TeledyneメーカーHFM-60の使用説明書/サービス説明書
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page 1 INSTRUCTION MODEL HFM-60 MODEL HFM-60 MODEL HFM-60 MODEL HFM-60 MODEL HFM-60 FLOWMETER FLOWMETER FLOWMETER FLOWMETER FLOWMETER INSTRUMENTS TELEDYNE HASTINGS INSTRUCTION MANUAL.
page 2 Manual Print History Manual Print History Manual Print History Manual Print History Manual Print History The pr int histor y shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases alphabetically as the manual undergoes subsequent updates .
page 3 T T T T T able of Contents able of Contents able of Contents able of Contents able of Contents 1.0 1.0 1.0 1.0 1.0 GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA GENERAL INFORMA TION TION TION TION TION ........................
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page 5 General Information SECTION 1 The Hastings Mass Flowmeter, HFM-60 is designed to accurately measure mass flow up to 70 slpm with an accuracy of better than 3%. Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases.
page 6 1.2 Specifications Accuracy ......................................................................................................................... <±3% F .S. Repeatability .................................................................
page 7 1.3 Optional 4-20 mA Current Output An option to the standard 0-5 VDC output is the 4-20 mA current output that is propor tional to flow . The 4 - 20 mA signal is produced from the 0 - 5 VDC output of the flowmeter.
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page 9 Installation SECTION 2 This section contains the necessar y steps to assist in getting a new flowmeter in operation as quickly and easily as possible.
page 10 There is a threaded hole in the bottom of the transducer that can be used to secure it to a mount- ing bracket, if desired. Other holes for special mounting can be added to the end cap as desired.
page 11 2.6.4 Range Changes: The range of the flowmeter can be changed in the field if recalibra tion facilities are a vailable. The flowmeter ma y require a different shunt which can be purchased from the factor y .
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page 13 Theory of Operation SECTION 3 This section contains an overall functional description of the HFM-60. Detailed schematics and parts lists can be found at the end of the manual in Section 5.
page 14 3.3 Base The 6061 aluminum alloy base has a 1" square cross-section and is 3.375" long (with end cap). The internal flow channel is 0.812" diameter with in and out 304L stainless steel fittings 1/4" NPT to 1/4" Swagelok fittings.
page 15 Aluminum epoxy figure 3.3 (a) 10 sccm - 200 sccm (typical configuration) figure 3.3 (b) annular flow passages 500 sccm - 70 slm (typical configuration) flow flow.
page 16 3.5 Electronic Circuitr y The HFM-60 employs a thermal flow sensor (capillar y tube descr ibed in section 3.2) to measure the flow which is proportional to the total flow through the instr ument. The sensor develops a differential voltage output signal proportional to flow which is approximately 1 mV full scale magnitude.
page 17 4.1 Authorized Maintenance With proper care in installation and use, the flowmeter will require little or no maintenance. If maintenance does become necessar y , most of the instr ument can be cleaned or repaired in the field. Some procedures may require recalibration.
page 18 4.3 Adjustments Calibration Procedure (See figure 4.1) 1. Connect pow er to pins 1 and 2 as specified in Section 2.5. Allow the instrument to warm up for 30 minutes with 10% flow .
page 19 4.4 End Cap Removal The end cap on the inlet side must be remov ed to gain access to the filter and shunt assembly . First remove power and shut off the supply of gas to the instrument. Disconnect the Swagelok fittings on the inlet and outlet sides of the transducer and remove it from the system plumbing.
page 20 4.5 Printed Circuit Board Replacement In the event that any of the PC boards fail, they are easily removed from the instrument and replaced with a spare. This ease in disassembly and replacement substantially reduces instrument downtime. 1 . Replacement of the 4-20 mA option PC board: Unplug the power cable from the trans ducer.
page 21 W arranty and Repair SECTION 5 5.1 W ar ranty Repair P olic y Hastings Instruments warrants this product for a period of one year from the date of shipment to be free from defects in material and workmanship . This warranty does not apply to defects or failures resulting from unauthorized modification, misuse or mishandling of the product.
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page 23 Diagrams and Drawings SECTION 6.
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