TeledyneメーカーHFC-E-202の使用説明書/サービス説明書
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INSTRUCTION MANUAL HFM-E-200/HFC-E-202 SERIES FLOWMETERS/CONTROLLERS TELEDYNE HASTINGS INSTRUMENTS ISO 9001 CER TIFIED.
HFM-E-200/HFC-E-2 02 Page 2 of 30 Manual Print History The print history shown below lists the printing da tes of all revisions and addenda created for this manual. The revision level letter increases alphabetic ally as the manual undergo es subsequent updates.
HFM-E-200/HFC-E-2 02 Page 3 of 30 Table of Contents 1. INSTALLAT ION A N D OP ERATION ..................................................................................................... ........................ 4 1.1. F EATURES .....................
HFM-E-200/HFC-E-2 02 Page 4 of 30 1. Inst allation and Operation The Hastings HFM-E- 200 mass Flow-meter and HFC-E -20 2 Flow-controller are designed to a ccur ately measure and control mass flow over the range o f 10 sccm to 30 slm, without corrections or compensations for ga s pressure and temperature with an accuracy of better than ±1% FS.
HFM-E-200/HFC-E-2 02 Page 5 of 30 1.2. Specifications Accuracy .............................................................................................................. ±1% full scale (F.S.) Repeatability ........................................
HFM-E-200/HFC-E-2 02 Page 6 of 30 1.3. Optional 4-20 mA Current Output An option to the standard 0-5 VDC outp ut is the 4-2 0 mA current output that is proportional to flow. The 4 - 20 mA signal is pr oduc ed from the 0 - 5 VDC outp ut of the Flowmeter.
HFM-E-200/HFC-E-2 02 Page 7 of 30 2. Inst allation and Operation This section contains the neces sary steps to assist in getting a new Flowmeter/Controller into operation as quickly and easily as possible. Please read the following thoroughly before attempting to install the instrument.
HFM-E-200/HFC-E-2 02 Page 8 of 30 suggested that all connec t ions be checked for leaks after installation. This can be done by pressurizing the instrument (do not exceed 500 psig unless the Flowmeter.
HFM-E-200/HFC-E-2 02 Page 9 of 30 Pin 1 is the case ground. It should be connected to the cable shield if available and to the AC ground at the power supply. Pin 3 is the output signal from the flow controller. Th is output will be 0-5VDC, 5VDC being 10 0% o f rated or full flow.
HFM-E-200/HFC-E-2 02 Page 10 of 30 periodically during normal operat ion. Zero adjustment is requi red if there is a change in ambient temperature, or vertical orientat ion of the Flowmet er/controller.
HFM-E-200/HFC-E-2 02 Page 11 of 30 2.7.3. Operation with an external sensor. (Fig. 2.2) In some instances, it migh t be desirable to use an external sen sor to provide process infor mation to the control circuitry in the flow controller.
HFM-E-200/HFC-E-2 02 Page 12 of 30 3. Theory of Operation This section contains an o v erall functional descript ion of HFC Flow Controllers. Detailed schematics and parts lists can be found at the end of the manual in Section 6.
HFM-E-200/HFC-E-2 02 Page 13 of 30 3.4. Shunt: Measurement of flow rates higher th an the 10 sccm full scale is achiev ed by dividing the flow with a fixed ratio shunting arrangement, as is illustrated in Figu re 3.
HFM-E-200/HFC-E-2 02 Page 14 of 30 3.5. Valve: The control valve is an “automatic metering solenoid” valv e. While mo st solenoids operate in either the fully open or fully closed state, the automatic meteri ng solenoid valve is desi gned to control flow (see Figure 3.
HFM-E-200/HFC-E-2 02 Page 15 of 30 4. Maintenance This section contain s ser vice and calibration inform a tion . Some portions of the instrument are delicate. Use extreme care when servicing the flow controlle r. The potentiometer positions and the e lectrical components referred to in the troubleshooting sect ion can be found in Section 6.
HFM-E-200/HFC-E-2 02 Page 16 of 30 SYMPTOM : Flow controller oscillates. CAUSE : Flow controller not adjusted for the dynamics of the flow system. ACTION : Check upstream and downstream pres sures. The gas supply regulator should not have excessive lockup when flow shuts off.
HFM-E-200/HFC-E-2 02 Page 17 of 30 4.3.2. Miscellaneous adjustments Periodically, during normal operation, the ZERO should be checked and adjusted when required. If the instrument is not stopping the flow completely when com m and signal is Zero, the orifice may require turning approximately 1/8 turn clockw is e.
HFM-E-200/HFC-E-2 02 Page 18 of 30 Where: Formula 1: Formula 2: u P Q D σ 0028 . 0 = σ d Q D Ρ • ΔΡ = 0014 . 0 D = Diameter in inches Q = Flow rate in standard liters per min ute P = Pu - Pd in PSI Pu = Upstream pressure in PSIA Pd = Downstream pressure in PSI A σ = Specific gravity of gas Choose the orifice form Se ction 5.
HFM-E-200/HFC-E-2 02 Page 19 of 30 4.8. REPLACEMENT PARTS The following is a list of the available replacement parts and their factory st ock numbers. The HFM-E- 200 and the HFC-E-202 sh unts and sen sor modules are interch angeable.
HFM-E-200/HFC-E-2 02 Page 20 of 30 5. Conversion Factor T able Rec # Gas Symbol GCF Derived Densit y Density Synonyms Gamma R Z (g/L) 25°C (g/L) 0°C (Cp/Cv) / 1 atm / 1 atm 25 J/gm*K 1 Acetic Acid C 2 H 4 F 2 0.4155 4 2.700 - 2.947 - Et hanoic Acid 1.
HFM-E-200/HFC-E-2 02 Page 21 of 30 48 Difluoroethylene C 2 H 2 F 2 0.4492 4 2.617 - 2.857 - Vinylidenefluoride, G-1132A, Difluoroethene 1.2 129.85 2.0457 49 Dimethylamine C 2 H 7 N 0.3705 4 1.843 - 2.011 - N-me thylmethanamine 1.2 184.42 1.4793 50 Dimethyl Ether C 2 H 6 O 0.
HFM-E-200/HFC-E-2 02 Page 22 of 30 99 Isopentane C 5 H 12 0.2175 4 2.949 - 3.219 - 2- methylbutane 1.2 115.24 1.8975 100 Isopropyl Alcohol C 3 H 8 O 0.2931 4 2.456 - 2.681 - 2- propanol 1.2 138.356 1.7335 101 Isoxazole C 3 H 3 NO 0.4333 4 2.823 - 3.081 - 1-Oxa- 2-azacyclopentadi ene 1.
HFM-E-200/HFC-E-2 02 Page 23 of 30 152 R123A C 2 HCl 2 F 3 0.2699 4 6.251 - 6.823 - 1,2-Dichloro-1,2,2- trifluoroethane 1.2 54.37 3.1065 153 R125 C 2 HF 5 0.2826 2 4.906 - 5.355 - Pent afluoroethane 1.2 66.50 2.6844 154 R134 C 2 H 2 F 4 0.2996 4 4.170 - 4.
HFM-E-200/HFC-E-2 02 Page 24 of 30 6. W ARRANTY 6.1. Warranty Repair Policy Hastings Instruments wa rr ants this product for a period of one year from the date of ship ment to be free from defects in material and workmanship.
HFM-E-200/HFC-E-2 02 Page 25 of 30 7. Drawings 7.1. Notes: 1. Place jumper (Item 42) on pins 4 and 5 of P2 and P3 as sh own. 2. Place one on bottom two pins (1 and 2) of JP 3.
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