Teledyneメーカー202の使用説明書/サービス説明書
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INSTRUCTION MANUAL 200/202 SERIES FLOWMETERS/CONTROLLERS TELEDYNE HASTINGS INSTRUMENTS ISO 9001 CER TIFIED.
140-072011 200/202 Series Page 2 of 24 Manual Print History The print history shown below lists the printing da tes of all revisions and addenda created for this manual. The revision level letter in creases alphabetically as the ma nual undergoes subsequent updates.
140-072011 200/202 Series Page 3 of 24 Table of Contents 1. GENERAL INFO RMATIO N ....................................................................................................................................4 1.1. F EATURES ....................
140-072011 200/202 Series Page 4 of 24 1. General Information The Hastings HFM-200 mass flow meter and HFC-202 fl ow controller are designed to accurately measure and control mass flow over the range of 10 sccm to 30 s lm, without corrections or compensations for gas pressure and temperature with an accuracy of better than ±1% FS.
140-072011 200/202 Series Page 5 of 24 1.2. Specifications HFM-200 * Accuracy 1 and Linearity ................................................................................................................ ........ ±1% F.S. Repeatability ...........
140-072011 200/202 Series Page 6 of 24 1.4. Optional 4-20 mA Current Output An option to the standard 0 - 5 VDC output is the 4 - 20 mA current output that is pr oportional to flow. The 4 - 20 mA signal is prod uced from the 0 - 5 VDC output of the flow m eter.
140-072011 200/202 Series Page 7 of 24 1.5.2. Intercon necting Cables Cables are available from Hastings, in various length s , to connect from the 15 pin "D" connector on the back of the Power Pod directly to any of the 200 seri es and 300 seri es flow inst ruments (including digital versions).
140-072011 200/202 Series Page 8 of 24 2. Inst allation and Operation This section contains the steps necessary to install a new flow me ter/controller into operation as quickly and easily as possible. Please read the following th oroughly before attempting to install the instrument.
140-072011 200/202 Series Page 9 of 24 2.4. Mechanical Connections 2.4.1. Standard Configuratio n The flow meter may be mounted in any position as long as the direction of gas flow through the instrument follows the arrow marke d on the bottom of the flow meter case label.
140-072011 200/202 Series Page 10 of 24 EXAMPLE: Suppose a 4” LFE is selected. The length of 4” diameter tubing or pi pe, upstream of the sensor inlet tap, will be a minimum of 20 “. The minimum length of 4” tubing or pipe downstream from the sensor outlet tap will be 4”.
140-072011 200/202 Series Page 11 of 24 24 Volt Connections Refer to the diagram to the right when connecting 24 Volt units. Connect the positive lead of the power supply to pin 7 of the DE-9 connector and negative lead to pin 4. The supply input is diode protecte d such that reversing the input polarity will not damage the instrument.
140-072011 200/202 Series Page 12 of 24 2.6.2. Zero Check Turn the power supply on if not already ene rgized. Allow for a 1 h our warm-up. Stop all fl ow through the instrument and wait 2 minutes. Caution: Do not assume that all metering valves com pletely shut off the flow.
140-072011 200/202 Series Page 13 of 24 The “COMMAND” pot adjusts the Analog command signal sent to the flo w controller. The setting for each controller connected to the po wer supply can be obse rved. (Depending on how the p ower supply was set up, the display could indicate in flow units or percent of full scale).
140-072011 200/202 Series Page 14 of 24 2.7.3. Operation with an external sensor (Fig. 2.2) In some instances, it might be desirable to use an external sensor to provide process info rmation to the control circuitry in the flow controller.
140-072011 200/202 Series Page 15 of 24 controller circuit establishes contro l at the new command point. This jumper does not affect the system gain and will not dampen out oscillations. To adjust the response, you need a means of pro ducing a step change in the command voltage from 10% of full scale to 100% of full scale.
140-072011 200/202 Series Page 16 of 24 3. Theory of Operation This section contains a functional description of Ha stings flow cont rollers. Detailed schematics and parts lists can be obtained by contacting Hastings us ing the contact information found at the end of this document.
140-072011 200/202 Series Page 17 of 24 relatively constant over wide ranges of temperat ure and pre ssure, the flow meter ma y be calibrated directly in mass units for those gases.
140-072011 200/202 Series Page 18 of 24 3.5. Valve The control valve is an “automatic m etering solenoid” valve. While most solenoids operate in either the fully open or fully clos ed sta te, the automatic meteri ng solenoid valve is desi gned to control flow (see Figure 3.
140-072011 200/202 Series Page 19 of 24 4. Maintenance This section contains service and calibration informatio n. Some portions of the instrument are delicate. Use extreme care when servicing the flow controller. 4.1. Authorized Maintenance With proper care in installation and use, the flow controller will require little or no maintenance.
140-072011 200/202 Series Page 20 of 24 CAUSE : Plugged orifice. ACTION : Verify the presence o f a 10-50 psig pressure across the instrument. If present, shut off gas supply and power supply. Remove orif ice per Sec tion 4.9. Examine orifice . If plugged, clean or replace as applicable.
140-072011 200/202 Series Page 21 of 24 4.3.2. Miscellaneous adjust ments Periodically, during normal ope ration, the ZERO should be chec ked and adjusted when required.
140-072011 200/202 Series Page 22 of 24 B) If P u >2P d , use formula 1; otherwise use formula 2. C) Use a consistent set of units for pressure, flow, and density (i.e all lengths, masses, times in the same units, cm, ft, kg, sec etc.) 1 liter/minute = 1.
140-072011 200/202 Series Page 23 of 24 Lubricate the O-rings slightly with a silicone based grease, and the threads with anti-galling compound. Push the orifice into its hole and screw it in until it is flush with the instrument base. Apply pressure to the inlet side of the instrument.
140-072011 200/202 Series Page 24 of 24 5. W arranty and Rep air 5.1. Warranty Repair Policy Hastings Instruments warrants this produc t for a period of one ye ar from the date of shipment to be free from defects in material and work manship.
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