 Other Functions 3 - 116 3.9 Other Functions In addition to the basic operations described above, the system provides various functions, which should be employed depending on the particular application to be accomplished. 3.9.1 Screen Mode Screen modes, Full , Dual or Small are selectable with SCREEN MODE window of the operation panel.
3.9.1 3 - 117 (2) Small screen mode Scanning image size is reduced to half. Image resolution is 640 × 480 pixels. Faster scanning rate compared with Full screen mode may result in better image quality in some cases. Magnification of displayed image is about 1.
3.9 Other Functions 3 - 118 • Run/Freeze operation Using the buttons located in the right and left frames at the top of the screen, Panels A and B can independently be toggled Run/Freeze. To toggle Run/Freeze both for Panels A and B at the same time, use the button at the center.
3.9.2 3 - 119 3.9.2 Split Screen and Dual Mag Mode In the split screen/dual mag mode, the screen can be split two ways to display dissimilar signal images, such as a secondary electron image and a backscattered electron image on the right and left screens (split screen).
3.9 Other Functions 3 - 120 3.9.3 Signal Selection and Color Mixing The S-3400N has three external signal channels for optional signal detectors and one X-ray signal input, in addition to the standard secondary electron detector. When these detectors are installed, you can select a signal from among these detectors.
3.9.3 3 - 121 (2) Signal selection in Dual mode Fig. 3.9-10 Enhanced Control Panel for Dual Mode In the Dual mode, use the left box to select Panel A (left image), and the right box to select Panel B (right image) signals.
3.9 Other Functions 3 - 122 (4) Color Mixing mode (available in Dual mode) When different signals are assigned to the right and left screens, this feature assigns different colors (R/G/B) to the two signals to display a mixed color image. The image on the right will be in color.
3.9.4 3 - 123 3.9.4 X-ray Analysis Mode Scanning modes for analysis is available in the Full and Small screen modes. Use the SCAN MODE block in the operation panel. Fig. 3.9-13 SCAN MODE Window (1) Normal mode Normal image observation mode. Click this to return from analysis modes.
3.9 Other Functions 3 - 124 Fig. 3.9-14 LINE PROFILE SIGNAL Window The Run/Freeze button changes run and stop alternately. In the Freeze state, the line profile of an image is displayed clearly. Recommended procedure for taking a photograph is: 1) Observe an image in Position Set mode at Slow2 or slower scanning speeds.
3.9.4 3 - 125 (b) Spot Analysis mode When the Spot Analysis button is clicked in Position Set mode, the scanning image is frozen and the electron beam is positioned at the cross point of the cursor. You can make analysis of this point. The cursor can also be moved in this mode with the same operation as above.
3.9 Other Functions 3 - 126 3.9.5 Signal Processing Processing of the image signal is available on a live image. For SE signal, digital processing, spatial filtering, gamma control and inversion can be applied. In addition, analog signal processing is available for an optional detector signal.
3.9.5 3 - 127 (c) Edge Enhance (1/2) Similar but stronger effect than the above Sharpen . (d) Invert Inverse contrast. (e) Gamma (-5 to +5) Plus value of Gamma suppresses white contrast and enhances dark part. Minus value increases contrast. NOTICE: 1.
3.9 Other Functions 3 - 128 3.9.6 Operating Condition Memory The Operating Condition Memory is provided for saving and loading conditions of the electron optical column. If the column is aligned and a specimen is observed at a particular accelerating voltage, the same condition can be reproduced by saving and loading the condition memory.
3.9.6 3 - 129 (2) Loading a Set of Operating Conditions Use the following steps to load a set of operating conditions. (a) Open the Setup dialog window Select Condition Load from the Operate menu, or click the Setup button in the tool button section of the Operation panel and select Op.
3.9 Other Functions 3 - 130 3.9.8 Data Entry Function Use the DATA ENTRY window on the Operation panel for drawing graphics and texts on the scanning image display. For saved image, use the same function provided in the SEM Data Manager . Fig. 3.9-22 Data Entry Window (1) Function of tool buttons (a) Stop data entry Stops data entry.
3.9.8 3 - 131 (e) Arrow Draws single-head arrow marks on the image. (f) Double head arrow Draws double-head arrow marks on the image. (g) Inner dimension mark Draws inner dimension arrow marks on the image. (h) Outer dimension mark Draws outer dimension marks on the image.
3.9 Other Functions 3 - 132 (q) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicated with gray color and black background.
3.9.8 3 - 133 (5) Recording entry data with images According to entry data, recording refer to < 3.6.7 Recording Data Display with Images>. NOTICE: The Auto Data Display mode saves the data displayed on the screen together with the image itself if the [Embed into Image] checkbox is turned ON in the Record tab of the Setup window.
3.9 Other Functions 3 - 134 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation (1) Raster Rotation Scanning of electron beam can be rotated within a range of -200° to +200°, using the slider. This allows observation of an image at the best orientation.
3.9.9 3 - 135 Fig. 3.9-24 TILT COMPENSATION Window Use the following steps to focus the entire field. (a) Set the Raster Rotation angle at 0 . In this condition, direction of the scanning beam coincides with the specimen tilting direction. (b) Check the Dynamic Focus box and focus the image so that the center of the image is focused.
3.9 Other Functions 3 - 136 3.9.10 Printing Images Using Report Generation Function The scanning image or saved image can be printed using a Windows-supported printer. This function allows you to lay out and print one or more images on paper with a specified size.
3.9.10 3 - 137 Fig. 3.9-26 Image Setting Menu • Format This allows you to specify whether the file name of the image to be printed should be printed independently in the upper left portion of the image or it should be printed as part of the image attribute section.
3.9 Other Functions 3 - 138 Images can be added from the Add tab. Fig. 3.9-27 Add Tab (4) Adjusting layout and image size To adjust image size on the sheet, select an image by clicking it and drag the lower-right corner. To move an image, drag it using the mouse.
3.9.10 3 - 139 (5) Text information • Header and Footer On the Setting tab, enter the header and footer texts. Both are printed on the sheet when Header and Footer boxes are checked.
3.9 Other Functions 3 - 140 The comment placed on the sheet can be moved by mouse dragging. To edit a comment, double-click it. The comment input dialog window will open and you can edit the comment on it. To delete a comment, highlight the comment with the mouse, and then press the Delete button on the keyboard.
3.9.10 3 - 141 (8) Additional functions These functions allow you to perform image contrast compensation on the layout, fetching images that are registered in SEM Data Manager , and saving and reading paper formats. • Batch Print Fig. 3.9-34 Batch Print Window By clicking the Add button, you can specify an image file and add it to the list.
3.9 Other Functions 3 - 142 • Layout template The Layout Print application provides predefined report templates. Clicking the button to the right of the New button brings up the window shown above, from which a desired layout can be selected: Fig. 3.
3.9.11 3 - 143 3.9.11 Copy Image The Copy Image command copies the scanning image to the Windows clipboard in a size of 1280 × 960 pixels ( Full screen) or 640 × 480 pixels ( Small or Dual screen). The copied image can be used in any application software such as a word processor or image processor by pasting it from Windows clipboard.
3.9 Other Functions 3 - 144 3.9.13 Oblique Image An oblique (or bird's-eye-view) image is formed from a scanning image. To open the Oblique window, select the Oblique command from the Analysis . Fig. 3.9-38 Oblique Menu (1) Setting properties Check the Image box to show reference image together with oblique image.
3.9.14 3 - 145 3.9.14 Optional Setting Operation environments are set on the Optional Setup dialog window. To open the Optional Setup dialog window, select the Optional Setup command from the Option menu or click the Opt Setup button on the tool button area of the Operation panel.
3.9 Other Functions 3 - 146 (e) PRINT SIZE This box allows you to specify an image size on the application if an image saved in either TIFF or BMP format is assigned in an application that supports X Resolution/Y Resolution that are stored in a file in the S-3400.
3.9.14 3 - 147 (3) Stage tab (a) MOTOR DRIVE STAGE Selects enable ( On ) or disable ( Off ) for motor driven stage (5 axis motorized stage of type 2). Set it at Off when the motorized stage is removed or not used, for example when using the cryo-stage.
3.9 Other Functions 3 - 148 Fig. 3.9-41 Mouse Op. Tab (5) Selecting a vacuum mode when the application is started: Evacuation tab/ Evacuation menu Fig.
3.9.14 3 - 149 • Selecting a startup vacuum mode This box allows you to specify the particular vacuum mode to be in effect when an application is started. The Previous Mode recalls the vacuum mode that was used previously. The SEM option starts the High Vacuum mode.
3.9 Other Functions 3 - 150 3.9.15 Password Setting Use the Password Setting dialog window for setting or changing the password of the login name for current user. To open this dialog window, select the Password Setting command from the Option menu. Fig.
3.9.16 3 - 151 Use the following steps for setting password protection. (1) Login with the name "S-3400". (2) Open the Login Setting dialog window by selecting the Login Setting command from the Option menu. (3) Select the "S-3400" in the Login Name list.
3.9 Other Functions 3 - 152 3.9.17 Restoring DB S-3400N control program utilizes database files for storing conditions or data. If an error occurs in a database file, it cannot be accessed normally and a message "Database not found" will be shown.
3.9.18 3 - 153 3.9.18 User Dependent Operation Condition Memory The operating conditions just before shutting down S-3400N operation program are memorized and reproduced at the next starting up. Most of operating conditions are memorized individually to each login user name.
3.9 Other Functions 3 - 154 3.9.19 Password Locking of Windows Password locking of Windows is possible using screen saver function. However, it can not be used when operating S-3400N program because t.
3.9.20 3 - 155 3.9.20 Downloading Stage Control Program Upgrading of specimen stage control program can be carried out by user. However, it shall be operated only by manufacturer's or service engineer's request. To start stage program download, select Stage Program Download from Option menu.
3.9 Other Functions 3 - 156 Set the CD-ROM and click OK . Program downloading will start. Following messages are shown on the message area of the above dialog window. Fig. 3.9-54 Writing The above message comes on while a write operation is in progress.
3.10.1 3 - 157 3.10 Image Quality The following are references for getting better image quality. 3.10.1 Accelerating Voltage and Image Quality There is a multitude of accelerating voltages to choose. Resolution, image quality, charging and other effects are greatly determined by the selected accelerating voltage.
3.10 Image Quality 3 - 158 3.10.2 Probe Current Setting and Image Quality On the ELECTORION BEAM block, image quality can be adjusted by specifying an appropriate probe current level. An appropriate setting should be selected in reference to the table below.
3.10.2 3 - 159 Table 3.10-3 Objective Lens Movable Aperture and Image Quality Stop No. 1 2 3 4 Aperture diameter （ µm ） 150 80 50 30 Focal depth Shallow Deep Probe current High Low Resolution Low High Application X-ray analysis on low accelerating voltage Observation and normal X-ray analysis Observations requiring a great focal depth See 3.
3.11 Using SEM Data Manager 3 - 160 3.11 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, and acquired SEM images are registered in the table automatically when saving.
3.11.2 3 - 161 (6) Opening of image files, image processing or other operation on the SEM Data Manager need large PC power. If SEM operation, such as image capturing is carried out while above processing is running, it may cause some incorrect results.
3.11 Using SEM Data Manager 3 - 162 (2) Database fields The following fields are created for each registered image data. • User: Create a user name on the SEM Data Manager.
3.11.2 3 - 163 3.11.2.2 Menu and Tool Buttons The following picture shows an example where image is open. Fig. 3.11-2 SEM Data Manager Window Functions of Menu commands are as follows. Corresponding tool buttons are shown in parentheses. (1) File menu • Save as ( ) Save the image on the display area.
3.11 Using SEM Data Manager 3 - 164 • Remove List Remove the image from database. Image file is not erased. • Delete Delete the image. Image file is erased. • Rename Rename the image file. • Layout Print ( ) The Report Generation window opens for printing images.
3.11.2 3 - 165 (4) View menu • Image Maximize ( ) Display the image in full desktop. Menu and tool buttons are available on the maximized window. • Zoom ( ) Enable or disable image enlargement by clicking on the image. Mouse pointer is the mark when it is enabled.
3.11 Using SEM Data Manager 3 - 166 • Image Processing － Processing ( ) Open Image Processing dialog window. Several image processings including spatial filtering are available on it. • Image Processing － Noise Reduction to Flip Vertical Execute each of image processing.
3.11.3 3 - 167 3.11.3 Operation 3.11.3.1 Registering Images on SEM Data Manager Database (1) Saving images on SEM On the Save Image dialog window, put a check mark in SDM Register box to register images when saving. Fig. 3.11-3 Save As Window Parameters for registering image are in the INFORMATION area.
3.11 Using SEM Data Manager 3 - 168 (2) Registering images stored on disks To register already saved images to the SEM Data Manager database, use Add from File command in Database menu or the Add from File button on the tool bar. The following Add from File dialog window will open.
3.11.3 3 - 169 The above example has two User names (P-A01 and P-A02) and data tree is opened in the order of Folder - Image format - stored date. To open the tree to a lower level, click + button and to close the lower tree, click - button. To open image files in the image file list, click a folder mark.
3.11 Using SEM Data Manager 3 - 170 3.11.3.4 Image Information Information on the presently selected image is shown on the image information area. Fig. 3.11-7 Image Information Window You can edit Sample , Comment , and Keywords . Click Edit button to edit the above items.
3.11.3 3 - 171 3.11.3.6 Data Entry Use Data Entry function for drawing shapes and writing texts on the image. The Data Entry toolbox will open by Data Entry command in Processing menu or Data Entry button.
3.11 Using SEM Data Manager 3 - 172 (e) Double head arrow Draw double-head arrow marks on the image. (f) Inner dimension mark Draw inner dimension arrow marks on the image. (g) Outer dimension mark Draw outer dimension marks on the image. (h) Inner dimension mark with measurement Draw inner dimension marks with measurement on the image.
3.11.3 3 - 173 (n) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicated with gray color and black background. They can be moved and re-positioned by mouse dragging.
3.11 Using SEM Data Manager 3 - 174 3.11.3.7 Contrast Conversion Gray scale conversions and pseudo-coloring are available. To apply conversions to the image, open the Contrast Conversion dialog window by clicking the Contrast Conversion button on the tool bar or use Contrast Conversion - Conversion command in Processing menu.
3.11.3 3 - 175 (4) Contrast inversion The Negative button inverses black and white. (5) Gamma correction A Gamma value of larger than 1 enhances dark area and suppresses highlight area. A value smaller than 1 suppresses dark area and enhances highlight area.
3.11 Using SEM Data Manager 3 - 176 (a) Color Mode and Color Order • Off : No coloring • Color1 or Color2 Convert gray scale value to RGB color as in the following figures. The L, M and H represent R, G or B color specified by Color Order setting.
3.11.3 3 - 177 3.11.3.8 Image Processing Digital image processing for noise reduction, increase of sharpness and detail enhancement is available. Open the Image Processing tool window by Image Processing - Processing command in Processing menu or Processing button on the tool bar.
3.11 Using SEM Data Manager 3 - 178 (6) Edge Enhance Applies Laplacian filter. It is effective for edge enhancement. (7) Edge Detect Applies Laplacian filter. It is effective for edge detection. (8) Line Segment Extracts line segment. (9) Emboss Emboss effect.
3.11.3 3 - 179 3.11.3.9 Color Mixing Creates color composite image using two original images. It is applicable for color composition of two different signal images, or stereo imaging using colored glasses. Positional alignment of two original images is possible.
3.11 Using SEM Data Manager 3 - 180 Select color for source images. Check Color and select R , G or B button. Select a mixing mode in the mixing selection box. • ADD : Add A and B source images. Use this when two images are of different single colors.
3.11.3 3 - 181 3.11.3.10 Printing Images Use Layout Print command in File menu or Layout Print button on the tool bar. The Report Generation window will open with the presently selected image on the layout sheet. Double-click a thumbnail image to add it to the layout sheet.
3.11 Using SEM Data Manager 3 - 182 3.11.3.12 Batch Operation of Image Files Two or more image files can be operated at once. Use Batch Process command in Database menu or Batch Process button on the tool bar. The Batch Process dialog window will open.
3.11.3 3 - 183 (2) Source list Image files included in the present opening folder are listed here. Files can be selected from this list for one of the aforementioned actions.
3.11 Using SEM Data Manager 3 - 184 3.11.3.13 Slide Show Use the Slide Show controller for viewing images in continuous slide motion. To open the Slide Show controller, use Slide Show command in View menu or Slide Show button on the tool bar. Fig. 3.11-20 Slide Show Window 3.
3.11.3 3 - 185 (2) Thumbnail Directory The default directory of thumbnail images is "C:WindowsTemp". It can be set here at any directory. If the thumbnail directory is changed, all of existing image thumbnails are re- created in the new directory when the images are opened.
3.11 Using SEM Data Manager 3 - 186 3.11.3.15 Optimizing and Repairing Database File Use Database Utility command in Tool menu. The following dialog window will open.
4.1.1 4 - 1 4. MAINTENANCE When attempting maintenance of this instrument, observe the following cautionary instructions. (1) Read through the maintenance procedures contained in this manual, and then carry out maintenance as described. (2) Avoid disassembling/reassembling or repairing any part that is not described in the maintenance procedures.
4.1 Maintenance of Electron Optical Column 4 - 2 Fig. 4.1-2 Accelerating Voltage Setup Dialog (3) Either press the AIR switch on the Evacuation Control Panel or press the AIR evacuation control button located on the right side of the observation screen Control Panel.
4.1.1 4 - 3 CAUTION: The gun housing should be lifted by both hands until it stops. If the gun housing is released halfway, your fingers might be caught in it. NOTICE: Take care not to leave fingerprints on the internal vacuum parts for preventing gas degassing.
4.1 Maintenance of Electron Optical Column 4 - 4 (7) If the area around the center of the anode hole is dirty, the screwed-in anode should be removed. As described in (6) above, clean the area around the hole on the anode plate, and then install the cleaned anode.
4.1.1 4 - 5 (9) Check to see that the Wehnelt is securely fitted. After that, use a spray or blower to completely remove any lint and other debris attached to the filament assembly. Fig. 4.1-10 Cartridge Filament Assembly (10) Attach the filament assembly to the electron gun.
4.1 Maintenance of Electron Optical Column 4 - 6 NOTICE: Adequate care should be taken to prevent any dust particles from intruding into the electron gun unit or the inside the column. (12) Either press the EVAC switch on the Evacuation Control Panel or the EVAC control button located on the right side of the Observation Screen Control Panel.
4.1.2 4 - 7 (1) On the Setup window, set the numerical value in Filament in the electron optical system Setup tab to 0. Fig. 4.1-14 Filament Setup Menu (2) If the accelerating voltage is ON , click OFF to shut it off.
4.1 Maintenance of Electron Optical Column 4 - 8 (5) Pull out the entire assembly for the objective lens movable aperture. Fig. 4.1-17 Removing the Objective Lens Movable Aperture Assembly (6) Using a precision screw driver, remove the retaining screw that holds down the objective lens movable aperture plate.
4.1.2 4 - 9 NOTICE: Objective lens movable aperture plates can be used on either side. (8) Referring to Figure 4.1-20, align the positioning slot for the objective lens movable aperture plate with the positioning slot for the aperture base. Place the aperture holder over them, and lightly fasten the aperture holder retaining screw.
4.1 Maintenance of Electron Optical Column 4 - 10 (11) Securely insert the advancing mechanism for the objective lens movable aperture. Fasten the W-point screw with a hexagon wrench to secure the advancing mechanism.
4.1.3 4 - 11 (1) If the accelerating voltage is ON, click OFF to shut it off. Fig. 4.1-24 Accelerating Voltage Setup Dialog (2) Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control button located on the Observation Screen Control Panel.
4.1 Maintenance of Electron Optical Column 4 - 12 (4) Turn the knob for the BSED (backscattered electron detector) mechanical unit to pull out the BSED detector, and insert the aperture replacement tool through the stage opening to remove the orifice unit.
4.1.3 4 - 13 ① Before removal ② Aperture replacement tool and the orifice unit ③ Turn the orifice unit and the tool together ④ Removal Fig. 4.1-28 Removing the Orifice Unit (2) To remove the o.
4.1 Maintenance of Electron Optical Column 4 - 14 IMPORTANT: Be careful to avoid any damage to the surface of the scintillator in the specimen chamber or to the backscattered electron detector.
4.1.4 4 - 15 (7) Replace the aperture with a new one. (8) After the aperture has been replaced, perform Steps (4) - (5) in reverse to re-assemble the unit. When turning the knob clockwise and inserting the BSED detector, turn it until the BSED detector catches the orifice unit and stops.
4.1 Maintenance of Electron Optical Column 4 - 16 EVAC Panel Control Panel Fig. 4.1-33 Evacuation Control Panel (3) Lift the entire electron gun unit to the left and tilt it. Fig. 4.1-34 Removing the Electron Gun Unit CAUTION: When lifting the entire electron gun unit, be sure to use both hands, and move it until it stops.
4.1.4 4 - 17 (5) Using a special pair of tweezers, pull out the condenser aperture. Fig. 4.1-36 Removing the Condenser Aperture (6) Referring to Fig. 4.1-36, loosen the pipe and the pipe holder, and remove the single-hole mesh aperture. (7) Install a new aperture.
4.1 Maintenance of Electron Optical Column 4 - 18 Fig. 4.1-37 Condenser Aperture Assembly Holder 50E-1677 Pipe 1 52E-6526 Holder ring 50E-1493 Aperture 535-1289 Pipe holder 52E-6531 Pipe 2 52E-6527 Pipe 3 52E-6528 Pipe 4 52E-6529 41.5 mm 38.0 mm 87.0 mm 27.
4.1.5 4 - 19 4.1.5 Cleaning of Aperture Plates (1) Use the vacuum evaporator for heating aperture plates. For handling of the vacuum evaporator, refer to the instruction manual of the evaporator. (2) Mount the molybdenum board in the vacuum evaporator.
4.1 Maintenance of Electron Optical Column 4 - 20 4.1.6 Ultrasonic Cleaning with Organic Solvent CAUTION: When handling organic solvent (volatile solvent), take the following points into consideration to avoid the danger of injury or explosion caused by ignition.
4.2.1 4 - 21 4.2 Maintenance of Rotary Pump NOTICE: Instruments shipped to European area where CE marking conformity is necessary are not provided with the rotary pump. Also according to the configuration of the apparatus, the rotary pump is not provided even when shipped to outside of the European area.
4.3 Maintenance of Air Compressor 4 - 22 4.3 Maintenance of Air Compressor NOTICE: Instruments shipped to European area where CE marking conformity is necessary are not provided with the rotary pump. Also according to the configuration of the apparatus, the rotary pump is not provided even when shipped to outside of the European area.
4.3.1 4 - 23 NOTICE: 1. The mark " ○ " indicates the time period after the start of operation or replacement of the part. The mark " ● " shows the time point for part replacement. 2. The above table shows the standard inspection cycle.
4.3 Maintenance of Air Compressor 4 - 24 4.3.2 Troubleshooting of Air Compressor If the air compressor becomes faulty, reference should be made to the following table. Symptom Probable Cause Remedy Air compressor rotates. Drain or stop valve leaks. Retighten.
4.3.3 4 - 25 4.3.3 Location and Functions of Major Components Fig. 4.3-1 Compressor Drain cock Air tank Motor Push solenoid (single phase type only) Suction filter Removes dust and dirt in suction air. Safety valve Relieves compressed air at abnormal rise in pressure.
4.4 Troubleshooting 4 - 26 4.4 Troubleshooting 4.4.1 The Evacuation System does not Run If the evacuation system fails to run or the evacuation system does not proceed, the following items should be c.
4.4.2 4 - 27 4.4.2 The Vacuum Level in the Specimen Chamber does not Rise If the evacuation process does not end in 5 minutes after the evacuation process for the specimen chamber was started by flipping the EVAC button on the EVAC Panel keeps blinking, it is an indication of an error, and an error message appears on the PC operation screen.
4.4 Troubleshooting 4 - 28 4.4.4 When Image is not Shown on Screen If an image does not appear on the screen or if it is difficult to focus the image, check the following.
4.4.5 4 - 29 4.4.5 When Image is Very Noisy There may be three types of noise on scanning images. The first is a snow noise that appears uniformly on the image.
4.4 Troubleshooting 4 - 30 The second is random noise caused by unstable probe current or unstable detector. For example, bright spots or bright or dark lines appear when emission current is unstable or the scintillator of the secondary electron detector has been damaged.
4.4.7 4 - 31 4.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily When auto focus or auto stigma does not produce sharp images, check the following. (1) Open the Alignment dialog window and start Aperture Alignment mode. If image is wobbling, carry out aperture alignment.
4.4 Troubleshooting 4 - 32 4.4.9 When PC has Hung Up If the PC locks up during system operation, close Windows, shut down the system, and restart it. Although the program can be ended and the system restarted, that approach may result in unstable system behavior.
4.5 4 - 33 4.5 What to Do in the Event of a Power Outage or the System must be Shut Down Completely for a Long Time (1) Perform routine shutdown operations (remove the specimen, shut down Windows, and turn off the power). See <3.8 Shutting Down>.
4.7 Caution of Maintenance 4 - 34 4.7 Caution on Maintenance On maintenance of the instrument, the following cautions must be observed. (1) Follow the maintenance procedures described in this manual after a full understanding of it. (In particular, carefully read "PRECAUTIONS ON HANDLING" at the beginning of the manual.
4.8.1 4 - 35 (2) Set the acceleration voltage to 5 kV. With the Filament Image mode on (with an elliptic image displayed), set the Probe Current to 100. Make sure that the objective lens movable aperture is "0". (3) Set the Filament to approximately 90 (saturation condition).
5.1 5 - 1 5. REPLACEMENT P ARTS 5.1 Consumables The items shown in Table 5.1-1 should always be on hand for normal operation. Table 5.1-1 Consumables Part No.
5.2 Replacement Parts 5 - 2 5.2 Replacement Parts The items below should be prepared in the necessary quantities. Table 5.2-1 Replacement Parts Part No.
5.3 5 - 3 5.3 Spare Parts The items shown in Table 5.3-1 must be prepared for long-term operation. Select a proper quantity in consideration of the application of each part.
6.1.1 6 - 1 6. ACCESSOR Y OPERA TION 6.1 Model S-5080 Auto-Camera (Option) This camera is used for taking photographs of images displayed on the screen of CRT dedicated for photographing. You can use the following kinds of film by attaching various units consisting of lenses and adapters (see Fig.
6.1 Model S-5080 Auto-Camera (Option) 6 - 2 Type 4 × 5 single-exposure unit Type 4 × 5 Polaroid unit 6 × 7 roll film unit (P/N 589-9871) (P/N 589-9872) (P/N 589-9873) Image ratio = 1 : 1 Image ratio = 1 : 1 Image ratio = 1 : 0.
6.1.2 6 - 3 6.1.2 Specifications (1) Magnification : × 1.0, × 0.8, and × 0.6 (2) Lens : F = 75 mm (3) Aperture : f = 4.5 to 22, manual (4) Focusing : Manual (preset when shipped at the same time with the SEM) (5) Film type : Roll film 120, Polaroid TYPE52 (P/N 55), Polaroid 107 and 105 (the user is to buy the film.
6.1 Model S-5080 Auto-Camera (Option) 6 - 4 Table 6.1-1 Image Sizes for Combinations of Adapters and Kinds of Film Field of Vie w on Photograp hing CRT Camera Magnifi- cation Exposure Area on Fi lm Area of Film T ype 4 × 5 Polaroid T ype 52, etc. Fufi Film FP5 00B Polar oid 10 7 Rol l Film 1 20 and 220 6 × 7 cm × 0.
6.1.3 6 - 5 6.1.3 Assembling the Camera (1) Illustrated below are films for the standard PHOTO CRT. (a) Type 4 × 5 film (magnification of × 1.0) Fig. 6.1-3 4 ″ × 5 ″ Film (Magnification of × 1.0) (b) Polaroid 107 film (magnification of × 0.8) Fig.
6.1 Model S-5080 Auto-Camera (Option) 6 - 6 6.1.4 Operation (1) Installing the Camera You should ask a service engineer for the installation. Take out the PHOTO CRT unit by referring to Fig. 6.1-6. Tighten four 5-mm screws to fix the camera on the PHOTO CRT panel.
6.1.4 6 - 7 Fig. 6.1-6 Disassembling the Photo CRT PHOTO CRT unit Camera Aperture.
6.2 Faraday Cup Device (Option) 6 - 8 6.2 Faraday Cup Device (Option) This device is used for measuring the probe current. 6.2.1 Range of Type II Stage Drive When the Faraday cup device is used, the range of the drive of Z axis and T axis of the sample stage (Type II) is limited as follows.
6.2.2 6 - 9 NOTICE: If faraday cup insert when the stage is moving to safety position, the following alert message is displayed on screen with the warning buzzer. Draw out the Faraday cup immediately and wait to stop the warning buzzer and stage movement.
6.3 Specification of S-3400N External Communication (Option) 6 - 10 6.3 Specification of S-3400N External Communication (Option) 6.3.1 About the External Communication of S-3400N The external communication of S-3400N is the software that controls S-3400N from the external controller with the Ethernet.
6.3.2 6 - 11 6.3.2 Each Command Table 6.3-1 Property Command Command Return Contents IsActive 0 : SEM not execute 1 : Ready SEM status reading HVOn 0 : HV-OFF 1 : HV-ON HV ON/OFF monitoring Vacc 0 : HV OFF 300-30000 : 0.3-30 kV Acceleration voltage monitoring Mag 5-300000 ： x5-x300k Magnification.
6.3 Specification of S-3400N External Communication (Option) 6 - 12 Table 6.3-2 Method Command Command Set value Return Contents SemCommInitialize 0 : Normal end 1 : Abnormal end Initialize the communication SetHVOn 0 : HV-OFF 1 : HV-ON 0: Normal receiving Excluding 0: Abnormal receiving HV ON/OFF setting SetVacc 300-30000 ： 0.
6.3.2 6 - 13 Command Set value Return Contents SetStagePosition X ： 0- 100000000(nm) 100 nm Step Y ： 0-50000000(nm) 100 nm Step Z ： 5000000- 70000000 (nm) 100000 nm Step T ： -20000-90000 x1000(deg) 0.
6.3 Specification of S-3400N External Communication (Option) 6 - 14 SetStageHomePosition2 0: Normal receiving Excluding 0: Abnormal receiving Home position move2 (Z=65 mm) SetVacuumMode 0 : High vacuu.
6.3.2 6 - 15 Table 6.3-3 Event Command Command Return Contents HVOnChange 0 : HV-OFF 1 : HV-ON HV changing VaccChange 300-30000 ： 0.3-30 ｋ V Acceleration voltage changing HVOnFinished Completion of HV setting VaccFinished Completion of acceleration voltage setting MagChange 5-300000 ： x5-x300k Magnification changing WDChange 400-7000 ： 4.
6.3 Specification of S-3400N External Communication (Option) 6 - 16 6.3.2.1 Initialize the Communication (1) Check SEM status Property SEM status reading IsActive As Long Read Only 0: Did not execute .
6.3.2 6 - 17 6.3.2.2 Acceleration Voltage (1) Monitoring/Setting of Acceleration voltage Property HV ON/OFF monitoring HVOn as Long Read Only 0: HV–OFF 1: HV-ON Acceleration voltage monitoring Vacc as Long Read Only 0: HV–OFF 300 to 30000 : 0.3 – 30.
6.3 Specification of S-3400N External Communication (Option) 6 - 18 Acceleration voltage setting SetVacc ( Vacc as Long) as Long Vacc 300 to 30000 : 0.3 – 30.0 (kV) 0.1kV unit at 10 to 30kV 0.01kV unit at 0.3 to 9.99kV Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: The method is finished at completion of command analysis.
6.3.2 6 - 19 Completion of HV setting HVOnFinished (ErrorCode as Long) ErrorCode 0: Normal end 1: Impracticable 2: Abnormal end Comment: The completion message of SetHvOn Method.
6.3 Specification of S-3400N External Communication (Option) 6 - 20 6.3.2.3 Magnification (1) Monitoring /Setting of Magnification Property Magnification monitoring Mag As Long Read Only 5 to 300000 :.
6.3.2 6 - 21 6.3.2.4 Working Distance (WD) (1) Monitoring/Setting of WD Property W.D. monitoring WD as Long Read Only 400 to 7000 : 4.00 – 70.00 (mm) Method W.D. setting SetWD (WD as Long) as Long WD 400 to 7000 : 4.00 – 70.00 (mm) 0.1mm unit Return 0: Normal end 2: Abnormal end Comment: Currently setting by 0.
6.3 Specification of S-3400N External Communication (Option) 6 - 22 6.3.2.5 Focus Value (1) Monitoring/Setting of Course, Fine Property Focus coarse value monitoring ObjLensCoarse as Long Read Only 0 .
6.3.2 6 - 23 6.3.2.6 Probe Current (1) Monitoring /Setting of probe current Property Probe current monitoring ProbeCurrent as Long Read Only 0 to 1000 : 0.0 – 100.0 Method Probe current setting SetProbeCurrent (ProbeCurrent as Long) as Long ProbeCurrent 0 to 1000 : 0.
6.3 Specification of S-3400N External Communication (Option) 6 - 24 6.3.2.7 Auto Functions (1) ABCC Method ABCC execute SetABC ( ) as Long Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: This method is not completed until ABCC finished.
6.3.2 6 - 25 (2) AFC Method AFC execute SetAFC ( ) as Long Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: This method is not completed until AFC finished. The method is finished at completion of command analysis. The completion of AFC is notified by the AFCFinished event.
6.3 Specification of S-3400N External Communication (Option) 6 - 26 6.3.2.8 Stage (1) Stage information Property Chamber type reading ChamberType as Long Read Only 0: Standard specimen chamber Comment: Currently there is only standard specimen chamber, but maybe other type chamber will add in future.
6.3.2 6 - 27 5 axis moving SetStagePosition (X as Long, Y as Long, Z as Long, T as Long, R as Long) as Long X 0 to 100000000 : (nm) 100 nm Step Y 0 to 50000000 : (nm) 100 nm Step Z 5000000 to 70000000 : (nm) 100000 nm Step T -20000 to 90000 : x1000 (deg) 0.
6.3 Specification of S-3400N External Communication (Option) 6 - 28 3 axis (XYR) moving SetStagePositionXYR(X as Long, Y as Long, R as Long) as Long X 0 to 100000000 : (nm) 100 nm Step Y 0 to 50000000 : (nm) 100 nm Step R 0 to 359900 : x1000 (deg) 0.
6.3.2 6 - 29 Home position moving SetStageHomePosition () as Long Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: Move to Z=10mm The method is finished at completion of command analysis. The completion of SetStageHomePosition is notified by the StagePositionFinished event.
6.3 Specification of S-3400N External Communication (Option) 6 - 30 Home position moving 2 SetStageHomePosition2 () as Long Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: Move to Z=65mm The method is finished at completion of command analysis.
6.3.2 6 - 31 Event Stage position changing StagePositionChange (X as Long, Y as Long, Z as Long, T as Long, R as Long) X, Y, Z, T, R same as each items of GetStagePosition Comment: This event is generated when the stage position changed by SEM-GUI control, trackball control and external control.
6.3 Specification of S-3400N External Communication (Option) 6 - 32 6.3.2.9 Vacuum Setting (1) Vacuum mode Property Vacuum mode reading VacuumMode as Long Read Only 0: High vacuum 1: Low vacuum Method.
6.3.2 6 - 33 (2) Vacuum value Property Vacuum value monitoring Vacuum as Long Read Only 6 to 270 : 6 – 270 (Pa) Method Vacuum value setting SetVacuum (Vacuum as Long) as Long Vacuum 6 to 270 : 6 –.
6.3 Specification of S-3400N External Communication (Option) 6 - 34 6.3.2.10 Multi-purpose Command Extension command setting SetSemCommand (Command as String) as Long Command command string Return 0: Normal receiving Excluding 0: Abnormal receiving Comment: For extension command in future.
6.3.3 6 - 35 6.3.3 Programming 6.3.3.1 Example of Program Private cSCOConnector as SemCommunicationC. SemCommunicationConnector Private cSCO as SemCommunicationC. SemCommunication Set cSCOConnector = New SemCommunicationC . SemCommunicationConnector Set cSCO = cSCOConnector.
6.3 Specification of S-3400N External Communication (Option) 6 - 36 6.3.4 External Communication Setting Procedure (Setting of PC for S-3400N) 6.3.4.1 Preparation 1. Log-In as Administrator. 2. Close all programs including S3400N. 6.3.4.2 Component Registration 1.
6.3.4 6 - 37 6. Click on Yes when a window as shown below appears (Fig. 6.3-6) . Fig. 6.3-6 Registry Editor Window 7. Click on OK when a window as shown below appears (Fig. 6.3-7) . Fig. 6.3-7 Registry Editor Window 8. Click on Yes when a window as shown below appears (Fig.
6.3 Specification of S-3400N External Communication (Option) 6 - 38 6.3.4.3 Security and DCOM Settings 1. Open Control Panel . Fig. 6.3-10 Control Panel Window 2.
6.3.4 6 - 39 3. Click on Administrative Tools . Fig. 6.3-12 Administrative Tools Window 4. Double click on Local Security Policy . (Shown in Fig. 6.3-13.
6.3 Specification of S-3400N External Communication (Option) 6 - 40 6. Double click on Network access:Let Everyone permissions apply to anonymous users . (Shown in Fig. 6.3-14.) Fig. 6.3-14 Local Security Settings Window 7. Check Enabled, and then click on Apply .
6.3.4 6 - 41 8. Confirm that Security Setting is Enabled for Network access:Let Everyone Permissions Apply to anonymous users as shown in Fig. 6.3-16, and then close the Local Security Settings window. Fig. 6.3-16 Local Security Settings Window 9. Double click on Component Services in Administrative Tools window.
6.3 Specification of S-3400N External Communication (Option) 6 - 42 10. Double click on Component Services , then Computers . (Shown in Fig. 6.3-18.) Fig. 6.3-18 Component Services Window 11. Right Mouse Click on My Computer and Select Properties from Action menu.
6.3.4 6 - 43 12. Click on Default Properties . 13. Set Default Authentication level to None . Confirm the setting as in Fig. 6.3-20 , and then click on Apply . For Service Pack 1 For Service Pack 2 Fig. 6.3-20 Default Properties Tab Window 14. Click on Default COM Security tab or COM Security tab.
6.3 Specification of S-3400N External Communication (Option) 6 - 44 16. Click on Add button. (Shown in Fig. 6.3-22 .) Fig. 6.3-22 Access Permission Window 17.
6.3.4 6 - 45 18. Click on Find Now button as shown below. Fig. 6.3-24 Select Users or Groups Window 19. Select Everyone , and then click on OK. Fig. 6.
6.3 Specification of S-3400N External Communication (Option) 6 - 46 20. Click on OK button as shown below. Fig. 6.3-26 Select Users or Groups Window 21. Click on Edit Limits under Launch and Activation Permissions at Service Pack2. For Service Pack 1 For Service Pack 2 Fig.
6.3.4 6 - 47 22. Select Everyone at Group of user names (at Service Pack 2). Fig. 6.3-28 Launch Permission Window 23. Add check mark on Allow of Remote Launch and Remote Activation , and then click on OK (at Service Pack 2).
6.3 Specification of S-3400N External Communication (Option) 6 - 48 24. Click on Apply , and then OK to quit. For Service Pack 1 For Service Pack 2 Fig.
6.3.4 6 - 49 26. Right Mouse Click on SemCommuniC.SemCommunication under DCOM Config items and select Property from Action menu. Fig. 6.3-32 is shown in Detail View .
6.3 Specification of S-3400N External Communication (Option) 6 - 50 27. Under General Tab, Set Authentication Level to None. Fig. 6.3-33 Properties Window 28.
6.3.4 6 - 51 29. Under Security Tab, Select Customize as shown in Fig. 6.3-35 . 30. Click on Edit for Launch Permissions . Fig. 6.3-35 Properties Window 31. Click Add button, if Everyone is not shown as below under Group or user names (follow steps 15-19 to add Everyone).
6.3 Specification of S-3400N External Communication (Option) 6 - 52 32. Click on Apply button. Fig. 6.3-37 Properties Window 33. Choose Identity Tab and confirm the setting as shown in Fig.
6.3.4 6 - 53 35. Select SemControlC.SemControl and do procedure from 22 to 31. Fig. 6.3-39 Component Services Window 36. Close window. 37. Turn off the Window Firewall at Service Pack 2.
6.3 Specification of S-3400N External Communication (Option) 6 - 54 39. Click on Network and Internet Connections . Fig. 6.3-41 Network and Internet Connection Window 40. Click on Windows Firewall . 41. Select Off (not recommended) , and then click on OK.
6.3.4 6 - 55 6.3.4.4 Setup of the External Communication Option External Communication I/F set up disk for the added option is inserted in the drive, and Setup.
6.4 CD Measurement Function (Option) 6 - 56 6.4 CD Measurement Function (Option) 6.4.1 Outline 6.4.1.1 CD Measurement Function The CD Measurement function is designed for carrying out measurement of a critical-dimension or angle at a specified position on a SEM image, and then displaying and recording the result.
6.4.2 6 - 57 6.4.2 Specifications 6.4.2.1 Modes of CD Measurement (1) Manual Measurement Distance (X, Y, D, width and pitch) between cursors placed by manual operation is measured. An angle (T) between two cursor lines placed by manual operation is also measured.
6.4 CD Measurement Function (Option) 6 - 58 6.4.3 Principle of CD Measurement 6.4.3.1 Edge Detection Algorithm in Auto Measurement Figure 6.4-2 shows the cross section and secondary electron signal of the typical specimen. As demonstrated in the figure, the intensity of secondary electron signal is higher at the edges of the pattern.
6.4.3 6 - 59 (2) Threshold Level Method In this method the variation of image signal at the edges is detected upon cutting off at a desired threshold, and it is suitable when the sides of pattern edges are relatively linear.
6.4 CD Measurement Function (Option) 6 - 60 6.4.3.2 Linear Approximation Method Explained below is the linear approximation algorithm. Fig. 6.4-5 Linear Approximation Algorithm Linear approximation method Image acquisition Preparation of profile [Refer to 6.
6.4.3 6 - 61 (1) Area Used for CD Measurement The area in each on-screen box cursor is used for CD measurement. Figure 6.4-6 shows the relationship between box cursor and measurement parameters. For "Design Value", specify a distance (µm) between box cursors.
6.4 CD Measurement Function (Option) 6 - 62 Fig. 6.4-7 Measured Pattern and Secondary Electron Signals (3) Slope Line Detection To detect a slope line using a profile, the following differentiation is performed on profile "s (n)" as expressed below.
6.4.3 6 - 63 (4) Baseline Detection The baseline is a straight line having no slope, which is determined by the peak position attained before, the "baseline start point" and "baseline area".
6.4 CD Measurement Function (Option) 6 - 64 6.4.3.4 Measurement Accuracy and Error Factors Following is a description on measurement accuracy and error factors.
6.4.3 6 - 65 (b) Methods for Improving Measurement Reproducibility It is recommended to use the SEM under fixed operating conditions (magnification, accelerating voltage, probe current, raster rotation angle, working distance, etc.) in CD measurement.
6.4 CD Measurement Function (Option) 6 - 66 ・・・・・・・・・・・・ (3) Measurement Error Caused by Pixel Size or Image Resolution Described in this section are the measurement errors caused by pixel size or SEM image resolution. These errors are more conspicuous as the measured dimension becomes smaller.
6.4.3 6 - 67 (b) Measurement error Caused by SEM Image Resolution Image resolution can be regarded as the minimum dimension where sample information can be reproduced in a form of brightness (contrast) change. Thus there is no meaningful contrast when a dimension is smaller than the image resolution.
6.4 CD Measurement Function (Option) 6 - 68 Fig. 6.4-9 Measured Dimension vs Measurement Error (theoretical) at Various Magnifications Magnification: 150 k × Magnification: 50 k × Magnification: 20 k × 20 15 10 5 0 0.
6.4.4 6 - 69 6.4.4 Description of Windows Used in Measuring Operation Following is a description of the windows used in CD measurement. 6.4.4.1 Starting CD Measurement Function For starting CD measurement on S-3400N GUI, click CD measurement icon on the tool button area of the Operation panel or select CD Measurement command in Analysis menu.
6.4 CD Measurement Function (Option) 6 - 70 6.4.4.3 CD Measurement Window Use this window to set measurement and calibration conditions and to execute measurement. Fig. 6.4-10 CD Measurement Window (1) Condition Combo Box Select one of the registered measurement conditions.
6.4.4 6 - 71 (4) Type of Measurement Specify a type of measurement. (a) Standard button Select Standard for a single dimension measurement in X or Y direction or angle. (b) W&P button Select this button for simultaneous width and pitch measurement.
6.4 CD Measurement Function (Option) 6 - 72 (8) Set Button Displays the measurement cursor. The shape of measurement cursor varies with the type of measurement and measurement mode. (9) Measure Button Executes the CD measurement. (10) Cursor Color Indication Specify a color for the measurement cursor.
6.4.4 6 - 73 6.4.4.4 Measurement Condition Window This is used to edit the measurement conditions. Fig. 6.4-11 Measurement Condition Window (1) (3) (4) (5) (6) (7) (8) (10) (11) (12) (13) (2) (9).
6.4 CD Measurement Function (Option) 6 - 74 (1) Entry No. combo Box Select a registration No. for measurement conditions. A maximum of 16 measurement conditions can be registered. An asterisk (*) appears at the right of an already registered No. (2) Lock Check Box Put a check here to inhibit change of the conditions.
6.4.4 6 - 75 (c) Angle button Selects an angle measurement. This is selectable when measurement mode is Manual . (7) Edge Detect Direction Select an edge detect direction of the cursor box that specifies the position including edge to be detected, when X or Y has been selected as the measuring direction.
6.4 CD Measurement Function (Option) 6 - 76 (f) Design Value combo box Specify an interval between cursors (two boxes) for CD measurement. This parameter is specifiable in a range of 0.1 to 200 µm. (g) Design Pitch combo box Specify a pitch in the case of simultaneous width and pitch measurement.
6.4.4 6 - 77 NOTICE: Relation between the size of image and the size of cursor box In case using the CD measurement function on live or frozen SEM images, the size of image is 1280 x 960 pixels in Full Screen mode and 640 x 480 pixels in Small Screen mode.
6.4 CD Measurement Function (Option) 6 - 78 (9) Edge Detection Area Set parameters specific for each edge detection method. (a) Linear Approximation button Specifies the Linear Approximation method for auto edge detection. The following four parameters are effective for this method.
6.4.4 6 - 79 (g) Threshold Level combo box Specifies a threshold value to be taken in the threshold level method. A numeric value may be input with respect to a difference of "100" between minimum and maximum in signal variation on the edge part.
6.4 CD Measurement Function (Option) 6 - 80 6.4.4.5 Calibration Window This is used to carry out calibration. Fig. 6.4-13 Calibration Window (1) Entry No. Combo Box Specify a No. for registering the calibration. An asterisk (*) appears at the right of an already registered No.
6.4.4 6 - 81 (4) Set Button Displays a measurement cursor for calibration in accordance with the measurement parameters. For calibration using manual mode, align the measurement cursor in both X, Y directions with a position of known dimensions on the screen.
6.4 CD Measurement Function (Option) 6 - 82 (12) Close Button Closes the Calibration window. (13) Measured Value indication Displays the measured result. When the Multi checkbox is not checked, the latest measurement result is indicated in the Average box.
6.4.5 6 - 83 6.4.5.3 Start of CD Measurement Function (1) In the case of the SEM main unit, click the CD Measurement button on the tool button area of the Operation panel or select Measurement in the Analysis menu. To start on the SEM Data Manager, use Measure button on the tool bar or Analysis - CD Measurement menu command.
6.4 CD Measurement Function (Option) 6 - 84 6.4.5.4 Setting Measurement Parameters (1) Selecting Registered Measurement Parameters (a) Measurement parameters can be saved and then called out later to allow efficient measurement of a number of samples under predetermined parameters.
6.4.5 6 - 85 (a) Specify a registration No. according to the setting of the Entry No. combo box. (b) Enter a caption in the Caption box that will facilitate calling out measurement parameters. (c) Set the type of measurement and measurement mode corresponding to the measurement to be executed.
6.4 CD Measurement Function (Option) 6 - 86 6.4.5.5 Calibration The accuracy of measured values depends on the accuracy of image magnification unless calibration has been made. Factors that affect the accuracy include accelerating voltage, scan speed, magnification setting, working distance, raster rotation angle and others.
6.4.5 6 - 87 (3) Carrying out Calibration (a) With the CD measurement function of the SEM main unit, set a sample for calibration into the SEM and set the instrument conditions to those actually used for measurement.
6.4 CD Measurement Function (Option) 6 - 88 (c) In measurement with the SEM data manager, use an image under the same SEM parameters as the image to be measured. (d) Set measurement parameters such as measurement mode and type of measurement on the CD Measurement or Measurement Condition window.
6.4.5 6 - 89 (h) Click the Set button to display the measurement cursor for calibration according to the measurement parameters. For calibration in Manual mode, align the measurement cursors (both X and Y directions) with a position of known dimensions on the screen.
6.4 CD Measurement Function (Option) 6 - 90 In case of measurement on the SEM Data Manager, a new image can be displayed by clicking a thumbnail. When new image file is opened during multi point calibration, recording condition will be compared with that of previous measured image.
6.4.5 6 - 91 6.4.5.6 Measurement Operation The following six kinds of measurement are mainly available. • Manual measurement • Successive manual measurement • Auto measurement • Successive aut.
6.4 CD Measurement Function (Option) 6 - 92 Fig. 6.4-20 Manual Measurement Result (d) In the CD measurement function of the SEM main unit, click the Run button again and the system will return to image observation.
6.4.5 6 - 93 (f) Drag the cursor with the mouse and align it with the part to be measured, then click Enter button. Angle measurement can thus be done as in Fig.
6.4 CD Measurement Function (Option) 6 - 94 Fig. 6.4-23 Successive Manual Measurement Results (3) Auto Measurement (a) With the measurement type at Standard , measurement mode at Auto and measuring direction at X or Y , click the Set button on CD Measurement window, and the auto measurement cursors will appear as shown in the figure.
6.4.5 6 - 95 (c) Set the cursors and click the Measure button to start measurement. When there are two or more measurement points, a "+" sign appears at the location where an edge was detect.
6.4 CD Measurement Function (Option) 6 - 96 (4) Successive Auto Measurement (a) Set Multiple in the measurement parameters the same as for auto measurement, then successive auto measurement can be achieved. Click Set button on the CD Measurement window and measurement cursors as for auto measurement will appear.
6.4.5 6 - 97 Fig. 6.4-27 Width & Pitch Manual Measurement Cursors (c) Drag the cursor via the mouse to the edge to be measured, and set the position.
6.4 CD Measurement Function (Option) 6 - 98 (6) Width & Pitch Auto Measurement (a) Set the measurement type to W&P , measurement mode to Auto and measuring direction to X or Y , then width and pitch can be simultaneously measured automatically.
6.4.5 6 - 99 Fig. 6.4-30 Width & Pitch Auto Measurement Results Display.
6.4 CD Measurement Function (Option) 6 - 100 (7) Zoom function A partial image besides the cursor is magnified and shown on the Zoom window. Check the Zoom box to use the zoom function. The crosshair cursor corresponds to the cursor position. It will be useful for accurate fitting of cursor to the point to be measured in manual measurement mode.
6.4.5 6 - 101 6.4.5.7 Recording Measured Data The image can be photographed or saved with measured data as is shown on the screen. Also the measurement data is saved in text format or in Microsoft Excel format.
6.4 CD Measurement Function (Option) 6 - 102 The following table is an example of measured data saved in csv format and opened with Microsoft Excel. (Measurement on SEM Data Manager) Where 3 times of .
APPENDIX - 1 APPENDIX Message List The table below lists messages that can appear when the S-3400N is being used. Messages without a message code are for instructions, simple notifications, or confirmation messages; they are not included in the table below.
APPENDIX - 2 Code Message Text Explanation and Countermeasure *2032 Timeout error. This message will be shown when operations such as auto focusing did not end within specified period. If it happens frequently, contact a service engineer. 2034 Rotate R-axis with 90 degree pitches.
APPENDIX - 3 Code Message Text Explanation and Countermeasure 2070 For correct operation of the PC- SEM, set the Display properties at 1280x1024 pixels for the desktop area. And confirm setting of the color palette and the refresh rate are optimal value to PC and the monitor.
APPENDIX - 4 Code Message Text Explanation and Countermeasure 2143 User name is too long. Up to 64 characters are acceptable. Use User name shorter than 64 characters. 2144 Invalid Sample name. The Sample name possibly includes characters not allowed (/ : ; , * ? “ < > |).
APPENDIX - 5 Code Message Text Explanation and Countermeasure 4503 Please input caption. Input Caption before applying calibration or measurement parameters. 4504 Invalid caption. The caption possibly includes characters not allowed (/ : ; , * ? “ < > |).
APPENDIX - 6 Code Message Text Explanation and Countermeasure 5040 Cannot execute while not initialize X axis 5041 Cannot execute while not initialize Y axis 5042 Cannot execute while not initialize Z axis 5043 Cannot execute while not initialize T axis 5044 Cannot execute while not initialize R axis Initialization of each axis in progress.
APPENDIX - 7 Code Message Text Explanation and Countermeasure 6004 The selected sample height cannot be set by present detector/unit. 6005 The selected detector/unit cannot be set by present sample height. 6006 The selected sample size cannot be set by present sample height.
APPENDIX - 8 Code Message Text Explanation and Countermeasure 7069 Auto alignment process has not completed due to un-suitable SEM conditions. Set SEM conditions according to the following procedure. (1) In the case where focus is improper: The sample must suit focus to the scope of control or suit the stage position.
APPENDIX - 9 Code Message Text Explanation and Countermeasure *7304 Evacuation system is not working. Check power switch. The system fails to start due to an evacuation system error. Shut down the PC, turn off the Main switch, wait 30 minutes, and then restart the system.
APPENDIX - 10 Code Message Text Explanation and Countermeasure 7315 The error of the TMP vacuum pump was detected. Shut down the PC and turn the [MAIN] switch off. Restart the microscope after about half an hour. When this message is shown again, contact a service engineer.
APPENDIX - 11 Code Message Text Explanation and Countermeasure 7320 An abnormal power supply (Vacc) in the electron gun control power supply was detected. Shut down the PC and turn the [MAIN] switch off. Restart the microscope after about half an hour.
INDEX - 1 INDEX A AAA(Auto Axial Alignment) .................................................................................................. 3- 27 ABA(Auto Beam Alignment) .............................................................................
INDEX - 2 C Condition Condition Memory ...................................................................................................... 3-128 Operating Condition....................................................................................
INDEX - 3 I Image Brightness ............................................................................................................... ..... 3-44 Image Navigation...................................................................................
INDEX - 4 R Raster Rotation .......................................................................................................... 2-45, 3-134 Recording ........................................................................... 2-33, 3-95, 3-96, 3-108, 3-109, 3-110 RISM .
INDEX - 5 W WD (Working Distance) ............................................................................ 2-40, 3-20, 3-55, 3-159 Window .............................................. 2-14, 2-26, 2-27, 3-96, 3-101, 3-102, 3-116, 3-161, 3-163 X X-ray Analysis Mode .
デバイスHitachi S-3400Nの購入後に（又は購入する前であっても）重要なポイントは、説明書をよく読むことです。その単純な理由はいくつかあります：
Hitachi S-3400Nをまだ購入していないなら、この製品の基本情報を理解する良い機会です。まずは上にある説明書の最初のページをご覧ください。そこにはHitachi S-3400Nの技術情報の概要が記載されているはずです。デバイスがあなたのニーズを満たすかどうかは、ここで確認しましょう。Hitachi S-3400Nの取扱説明書の次のページをよく読むことにより、製品の全機能やその取り扱いに関する情報を知ることができます。Hitachi S-3400Nで得られた情報は、きっとあなたの購入の決断を手助けしてくれることでしょう。
Hitachi S-3400Nを既にお持ちだが、まだ読んでいない場合は、上記の理由によりそれを行うべきです。そうすることにより機能を適切に使用しているか、又はHitachi S-3400Nの不適切な取り扱いによりその寿命を短くする危険を犯していないかどうかを知ることができます。
ですが、ユーザガイドが果たす重要な役割の一つは、Hitachi S-3400Nに関する問題の解決を支援することです。そこにはほとんどの場合、トラブルシューティング、すなわちHitachi S-3400Nデバイスで最もよく起こりうる故障・不良とそれらの対処法についてのアドバイスを見つけることができるはずです。たとえ問題を解決できなかった場合でも、説明書にはカスタマー・サービスセンター又は最寄りのサービスセンターへの問い合わせ先等、次の対処法についての指示があるはずです。
