RaymarineメーカーFA-2Eの使用説明書/サービス説明書
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IWAKI AMERICA FA-2E AIR DRIVEN BELLOWS PUMP INSTRUCTION MANUAL.
CONTENTS 1 INTRODUC TION ........................................................................................................ 3 2 UNPACKING AND IN SPECTION .............................................................................. 2 2.1 Operation Sequence .
1 INTRODUCTION Thank you for selecting an Iwaki America FA-2E Air Driven Bellows Pump. These pumps are designed exclusively for pumping semiconductor grade, high p uri ty liquids. To ensure safety and maximum service life of the pump, please read this instruction ma nual thoroughly prior to installat ion and operation.
2 2 UNPACKING AND INSPECTION Open the package and check that the product conforms to your order. Also check each of the following points. For any problem or inconsistency, contact Iwaki America at once. 1. Check that the model num ber indicated on the name plate conforms to the specifications of your order.
3 2.1 Operation Sequence Refer to Figure 2. When pressurized air is supp lied to chamber 'a' of the pump, bellows 'A' is compressed and fluid is discharged from the bellows through the pu mp head discharge (outlet) port.
4 2 IDENTIFICATION CODES 1 2 3 FA - 2E - W02 1. Series code: FA : Non-metallic pump for medium temperature liquid 2. Maximum discharge volume: 0.5 Gal/min (2L/min) 3. Special specifications No symbol: Threaded suction & discharge W02 : Tubing connections 3 SPECIFICATIONS 3.
5 3.2 Proximity Sensor Speci fications (for FA-2E pumps) Type High frequency oscillation switch Output system NPN DC open/close output Power source voltage 12-24 VDC ±10%, ripple (P-P): 10% max Current consumption 13 mA max Setting distance Less than 80% of the switching distance Hysteresis 10% max of detecting distance Switching distance 1.
6 3.3 FA-2E Pump Dimensions/Mass Mass: 8.6 lbs (3.7kg) Figure 4.
7 4 HANDLING PRECAUTIONS The following information deals with measures to ensure safe operation of the pump system. Please read the precautions carefully. To operate this pump, a 4-way solenoid valve and a controller (Iwaki America supplied m odel or host PLC) are required.
8 4.2 Pump Handling Precautions • Do not stop pump without opening discharge first: When stopping pump operation, first release pressure in the discharge line & then shut off supply air pressure. Residual pressure in the liquid discharge pi ping may result in deformation of the bellows due to the force of hydraulic pressure.
9 • Prohibited liquids: The following liquids must not be used: - Liquids that are easily crystallized - Liquids containing slurry - Solvent based fluids Service life of the valve and bellows is shortened by liquids that are easily crystallized or contain slurry.
10 4.4 Liquid Circulation Syst em Design Recommendations In typical semiconductor wet process liquids, a catalyst such as H 2 O, O 3 or H 2 O 2 is added to the process liquid. The subsequent reaction generates heat a nd produces extreme gassing of the liquid.
11 3. Another technique is to install an air detection sen sor in the suction port area, so that the auto valve is automatically opened by a signal sent out from the sen sor and the air elimination operation is initiated. 5 INSTALLATION, PIPING & WIRING 5.
12 5.2 Piping 5.2.1 General 1. Carry out sufficient air blowing or flushing of tubi ng and connectors to remove foreign m atter from inside surfaces prior to connecting them with the pump. 2. Tube connections should be done such that the extra load of pi ping is not applied to the pump, use pipe supports as necessary.
13 2. Install a filter or strainer with low piping resi stance on the sucti on piping to block the entrance of solid particles or wafer fragments. CAUTION! Wafer fragments inside the pump may get stuck in the bellows and cause damage.
14 5.2.3 Air Piping It is critical that all pneumatic piping and component s be sized according to the porting of the pum p. Full port components with matching effective cross-sectional area are recommended. 1. Effective cross-sectional area indicates th e capacity to allow air to flow freely.
15 2. Install a relief type regulating valve: Fluctuation of supply air pressure results in fluctu ation of the pum p stroke rate as well as discharge volume. Install a regulating valve to maintain the ai r pressure at a fixed level. Select the regulator based on the air consumption rate of the pump.
16 Figure 9 Pneumatic Piping/Control (FA-2E shown).
17 5.4 Wiring instructions 5.4.1 General A. Extension of leak detector electrode wire: Keep the resistance value at 5K ohms or below. A resistance greater than the above may make it impossible to detect a conductivity change between the leak detection electrodes.
18 5.4.5 Wiring for proximity sensor CAUTION! The proximity sensors of the F series pump have three leads. Faulty wiring may cause the proximity sensor to short circuit. Carry out the wiring carefully and accurately. • Connect the leads of proximity sensor A with te rminals 6, 7, and 8 respectively of the controller.
19 6 OPERATION Carry out the following preparatory steps when starting pump operation for the first time after installation or after a long suspension of the pump operation. 1. Confirm that all liquid connectors along the liquid piping s ystem are fastened tightly.
20 7 TROUBLESHOOTING TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS Faulty operation of 4- way solenoid valve 1 Inspect and repair or rep lace. a Install qui ck e xhaust valves if damaged by corrosive gas Wrong wiring or disconnection in proximity sensor 1 Inspect and correct wiring.
21 TROUBLE CAUSES COUNTERMEASURES INSPECTION & CHECK POINTS Liquid leaks. Bellows are damaged. 1 Replace pum p head. a Check if s upply air pressure is within the specification. b Check if pump stroke speed is within the specification. c Check if liqu id temperature is .
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