Teledyneメーカー2002の使用説明書/サービス説明書
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INSTRUCTION MANUAL MODEL 2002 VACUUM GAUGE TELEDYNE HASTINGS INSTRUMENTS.
Model 2002 Vacuum Gauge Page 2 of 37 Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases alphabetically as the manual underg oes subsequent updates.
Model 2002 Vacuum Gauge Page 3 of 37 Table of Contents 1. GENERAL INFO RMATIO N ......................................................................................................................................... 4 1.1. F EATURES ................
Model 2002 Vacuum Gauge Page 4 of 37 1. General Information The Model 2002 is a wide range vacuum measuring in st rument consisting of a digital microprocessor-based display unit, a miniature, rugged,.
Model 2002 Vacuum Gauge Page 5 of 37 board is also available. The Model 2002 instrume nt accepts an external TTL level "Remote Zero" to zero the instrument when another instrument (e .g. an ion ga uge) indicates that the pressure is less than 1x10-5 Torr.
Model 2002 Vacuum Gauge Page 6 of 37 2. Inst allation This section is designed to assist in getting a new pr essure gauge into operation as quickly and easily as possible. Please read the following inst ructions thoroughly before inst alling the instrument.
Model 2002 Vacuum Gauge Page 7 of 37 2.4. Control Unit Installation • Environment: • Indoor use • Altitude up to 2000 meters • Operating temperature range from 50 to 400C • Maximum relative .
Model 2002 Vacuum Gauge Page 8 of 37 3. Front Panel Operation 3.1. Overall Functional Description The front panel of the control unit is shown in Figure 3. 1. The four circular blue buttons are used for the selection of display readout and the input of data.
Model 2002 Vacuum Gauge Page 9 of 37 Scientific Notation The Model 2002 measures pressure that spans mor e than seven decades. In order to easily display these readings, Hastings Instruments has employed scientific notation. In scientific notation, the mantissa (the fixed point part) is multiplied by some power of 10 (given by the exponent).
Model 2002 Vacuum Gauge Page 10 of 37 This will not correct the calibration if the tube has become contamina ted or damaged. This reset will not affect the gas selectio n, units or setpoints. Also see unit’s mode for def ault calibration restoration.
Model 2002 Vacuum Gauge Page 11 of 37 An important point to be noted is the fact that after th e adjustment, the new calibration coefficient is only in temporary memory. I f the instrument were unplu gged at this point, it would revert back to the original displayed value upon restarting.
Model 2002 Vacuum Gauge Page 12 of 37 3. Place the instrument in the C AL mode, then sim ultane ously press the UP and DOW N switches to bypass the interlock. The CAL light will start to flash indicating that the calibration mode has been activated. 4.
Model 2002 Vacuum Gauge Page 13 of 37 light will now flash. Use the UP and DOWN switches to individually select the de sired code. Return the Model 2002 to the RUN mode. Note: Factory calibration is performed using nitrogen on ly. Displayed pressure measurements using other gases are based on established gas th ermal conductivity data.
Model 2002 Vacuum Gauge Page 14 of 37 4. Rear Panel Description A schematic of the rear panel of the Mo del 2002 contro l unit is shown in Figure 4.2 ( Rear Pa nel Figure). The transducer is connected to the co ntrol unit via an female 9-pin “D” connector on the rear panel.
Model 2002 Vacuum Gauge Page 15 of 37 If the analog output voltage is being used in a data ac quisition system, the followin g formulas can be used to calculate pressure. Therefore, Note that the INT function simply retu rns to the first digit in a number.
Model 2002 Vacuum Gauge Page 16 of 37 4.3. TTL Outputs TTL outputs are provided for pr ocess control. High and Low set p oints are entered on the front panel (se e Section 3.4) and TTL signals are generated on the I/O cable in the following manner: 1.
5. Theory of Operation The Model 2002 transducer is comprised of two very di fferent sensors which provi de a span of measurement extending from 1000 Torr down to less t han 1x10-4 Torr . The piez oresistive device is a direct force sensor which provides pressure indication from 1000 Torr down to less than 1 Torr.
Model 2002 Vacuum Gauge Page 18 of 37 To insure temperature invariance, Therefore This requires for any change in sensitivity to be co untered by an equal but opposite change in applied voltage.
Model 2002 Vacuum Gauge Page 19 of 37 5.2. Pirani Sensor Figure 5.3a shows a thin film Pt resistive element on a one micron thick Si 3 N 4 continuous memb rane surrounded by a thin film Pt referenc e resistor on a Si substrate. The membrane is heated to a constant 8 0 C above ambient temperatur e that is monitored by the substrate resistor .
Model 2002 Vacuum Gauge Page 20 of 37 Since the first two losses are essentially constant at high vacuum for a given sensor, we can measure these losses and subtract them from the input power which leav es only the rate of he at transmission through the gas (E g ).
Model 2002 Vacuum Gauge Page 21 of 37 Ta = am bient temperature P = pressure Ag = surface area of the heate d portion of the membrane For nitrogen at a pressure of 760 To rr and a temperatur e of 20°C the mean free path (l) is less than 1 x 10-7 meters and is inversely prop ortional to pressure.
Model 2002 Vacuum Gauge Page 22 of 37 6. Communications Option Board Both RS-232 and RS-485 communicatio n interface boards are available as an option for the Model 2002. The communication option boards allow data to be output to a host comp uter with the appropriate interface.
Model 2002 Vacuum Gauge Page 23 of 37 6.1.1. Interface C onnector Pin Assignments for RS -485 (Full duplex-4 wire)(Jumper position 2-3). 6.1.2. For RS-485 (Half Du plex – 2 wire) (Jumper position 1-2).
Model 2002 Vacuum Gauge Page 24 of 37 When a lower case character is present in an example it r epresents an option. C h a r a c t e r D e s c r i p t i o n V a l i d I n p u t s : a RS-485 Address (hexadec imal 0-9, A-F) .............................
Model 2002 Vacuum Gauge Page 25 of 37 Notes: The setpoints may also be entered as a decimal number, e.g. [H=7 60.99<CR>] will be same as entering [H=7.6099E+ 2<CR>] . When inputting setpoint data, it should be entered in the same Units of Pressur e as the presently selected Units of Measurement (i.
Model 2002 Vacuum Gauge Page 26 of 37 Reset / Restore Commands C o m m a n d D e s c r i p t i o n F o r m a t N o t e s : Escape <Esc> ....................................................................... Rese t Command Buffer ...............
Model 2002 Vacuum Gauge Page 27 of 37 7. Relay Interface Option Board The relay interface board is available as an option for the Model 2002. Additionally, relays may be added to either the Digital option Board (RS -232 or RS-485) or to the Analog option Board (0 -10 Volts or 4-20mA ).
Model 2002 Vacuum Gauge Page 28 of 37 8. 4-20 mA Interface Option Board The Relay option board in the Model 2002 operates off of the set points defined by the user and programmed into the Model 2002 microprocesso r. For more informat ion about configuring these set points refer to Section 3 of this manual.
Model 2002 Vacuum Gauge Page 29 of 37 8.2. Operation The 4-20 mA output option board provi des dual channe l current output linearly proportional to the HPM 2002’s pressure reading. The first channel corre spon ds to the higher pressure range (0-1024 Torr).
Model 2002 Vacuum Gauge Page 30 of 37 9. 0-10V Interface Option Board The 0-10 V interface board is available as an option for the Model 2002. This board provides dual voltage channels linearly proportional to the HPM 2002’s pressu re reading. Please note that use of the Model 2002 with this option requires a CPU with firmwar e version 1.
Model 2002 Vacuum Gauge Page 31 of 37 The 0-10V output option board, provides voltage outputs pr oportional to the HPM-2 002 pressure reading. The first channel corresponds to the higher -pressu re range (0-1 024) Torr ). The second channel corrresponds to the lowe r pressure range (0 -1000mTorr).
Model 2002 Vacuum Gauge Page 32 of 37 10. T roubleshooting Guide Symptom: Power on - No displa y activity. Action: 1. Check for proper AC voltage at the outlet. 2. Ensure that the AC power cord c onnectors are firmly seated in the ir sockets. (at the outlet and at the instrument.
Model 2002 Vacuum Gauge Page 33 of 37 11. W ARRANTY 11.1. Warranty Repair Policy Hastings Instruments warrants this produc t for a period of one ye ar from the date of shipment to be free from defects in material and work manship.
Model 2002 Vacuum Gauge Page 34 of 37 12. Diagrams and Drawings.
Model 2002 Vacuum Gauge Page 35 of 37.
Model 2002 Vacuum Gauge Page 36 of 37 Model 2002 Outline Dimensions.
Model 2002 Vacuum Gauge Page 37 of 37.
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