BissellメーカーHS-20の使用説明書/サービス説明書
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HS-20 Diffusion Pump Instruction Manual Varian V acuum Technologies 12 1 Hartwell Avenue Lexington, MA 0242 1 (78 1)86 1-7200 Manual No. 6999-0 1-120 Revision G October 2000.
America Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421, USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free: 1 (800) 882 7426 Argentina Varian Argentina Ltd. Sucursal Argentina Av. Ricardo Balbin 2316 1428 Buenos Aires Argentina Tel: (54) 1 783 5306 Fax: (54) 1 786 5172 Australia Varian Australia Pty.
T elephone Numbers F or technical suppor t and ser vice within the continental United States , Alaska and Haw aii: Continental U .S. only – 1-800-8-V ARIAN (1-800-882-7426) Order Entr y (Sales) .......................................................
3/5/97 W arranty Products manuf actured by Seller are w arranted against def ects in materials and workmanship for twelv e (12) months from date of shipment thereof to Customer , and Seller’ s liabi.
i OPERA TION AND MAINTENANCE OF THIS EQUIPMENT INV OL VES SERIOUS RISK. IT IS THE RESPONSIBILITY OF THE USER T O MAINT AIN SAFE OPERA TING CONDITIONS A T ALL TIMES. V ARIAN ASSUMES NO LIABILITY FOR PERSONAL INJUR Y OR DAMA GE RESUL TING FR OM OPERA TION OR SER VICE OF THE EQUIPMENT .
ii SAFE INCORPORA TION OF V ARIAN DIFFUSION PUMPS INT O V A CUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. T AKE APPR OPRIA TE A CTION THROUGH REDUND ANCY , AND/OR O THER SAFEGU ARDS TO PR OTECT PERSONNEL AND PR OPER TY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INST ALLA TION, OPERA TION, AND MAINTENANCE INSTR UCTION MANUAL.
iii THE INST ALLA TION, OPERA TION, AND/OR SER VICING OR DIFFUSION PUMPS INV OL VES ONE OR MORE OF THE FOLLOWING HAZARDS , ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERA TING PRACTICES AND PRECA UTIONS, COULD PO TENTIALL Y RESUL T IN DEA TH OR SERIOUS HARM T O PERSONNEL.
iv a. Explosion – Operation of the diffusion pump without prior and continuous e vacuation (belo w 0.5 T orr (66.5 P a)) or coolant and introducing a strong oxidiz er (such as air) or e xplosive v apors or powders or materials which ma y react with pumping fluids into a hot (abov e 300°F or 150°C) pump can cause an e xplosion.
v Contaminate pump with e xplosive v apors, Low er explosiv e threshold of gas mixtures powders , or reactive materials Remov e, defeat, or o v err ide saf ety counter- Ov er temperature, o verpressur.
vi d. P oisonous and/or Corrosive Compounds – When pumping poisonous, reactiv e, and/or corro- siv e gas, v apors, or chemicals, e ven proper operation and regener ation will not alwa ys ensure that all hazardous materials hav e been totally remov ed.
vii i. Cold Coolant – Liquid nitrogen, a cr yogenic liquid, is used in traps . If it is splashed on body tis- sues or ey es, it can cause sev ere frostbite or blindness. The e xtremely low temperature of lique- fied nitrogen can cause skin damage similar to high temperature b ur ns.
W ARNING _____________ High v oltages (up to 480 V) can kill. Alwa ys break the pr imar y circuit to the pow er supply before star ting to work on the heater and/or its wiring. W ARNING _____________ Diffusion pumps are typically cleaned with acetone, alcohol, or other solv ents.
CA UTION ________ Acetone, alcohol, and other solv ents degrade O-ring mater ials reducing their ability to hold a v acuum. Do not use acetone or other solv ents on O-rings. If necessar y to clean O-r ings, wipe with lint-free , clean cloth, wash in detergent and w ater , or use a small amount of pump oil.
T able of Contents Section Pag e Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i Section I – Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . .
List of Illustrations Figure Title Page 1-1 Speed and Throughput Cur ves – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1-2 Outline Dra wing – HS-20 Diffusion Pump . . . . . . . . . . . . . . . . . . . . . . . . . .
SECTION I INST ALLA TION 1-1 GENERAL Upon receipt, inspect the container f or evidence of damage in shipment. Do not discard any e vidence of rough handling. F actor y packing pro vides for maxim um protection during shipment. How ev er , the pump should be inspected immediately and any damage should be repor ted to the carrier without delay .
Installation 1-2 1-3 PHYSICAL SPECIFICA TIONS (See Figure 1-2) Flange dimensions (inches): Figure 1-1. Speed and Throughput Curves – HS-20 Diffusion Pump ASA ISO 630k ISO 160k Inlet Foreline Inlet Foreline OD 27.50 9.0 27.17 7.09 ID 21.25 5.06 21.25 5.
Installation 1-3 Figure 1-2. Outline Drawing – HS-20 Diffusion Pump, with ASA Flanges.
Installation 1-4 1-4 UNP A CKING Pumps are f actor y-packaged to permit prolonged storage in suitably protected areas without special precautions. W ARNING _____________ When lifting some V arian diff.
Installation e. Remov e all traces of the cleaning fluid by carefully drying with clean, dr y , oil-free compressed air . f . F or reassembly , rev erse the abov e procedure. g. Clean the flanges and O-ring groov es thoroughly with acetone or alcohol, using clean, lint free rags .
Installation 1-6 W ARNING Utility f ailure can cause damage to the equipment, ov erheating, and possible e xplosions. Designers of the equipment using diffusion pumps must design their system to protect personnel and proper ty from possi- ble hazards .
Installation 1-7 The cooling water discharge should, if possib le, be connected to an open drain so that cooling water flo w can readily be check ed. The temperature of the discharged cooling water should not e xceed 130°F (54°C).
Installation 1-8 1-6-4 Electrical Connections (See Figure 1-4 and 1-5, Diffusion Pump Wiring Diagr am) W ARNING _____________ High v oltages (up to 480V) can kill. Alwa ys break the pr imar y circuit to the pump bef ore star ting to wor k on the heater and/or its wiring.
Installation 1-9 Figure 1-4. 200/240/400/430/440/480 V Wiring Diagram – HS-20 Diffusion Pump.
Installation 1-10 Figure 1-5. 380/415 V Wiring Diagram – HS-20 Diffusion Pump.
Installation 1-11 W ARNING _____________ Pumps and their components are designed f or vacuum service; they are not designed to be pressurized which could cause them to burst possibly e xpelling shrapnel at lethal velocities . Serious accidents hav e been caused by intentional pressurization of v acuum systems and their components.
Installation a. The recommended fluid charge for the pump is fiv e U . S. quar ts. The fluid charge will gradually be depleted through use, b ut the pump will continue to operate normally .
2-1 SECTION II OPERA TION During initial installation, the newly installed pump fluid ma y be subjected to a degassing process. This ma y result in foreline pressure fluctuations and "b ursts". Such fluctuations are considered nor mal. 2-1 ST ART -UP PR OCEDURE a.
Operation 2-2 a. Switch off the pow er to the diffusion pump heaters. b . Admit cooling water to the quic k-cool coil if necessar y and continue to circulate it until the pump body just abov e the boiler heat shield can be touched (approximately 130°F or 54°C).
3-1 SECTION III MAINTENANCE 3-1 GENERAL Diffusion pumps generally require little attention when correctly operated. How e ver , it is advisable to perf or m some periodic checks to insure continued troub le-free operation. By simple pre v entive main- tenance, costly do wn-time and cleaning procedures can be av oided.
Maintenance 3-2 c. When the pump is cold, chec k that the heaters are bolted snugly to the boiler plate and that all heater ter minal connections are tightly f astened inside the junction box. d. Check the total heater input and balance of load if a m ulti-phase heater is used.
Maintenance 3-3 a. Disconnect all water cooling lines and break the primar y circuit supplying power to the pump heaters. b . Unbolt the inlet and f oreline connections and remov e the pump from the system. c. Drain the pump of all fluid. d. Remov e the cold cap and jet assembly f ollowing the procedures outlined.
Maintenance 3-4 Figure 3-1. External Fittings – Cold Cap Assembly NO TE ________ Customer to supply water tubing to be connected to coupling with FPT threads shown abo ve .
Maintenance 3-5 JET ASSEMBL Y The HS-20 jet assembly consists of se veral subassemb lies. The lower jet assemb ly consists of the jet base and stages 3 and 4. A jet shield is provided f or the third stage jet. The second stage jet is secured to the central tube and f or ms a subassembly .
Maintenance 3-6 Figure 3-2. 20-inch Jet Assembly.
Maintenance 3-7 3-5-3 Reassembling the Lo wer Jet Assembly a Carefully replace the four th stage jet on the jet base. b Replace the third stage jet shield.
Maintenance 3-8 Figure 3-3 Jet Coupling Note: If the jet coupling loosens from the jet rod during disassembly , position it so that the top of the jet coupling is flush with the bottom of the orifice plug.
Maintenance 3-9 Figure 3-4. Heater Element Assembly NO TE ________ Tighten clamping nuts to 250 in.-lbs ..
Maintenance 3-10 1 Deter mine which heater element has failed at the junction bo x, then disconnect the two corre- sponding leads from the ter minal strip. Pull the leads out of the ter minal box then out the elbow co ver plate . 2 Remov e the heater cov er from the bottom of the diffusion pump .
Maintenance 3-11 3-7 REPLA CEABLE P AR TS The f ollowing is a list of replaceab le par ts f or the V ar ian HS-20 Diffusion Pump . Part Number Description 84358301 Cold cap assembly (includes No .
Maintenance 3-12.
4-1 SECTION IV TROUBLESHOO TING 4-1 LEAKA GE Analysis of general operational e xper ience with diffusion pumps indicates that cer tain locations are more prone to the incidence of leaks. The f ollowing locations should be chec ked first if leakage is the suspected cause of poor system perf or mance.
T roubleshooting 4-2 Table 4-1 Troubleshooting (Cont’d) Fault Probable Cause Corrective Action P oor ultimate Contaminated pump fluid Examine and clean pump; pressure replace fluid. Low heat input Check v oltage. Check f or continuity , bur ned-out element, poor ther mal contact.
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