OmegaメーカーFMA 1500の使用説明書/サービス説明書
ページ先へ移動 of 40
www .omega.com e-mail: info@omega.com U ser ’ s Guide FMA 1400 and FMA 1500 Mass Flow Meters and Contr ollers Shop online at.
Servicing Nor th America: USA: One Omega Drive, Box 4047 ISO 9001 Certified Stamford CT 06907-0047 T el: (203) 359-1660 F AX: (203) 359-7700 e-mail: info@omega.com Canada: 976 Bergar Laval (Quebec) H7L 5A1 T el: (514) 856-6928 F AX: (514) 856-6886 e-mail: info@omega.
T ABLE OF CONTENTS 1. UNP ACKING THE FMA 1400/1500 MASS FLOW METER................ 1.1 Inspect Package for External Damage......................................... 1.2 Unpack the Mass Flow Meter/Controller ....................................... 1.3 Returning Merchandise for Repair .
7.3 Linearity Adjustment...................................................................... 7.3.1 Connections and Initial Warm Up........................................... 7.3.2 ZERO Adjustment......................................................
TRADEMARKS Buna 7 is a registered trademark of DuPont Dow Elastometers. Kalrez 7 is a registered trademark of DuPont Dow Elastomers. Neoprene 7 is a registered trademark of DuPont. Omega ® -is a registered trademark of Omega Engineering, Inc. VCR 7 is a registered trademark of Crawford Fitting Co.
1 1. UNP ACKING THE FMA 1400/1500 MASS FLOW METER AND CONTROLLER 1.1 Inspect Package for External Damage Remov e the P acking List and v erify that you hav e received all equipment. If you hav e any questions about the shipment, please call the Omega 7 Customer Ser vice Depar tment at 1-800-622-2378 or (203) 359-1660.
2 It is also pref erable to install the FMA 1400/1500 transducer in a stab le environment, free of frequent and sudden temperature changes, high moisture , and drafts. Prior to connecting gas lines inspect all par ts of the piping system including fer- rules and fittings for dust or other contaminants .
FIGURE 2-1, WIRING DIAGRAM FOR FMA 1400/1500 TRANSDUCERS FIGURE 2-3, FMA 1400/1500 15 PIN "D" CONNECTOR CONFIGURA TION 3 PIN FUNCTION 1 Chassis Ground 2 Common, Signal Ground For Pin 3 3 0-5.
Important notes: In general, "D" Connector numbering patterns are standardized. There are, how- e ver , some connectors with nonconforming patter ns and the numbering sequence on your mating connector ma y or ma y not coincide with the numbering sequence shown in our pin configuration tab le abov e.
4. SPECIFICA TIONS FLOW MEDIUM: Please note that FMA 1400/1500 Mass Flow Meters and Controllers for ranges up to and above 10 L/min are designed to work with clean gases only . Never tr y to meter or control flow rates of liquids with any FMA 1500's or FMA 1400's.
Omega 7 makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models.
A TTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical; standard calibration is in horizontal position. OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA optional (50-500 Ω loop resistance); 20 mV peak to peak max noise.
FLOW RANGES T ABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN LOW FLOW MASS FLOW METER/CONTROLLERS* T ABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN MEDIUM FLOW MASS FLOW METER/CONTROLLERS* T ABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN HIGH FLOW MASS FLOW METER/CONTROLLERS* *Flow rates are stated for Nitrogen at STP conditions [i.
T ABLE IV PRESSURE DROPS T ABLE V APPROXIMA TE WEIGHTS 5. OPERA TING INSTRUCTIONS 5.1 Preparation and W arm Up It is assumed that the Mass Flow Meter or Controller has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF .
10 During initial powering of the FMA 1400/1500 transducer , the flow output signal will be indicating a higher than usual output. This is indication that the FMA 1400/1500 trans- ducer has not yet attained it's minim um operating temperature.
age is a linear representation of 0 to 100% of the full scale mass flow rate . Response time to set point changes are 1 second (FMA 1400 f or ranges up to 10 L/min) and 2 seconds (FMA 1400 f or ranges abov e 10 L/min) to within 2% of the final flow o ver 25 to 100% of full scale.
utilizing +15VDC valv e configuration, connecting the TEST pin 12 on 15-pin "D" connectors) to ground will fully open the v alve . For FMA 1400's with a +30VDC valv e configuration, connecting the TEST pin to +15VDC will fully open the valv e.
13 6.2.2 FMA 1400/1500 for ranges up to 10 L/min Unscrew the inlet compression fitting of meter . Note that the Restrictor Flow Element (RFE) is connected to the inlet fitting. Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen will now become visib le.
14 Contact Omega 7 f or optional sealing mater ials av ailable . Set the FMA 1400 into PURGE mode, and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valv e is to remo v e the plastic cap on top of the v alv e , and turn the set screw coun- terclockwise until it stops .
FIGURE 7-1, CALIBRA TION POTENTIOMETER LOCA TIONS 7.2 Calibration of FMA 1500 Mass Flow Meters All adjustments in this section are made from the outside of the meter , there is no need to disassemble an y par t of the instr ument.
7.2.2 ZERO Adjustment Shut off the flow of gas into the Mass Flo w Meter . T o ensure that no seepage or leak occurs into the meter , it is good practice to temporarily disconnect the gas source.
7.3.2 ZERO Adjustment Shut off the flow of gas into the Mass Flo w Meter . T o ensure that no seepage or leak occurs into the meter , it is good practice to temporarily disconnect the gas source.
the transducer . The unit will now act as a mass flow meter . CA UTION: If the v alve is left in the A UTO (control) or OPEN mode f or an e xtended per iod of time, it ma y become war m or e ven hot to the touch. Use care in av oiding direct contact with the valv e during operation.
T ABLE VI FMA 1400 SOLENOID VAL VE ORIFICE SELECTION T ABLE 8. TROUBLESHOOTING 8.1 Common Conditions Y our Mass Flow Meter/Controller was thoroughly chec ked at n umerous quality control points during and after manufacturing and assemb ly operations.
8.2 T roubleshooting Guide 20 REMEDY check connection of power supply disconnect FMA 1400/1500 transducer from power supply; remove the short- ing condition or check polarities; fuse resets automatica.
21 REMEDY locate and correct return to factory for replacement return to factory for replacement locate and repair use matched calibration see K factor tables in APPENDIX 2 locate and correct return t.
F or best results it is recommended that instr uments are returned to the factory f or ser vicing. See section 1.3 f or retur n procedures. 8.3 T echnical Assistance Omega 7 Engineering will provide technical assistance ov er the phone to qualified repair personnel.
APPENDIX 1 COMPONENTS DIAGRAMS 23 FMA 1500 METERING PC BOARD (ALSO INCORPORA TED IN FMA 1400) FMA 1400 CONTROL PC BOARD.
24 APPENDIX 2 GAS F ACTOR T ABLE (“K” FACTORS) 1.162 1.293 1.787 .760 1.782 3.478 5.227 3.025 7.130 11.18 7.803 6.108 6.644 2.413 2.593 2.503 2.503 2.503 1.964 3.397 1.250 6.860 3.926 2.945 2.680 3.163 4.125 3.858 5.326 6.892 4.660 2.322 2.742 1.877 1.
25 ACTUAL GAS K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Dibromodifluoromethane CBr 2 F 2 Dichlorodifluoromethane (Freon-12) CCl 2 F 2 Dichlofluoromethane (Freon-21) CHCl 2 F Dichloromethylsila.
26 Actual Gas K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Hydrogen Fluoride HF Hydrogen Iodide HI Hydrogen Selenide H 2 Se Hydrogen Sulfide H 2 S Iodine Pentafluoride IF 5 Isobutane CH(CH 3 ) 3 .
27 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .2031 .0608 .2691 .32 .2792 .2541 .1961 .4616 .48 1.44 Actual Gas K Factor Relative to N 2 Cp [Cal/g] Density [g/I] Phosphorous .
APPENDIX 3 DIMENSIONAL DRA WINGS FMA 1500 FOR RANGES UP TO 10 L/MIN MASS FLOW METER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice . F or cer tified dimensions please contact Omega 7 .
FMA 1500 FOR RANGES ABOVE 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice .
FMA 1400 RANGES UP TO 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice .
FMA 1400 RANGES ABOVE 10 L/MIN MASS FLOW CONTROLLER NO TES: Omega 7 reser ves the right to change designs and dimensions at its sole discretion at any time without notice .
NOTES: 32.
NOTES: 33.
W ARRANTY / DISCLAIMER OMEGA ENGINEERING, INC. warrants this unit to be free of def ects in materials and workmanship for a period of 13 months from date of purchase. OMEGA’s W arranty adds an additional one (1) month grace period to the nor mal one (1) year pr oduct warranty to cover handling and shipping time .
Where Do I Find Ever ything I Need for Pr ocess Measurement and Control? O M EGA…Of Course! Shop online at www .omega.com TEMPERA TURE 5 Thermocouple, R TD & Thermistor Probes, Connectors, Panel.
デバイスOmega FMA 1500の購入後に（又は購入する前であっても）重要なポイントは、説明書をよく読むことです。その単純な理由はいくつかあります：
Omega FMA 1500をまだ購入していないなら、この製品の基本情報を理解する良い機会です。まずは上にある説明書の最初のページをご覧ください。そこにはOmega FMA 1500の技術情報の概要が記載されているはずです。デバイスがあなたのニーズを満たすかどうかは、ここで確認しましょう。Omega FMA 1500の取扱説明書の次のページをよく読むことにより、製品の全機能やその取り扱いに関する情報を知ることができます。Omega FMA 1500で得られた情報は、きっとあなたの購入の決断を手助けしてくれることでしょう。
Omega FMA 1500を既にお持ちだが、まだ読んでいない場合は、上記の理由によりそれを行うべきです。そうすることにより機能を適切に使用しているか、又はOmega FMA 1500の不適切な取り扱いによりその寿命を短くする危険を犯していないかどうかを知ることができます。
ですが、ユーザガイドが果たす重要な役割の一つは、Omega FMA 1500に関する問題の解決を支援することです。そこにはほとんどの場合、トラブルシューティング、すなわちOmega FMA 1500デバイスで最もよく起こりうる故障・不良とそれらの対処法についてのアドバイスを見つけることができるはずです。たとえ問題を解決できなかった場合でも、説明書にはカスタマー・サービスセンター又は最寄りのサービスセンターへの問い合わせ先等、次の対処法についての指示があるはずです。
