Omegaメーカー3200の使用説明書/サービス説明書
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FMA 3200/3200ST/ 3400/3400ST Series Thermal Mass Flo w Controllers.
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M-4271/0707 , pg. 3 of 26 READ THIS MANUAL COMPLETELY BEFORE ATTEMPTING TO CONNECT OR OPERATE YOUR FLOW SENSO R. FAILURE TO DO SO MAY RESULT I N INJURY TO YOU OR DAMAGE TO THE FLO W CONTROLL ER. TABLE OF CONT ENTS A. I ntr o du ct io n ...............
M-4271/0707 , pg. 4 of 26 A. Introduction 1. Un pa cking All units ar e suitably p a ck a g ed to prev ent damage d urin g s hipping. I f e xterna l da m ag e is no ted u pon rece ipt of the packag e, pl ease c ontact Omega Engineering immediatel y. Open the p a ck age from t he top, t aking care not to cut too d eeply into t h e package.
M-4271/0707 , pg. 5 of 26 sensor d e si gn. T his proven d esign minimizes z e ro dr ift w h il e maintai n in g fast r espons e and li near o utputs with v irtu a ll y no mainte nanc e . The FMA 3 200/3400 Series u tilize s therma l flow sensing technology.
M-4271/0707 , pg. 6 of 26 un it ma y be da mage d or fa il pr ema t u rel y. Such dama ge w ill no t be repaired un der warranty. Un i ts sh ou ld be in st a lle d in a c lea n, d r y en vi ron me n t w it h a n a mb ie nt te mp er at ure t h at i s as st ab le as p os si ble.
M-4271/0707 , pg. 7 of 26 2. Mounting the Fl ow Controller. The F MA 320 0/34 00 Series control lers hav e no p articul ar ori entati on o r in stal latio n re quire ments s o may be moun ted in any c onve nien t posi tion. It i s re commen ded tha t un its be fixed to a su itable subs trate usin g the two 4-40 mounting holes provided.
M-4271/0707 , pg. 8 of 26 4. El e ct ri cal C on ne ction s Cauti o n: I ncorr e ct wir ing may caus e seve re dam a g e to t he unit . Applying an AC vo ltage (11 5VAC or 23 0VAC) directly to the un it will cau se dama ge. Re ad the follow ing instru cti ons care fu lly before m akin g any connections.
M-4271/0707 , pg. 9 of 26 b) Conne c ting The 6 P i n Mini D in Conne ctor Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Inte grate d 6 Pi n Connecto r Pin 2 should be connect ed to the Positive of th e power sourc e .
M-4271/07 07, pg. 10 o f 26 c) Connecting The 6 Pin M ini Din Connector & FMA 3000C Cable Th e two m at in g co nne cto rs sho uld be p ush ed to get her and th e pi gta il leads wired as foll ows: Connecting To The Integrated 6 Pi n C onnector Using A FMA 3000C Ca b le The RED wire should be conn ected to th e Posi tive of the power s ource .
M-4271/07 07, pg. 11 o f 26 d) Conne ctions F or The 9 P in D Sub C onnect o r Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Inte grate d 9 Pi n Connecto r PIN 3 sh ould be connec te d to the Po sitive of the powe r sou rce.
M-4271/07 07, pg. 12 o f 26 e) Conne ctio ns For T he 15 D Sub Conne ctor Using a s u itabl e mating co nnector the pins of t he i n tegrat e d connect or sho u ld b e wir ed as foll ows: Connecti ng To The Integr ated 15 Pin Connec tor PIN 7 sh ould be connec te d to the Po sitive of the powe r sou rce.
M-4271/07 07, pg. 13 o f 26 f) Usin g a 0-5V DC I nput / Output Power A d a p ter Pa c ka g e . An optional 0-5VDC I nput / Output Power Ad a pter P a ck a ge is a v a il able for use with t he FM A 3 200/3 400 S e ri es.
M-4271/07 07, pg. 14 o f 26 C. Operation 1. Warm U p Before ap plying power to the un it che ck a ll t ubing a nd electric a l connections. On ce corr e ct inst a llat ion is verifi e d switch o n t he pow e r. T he unit sho uld then b e allowe d to warm up for 5 min utes be fore gas pr essur e is appli ed.
M-4271/07 07, pg. 15 o f 26 Q 1 / Q 2 = K 1 / K 2 Q 1 is the flow rate of the new g as Q 2 is th e flow ra te of the orig ina l calibra tion gas K 1 is the K factor of th e new g a s K 2 is the K fact.
M-4271/07 07, pg. 16 o f 26 If a ga s o the r tha n th e ca l ib ra t ion g a s is u se d the n the a dj us te d m axi mu m (full scal e ) f low f or t he unit sho uld be c a lcul ated using t he K F a ctor for that gas (s ee s e ctio n C3 abov e). A zero or negative set- po int voltage wil l cause t he solenoi d valve to c lose fully.
M-4271/07 07, pg. 17 o f 26 7. Zer o Adjustm ents The zero should be checked as d etailed in section C part 2 . If an adjustm ent is needed the Z e ro Pot entiomet er should be carefull y tur ned until the output (VDC) b e com es zero .
M-4271/07 07, pg. 18 o f 26 FMA 3400/3400ST Series Dip Switches Dip swit ch 4 is allo ca t ed to the pri m ary c a lib ration gas. Dip swit ch 5 is alloc a te d to the second c a libr ation gas (i f a p plic able). Dip switch 6 is a llo ca t ed to the t hird calibration g a s (i f app lica bl e).
M-4271/07 07, pg. 19 o f 26 E. Specific ations Series FMA 3200 FMA 3400 FMA 3200ST FMA 3400ST Ac cur a cy (including linearity) ±1.5% of Full Scal e* ±1. 5% o f Full Sc ale* Second and third gases ±3. 0% F .S. * ±1.5 % o f Full Sc ale* ±1.5 % of Full Sc ale* Second and thi rd ga ses ±3.
M-4271/07 07, pg. 20 o f 26 F. Dimensions ALL DIMEN SIONS IN INCHE S (MIL LIMETERS IN BRAC KETS) FMA 3200/3200ST Series - 1/4 ” Stainl ess Fittings Shown.
M-4271/07 07, pg. 21 o f 26 FMA 3400/3400ST Series - 1/4 ” Stainl ess Fittings Shown.
M-4271/07 07, pg. 22 o f 26 G. Gas K Facto rs Gas Chemical Symbo l K Fa ct or Ace tylene C 2 H 2 0.58 9 Air - 1.00 0 Argon Ar 1.438 Butane C 4 H 10 0.2 60 Ca rbon D io xide CO 2 0.73 9 Deu teriu m D 2 1.00 0 Ethyl ene C 2 H 4 0.59 8 Freon 11 CCL 3 F 0.
M-4271/07 07, pg. 23 o f 26 H. Troubleshooting Guide Symptom Poss ible Cau s e Method of Correction Clicking no ise from controlle r Unit i n error mode C heck there is suff icien t pres s ure and tha.
M-4271/07 07, pg. 24 o f 26 Symptom Poss ible Cau s e Method of Correction Insuf ficient or vary ing power Check the power supply ou tp ut a nd inc reas e i f necessary Insuf ficient pr essure En sur e the pres sure (an diffe r en tial pressu re) is high enou gh o op erat e the uni t.
M-4271/07 07, pg. 25 o f 26 ..
M-4271/07 07, pg. 26 o f 26.
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