TeledyneメーカーHFC-303/307の使用説明書/サービス説明書
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INSTRUCTION MANUAL HFM-301/305/306 FLOW METERS HFC-303/307 FLOW CONTROLLERS TELEDYNE HASTINGS INSTRUMENTS ISO 9001 CER TIFIED.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 2 of 35 Manual Print History The print history shown below lists the printing da tes of all revisions and addenda created for this manual. The revision level letter increases alphabetic ally as the manual undergo es subsequent updates.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 3 of 35 Table of Contents 1. GENERAL INFO RMATIO N ............................................................................................................................................ 4 1.1.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 4 of 35 1. General Information The Hastings 300 Series hi gh range mass flow meters are des igned to accurately measu re mass flow at a range between 25 slm and 10 000 slm.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 5 of 35 1.2. Specifications Accuracy .......................................................... HFM-301/3 05 & HFC-303/307: ±1% full scale (F.S.) ...............................................
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 6 of 35 1.3. Optional 4-20 mA Current Output An option to the standard 0 - 5 VDC out put is the 4 - 20 mA current output that is proportional to flow. The 4 - 20 mA signal is produced fro m the 0 - 5 VDC outp ut of the flow meter.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 7 of 35 2. Operation This section contains the neces sary steps to assist in getting a new flow meter/controller into operation as quickly and easily as possible. Please read the following thoroughly before attempting to install the instrument.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 8 of 35 sulfur hexafluoride) or at high pr essures (> 2 50 psig) the instrument must be installed horizontally. When mounted in a different orientation the instru ment should be re-zeroed at zero flow with the system pressurized to the expected operating p ressure.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 9 of 35 Figure 2-1 Table 2-1 “H” Pin-out Pin # 1 Do not use 2 Do not use 3 Do not use 4 Do not use 5 Signal Comm on 6 Output 0 -5 VDC (4-20m A).
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 10 of 35 Figure 2-2 Table 2-2 “U” Pin-out Pin # 1 Signal Comm on 2 Do not use 3 Do not use 4 +15 VDC 5 6 Output 0 -5 VDC (4-20m A) 7 Signal Com.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 11 of 35 2.6. 4 – 20 mA Connections The 300 Series flow meters have a 4 - 20 mA current output option available as an alternative to the standard 0 - 5 VDC output.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 12 of 35 2.7. Operation The standard instrument output is a 0 - 5 VDC and the sign al is propor tional to the flow i.e., 0 volts = zero flow and 5 volts = 100% of rated flow. The 4 - 20 mA option is also prop ortional to flow, 4 m A = zero flow and 20 mA = 100 % of rated flow.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 13 of 35 S pa n E rror - v s - P res sure f o r 0 . 0 1 4 " S enso rs -3 % -2 % -1 % 0% 1% 2% 3% 0 100 200 300 400 500 600 700 800 900 1000 P ressu re ( p si g ) Er ror s hif t ( % r ea d ing ) Me a n Ma x Mi n Figure 2-4 Sp an E rro r -v s- P ressu re fo r 0.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 14 of 35 S pan E rror v s P re ss ure for 0. 02 6" S e nsor - 20.0% - 18.0% - 16.0% - 14.0% - 12.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 15 of 35 Span Error v s Pre ssure -1.0 % -0.8 % -0.6 % -0.4 % -0.2 % 0. 0% 0. 2% 0. 4% 0. 6% 0. 8% 1. 0% 0 50 100 150 200 250 300 Pressure( psig) S pan Err or ( % r eadin g) M e a n erro r ma x mi n Figure 2-7 2.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 16 of 35 2.8. Range Changing Changing the range of a flow controller can be done in the field, but calibration is required. It is recommended however, that the unit be sent back to the factory along with the new range desired, gas and operating parameters .
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 17 of 35 of the flow meter signal to within ± 0.001 V olts of the command signal. The command signal will not match the flow signal if th ere is insufficient gas pres sure to generate the desired flow.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 18 of 35 2.14. Temperature Coefficients As the temperature of the instrument changes fr om the calibration temper ature, errors will be introduced into the output of the instrument. The Te mperature Coefficient of Zero describes the change in the output that is seen at zero flow.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 19 of 35 3. Theory and Function 3.1. Overall Functional Description The 300 Series flow meters consist of a sensor, base, shunt, control valve (303/307) and electronic circuitry.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 20 of 35 ( ) PP m C T T ud p h e a t e r a m b i e n t −= − • 2 conducted from the upstr eam and downstrea m coils to the foam insulation surroundin g them is assumed to be equal, based on the symmet ry of the sensor construction.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 21 of 35 1.75"(44.5 mm) diameter. The base and endcap seal is an O-ring gland config uration, which uses Viton as a standard sealing mate rial. The HFM-305/ 306 is made from a larger 3.0” b y 3.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 22 of 35 () Δ P LQ D Q D KK ce =+ + 128 8 4 2 24 μ π ρ π The end effects for a typical laminar fl ow element in air account for approxim ately 4% of the total pressure drop.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 23 of 35 3.7. Control Valve The control valve is an “automatic metering solenoid” valve (see Figure 3-3). While most solenoid valves operate in either the fully open or closed positions, the automatic metering solen oid valve is designed to control flow.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 24 of 35 3.8. Electronic Circuitry The 300 Series flow meters employs a thermal tr ansfer principle (capillary tube described in sect ion 3.2) to measure the flow through the sensor which is p rop ortional to the total flow through the instrument.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 25 of 35 4. Maintenance 4.1. Authorized Maintenance With proper care in installation and use , the flow meter will require little or no mainten ance. If maintenance does become necessary, most of the inst rument can be cleaned or repaired in the field.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 26 of 35 Symptom: Sensor has proper resistan ce readings , but little or no output with flow. Cause: Plugged sensor. Action: Shut off gas supply and disconnect the powe r to the flow meter. Remove cover and PC board from unit.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 27 of 35 4.4. End Cap Removal The end cap on the inlet side must be removed to ga in access to shunt assemb ly. First remove power and shut off the supply of gas t o the instrument. Disconnect the fittings on the inlet and outlet sides of the transducer and remove it from the system plum bing.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 28 of 35 4.5. Printed Circuit Boar d and Sensor Replacement NOTE : This instrument contains static sensitive PC boards. Maintain stat ic protection when handling t he PC boards. In the event that any of the PC boards fail, they are easily removed from the instrument and replaced with a spare.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 29 of 35 5. Outline Drawings 5.1. HFM-301 5.2. HFC-303.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 30 of 35 5.3. HFM-305 5.4. HFM-306.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 31 of 35 5.5. HFC-307.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 32 of 35 6. W ARRANTY 6.1. Warranty Repair Policy Hastings Instruments wa rrants this product for a period of one year from the date of shipment to be free from defects in material and workmanship.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 33 of 35 7. Appendix 7.1. Appendix 1- Volume tric versus Mass Flow Mass flow measures just w hat it says, the mass or number of mol ecules of the gas flowing through the instrument. Mass flow (or weight per u nit time) uni ts are given in pounds per hour (lb/hour), kilograms per sec (kg/sec) etc.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 34 of 35 7.2. Appendix 2 - G as Conversion Factors Gas conversion fact ors (GCF’s) for gasse s metered using Hastings I nstruments product s, can be found by visiting the Hastings Instru ments web site.
Manual: 152-082010 3 01-3 05-306_303-307 Series Page 35 of 35 20 / 1.4047 = 14.238 That is, you set the meter to read 14.238 sccm. Some meters, specifically the high flow meters, are calibrated in air. The flow readings must be corrected for the case where a gas other than air is flowing throu gh the meter.
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