Agilent TechnologiesメーカーE5250Aの使用説明書/サービス説明書
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Agilent T echnologies Agilent E5250A Low Leakage Switch Mainframe User’ s Guide.
Notices © Agilent T e chnologies 1995 - 200 5 No part of this manu al may be r eproduced in any form or by any means (including elec- tronic storage and retrieval or translation into a foreign language) without p rior agree- ment and written consent from Agilent T echno logies, Inc.
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• Herstellerbescheinigung GEÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 4 5635 T . 19 • Manufacturer’ s Declaration ACOUSTIC NOISE EMISSION Lpa < 70 dB operator position normal operation per ISO 77 79 NOTE This ISM device complies with Canadian ICES-001.
Safety S ummary The following gen eral safety precautions mus t be observed du ring all phases of operation, service, and repair of this instrument. Failure to comply with these precautions or with specific war nings else where in this manu al may impair the prot ecti ons pr ovi ded by th e equ ipme nt.
• DO NOT SU BSTITUTE P ARTS OR MO DIFY INST RUMENT Because of the danger of introducin g additional hazards, do not install su bstitute parts or perform an y unauthorized modification to the instrument.
Safety S ymbols The g ener al d efini tion s of safe ty sym bols use d on eq ui pmen t or in man uals are listed below . Instruction manual symbo l: the product will be marked with this s ymbol when it is necessary for the user to refer to the instruction manual in order to protec t against damage to the instrument.
In This Manual This manual is a user’s guide for Agilent E5250A, and consists of the following chapters: • Intro duc tion Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10 × 12 Matrix Sw itch, and E 5255A 24 (8 × 3) Channel Multiplexer .
• Specifications Lists specifications, typical d ata, supplem ental data, and reference data for the E5250A , E5252A, and E5255A. • Error Messages Lists a nd des cribe s the er ror m essage s for th e E525 0A. • SCPI C ommand Su mmary This is a quick ref erence for the SCPI sub system commands available for the E5250A .
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Contents Agilent E525 0A User ’ s G uide, Editio n 8 Contents - 1 1. Intr oduction Agilent E5250A Prod uct Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 Front Panel T our . . . . . . . . . . . . . . . . . . . . .
Contents - 2 Agilent E 5250A User ’ s Guide, Edit ion 8 Contents Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Performance V erification . . . . . . . . . . . . . . . . . . .
Contents Agilent E525 0A User ’ s G uide, Editio n 8 Contents - 3 T o Connect the E5252A Outp ut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20 T o Connect the E5255A Outp ut . . . . . . . . . . . . . . . . . . . . . . . .
Contents - 4 Agilent E 5250A User ’ s Guide, Edit ion 8 Contents Controlling E5250 A by Using HP BASIC . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5 Creating a Co ntrol Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Contents Agilent E525 0A User ’ s G uide, Editio n 8 Contents - 5 Status Reporting S tructure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48 Status Reporting S tructure . . . . . . . . . . . . . . . . . . . . .
Contents - 6 Agilent E 5250A User ’ s Guide, Edit ion 8 Contents 12. SCPI Comma nd Summa ry.
1 Intr oduction.
1- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Introductio n This chapter gi ves an overview of Agilen t E5250A, E5252A, and E5255A. • “Agilen t E5250A P roduct Des cription” • “Agilen t.
Agilent E5250A Us er ’s Guide, Edition 8 1- 3 Introductio n Agilent E5250A Pro duct Desc ript ion Agilent E5250A Product Description Agilent E 5250A Low Leakage Switch Main frame is a compu ter- controlle d switching matrix main frame designed for semiconductor dc char acteristics measurement ap plications.
1- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Introductio n Agilent E5250A Produc t Descr iption Front Panel T our The E5250A h as 2 hard k eys and 4 LED i ndicators o n the front panel as shown in Figur e 1-1. LINE k ey Used to turn the E5250A on or o ff.
Agilent E5250A Us er ’s Guide, Edition 8 1- 5 Introductio n Agilent E5250A Pro duct Desc ript ion AUX INPUT AUX INPUT connectors are for C-V measurements, pulse input, and so on. The E5250A has 4 AUX INPUT ports: HF1, HF2, CV1, CV2. These are BNC type connectors.
1- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Introductio n Agilent E5252A Produc t Descr iption Agilent E5252A Product Description The E5252A 1 0 × 12 Matrix Switch is a 10-input to 12-output switching ma trix card for the E5250A.
Agilent E5250A Us er ’s Guide, Edition 8 1- 7 Introductio n Agilent E5252A Pro duct Desc ript ion Input P orts The E5252A has 10 in put ports via the E52 50A.
1- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Introductio n Agilent E5255A Produc t Descr iption Agilent E5255A Product Description The E5255A 2 4 (8 × 3) Channel Multiplexer is a 2-input to 24-output multiplexer card for t he E5250A. Th e E5255A consi sts of 3 blocks (three 2 × 8 multiplexers).
Agilent E5250A Us er ’s Guide, Edition 8 1- 9 Introductio n Agilent E5255A Pro duct Desc ript ion Resi stors Resistors con nected between BIAS path an d IV path are for protecting D UT from el ectrical damage. Wh en shipped f rom factory , 0 Ω resistance is used in the E 5255A.
1- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Introductio n Agilent E5255A Produc t Descr iption Figur e 1-5 E525 5A Block Diagram BIAS Inp ut 1 Outp ut Re sisto r IV Input 1 BLOCK 1 1 2 3 4 5 6 7.
Agilent E5250A Us er ’s Guide, Edition 8 1- 1 1 Introductio n Agilent E5255A Pro duct Desc ript ion T able 1-2 E5255A In put/Outpu t Connectors Figur e 1-6 E5255A B IAS INPUT Con nectors and OU TPUT Connectors W ARNING Do not touch the force and guard terminals of the OUTPUT connectors while the E5250A i s turned on.
1- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Introductio n Options an d Acces sories Options and Accessories This section list s the options and accessories available for the E5 250A.
Agilent E5250A Us er ’s Guide, Edition 8 1- 1 3 Introductio n Opti ons and Ac cessor ies T able 1-4 lists accessories fu rnished with the E5250 A, E5252A, and E5255A.
1- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Introductio n Options an d Acces sories Contents o f the E5250A Program Disk: Vi r t ua l F r o n t Panel Utility In teractive control program for the E5250A. Runs on Agilent 4155/4156's built-in IBASIC controller .
Agilent E5250A Us er ’s Guide, Edition 8 1- 1 5 Introductio n Opti ons and Ac cessor ies T able 1-5 lists accessories available for the E5250A. T able 1-5 A vailable Acces sories Model Number Option Item Descript ion E5252A 10 × 12 Matr ix Swit ch E5255A 24 (8 × 3) Channel Multiplexe r 16494A T riaxial Cable 16494A-0 01 1.
1- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Introductio n Options an d Acces sories.
2 Installatio n.
2- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Installation This chapter describes requirements to install Agilent E5250A and the tasks for installation, and is organized into the following three sections: • “T o Inspect the E525 0A and Accesso ries ” describes how to inspect the E5250A when you rec eive it.
Agilent E5250A Us er ’s Guide, Edition 8 2- 3 Installatio n T o Ins pect the E 5250A an d Accesso ries T o Inspect the E5250A and A ccessories When you receive an d open the box that contains the E5.
2- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Installation Requirem ents Requir ements This secti on describes the followi ng requir ements for the E5 250A.
Agilent E5250A Us er ’s Guide, Edition 8 2- 5 Installatio n Requirem ents W ARNING For protection fr om electrical shock, the power cable gr ound must not be defeated.
2- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Installation Requirem ents Operating En vir onment The E5250A m ust be operated within the f ollowing enviro nmental cond itions: • T emperature: 5.
Agilent E5250A Us er ’s Guide, Edition 8 2- 7 Installatio n Installing the E52 50A Installing the E5250A This section describes ho w to install the E5250A.
2- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Installation Installing t he E5250A T o Install Plu g-in Card The E5252As and E5255As are plug-i n cards (modules ). Y ou install thes e cards in card slots 1 to 4 of the E5250 A. The following procedur e explains the card installation and removal: 1.
Agilent E5250A Us er ’s Guide, Edition 8 2- 9 Installatio n Installing the E52 50A Figur e 2-1 Module E xtractor an d Location of the Scr ew Hole T o Install Blank Panel CAUTION T o prevent thermal damage to the E52 50A cards, be s ure that blan k panels (Agi lent part nu mber E5250-6 0003) are ins talled in all u nused slots.
2- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Installation Installing t he E5250A T o Configure E5255A The Agilent E5255A has three 2-input 8- output mu ltiplexers. Y ou can conf igure several multiplexers b y modifying some internal co nnections.
Agilent E5250A Us er ’s Guide, Edition 8 2- 1 1 Installatio n Installing the E52 50A Figur e 2-2 Agilen t E5255A Com ponent Lo cations T o M odify B IAS In put Each multiplexer block has an independent BIAS input.
2- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Installation Installing t he E5250A For example, if a m ainframe installs four E5255As which the IV in1 cable is connected to the SMU1 input connector.
Agilent E5250A Us er ’s Guide, Edition 8 2- 1 3 Installatio n Installing the E52 50A E5255A Co nfiguration Examples The following exa mple configurations are described: • “24-output multiplexer .
2- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Installation Installing t he E5250A 4. Set bit 1 to ON (1) and bit 2 thru 4 to OFF (0) for DIP SW1 to SW3. 5. Install the module into the slot 1 of the mainframe. For installing module, see “T o Install Plu g-in Card” on page 2-8.
Agilent E5250A Us er ’s Guide, Edition 8 2- 1 5 Installatio n Installing the E52 50A 5. Connect wires bet ween BIASout1 and BIASin2, also between BIAS out2 and BIASin3 . 6. Install the module into the slot 1 of the mainframe. For installing module, see “T o Install Plu g-in Card” on page 2-8.
2- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Installation Installing t he E5250A 96-output multiplexer (1-BIAS input, 1-IV input, 4 modules) T o make this mul tiplexer , you need fo ur E5255As, eight wires (furn ished), fi ve BNC open caps (furnished), and three BN C cables.
Agilent E5250A Us er ’s Guide, Edition 8 2- 1 7 Installatio n Installing the E52 50A T o Set GPIB Address Every devi ce on the GPIB bu s must have a unique addres s. If you ne ed to change the GPIB address of t he E5250A, make sure the E525 0A is turned off.
2- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Installation Maintenan ce Maintenance Maintenance s hould be perf ormed peri odically to keep the E5250A in good condition. Perfor mance V erificati on Performan ce verification mu st be perf ormed periodi cally so that the instrument s satisfy the specifications, and keep a good condition.
3 Executing Self-T est and Leak T e st.
3- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Executi ng Se lf-T est and Le ak T e st This chapter descr ibes how to execute the Self-T est and the Leak T es t.
Agilent E5250A Us er ’s Guide, Edition 8 3- 3 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est Executing Sel f-T est The Self-T est of the E5250A consists of the following three tests: T able 3-1 E5250A Self-T est Items T est Item Description Executed by R efer to Contr oller Te s t Checks the operation of the E 525 0A fi rmw ar e.
3- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est T o Execute Self-T est (S tandalone) Control ler T est is executed au tomatically when yo u turn on t he E5250A. Y ou execute the Relay T est by press ing the Local/Self T est key on th e E5250A fron t pane l.
Agilent E5250A Us er ’s Guide, Edition 8 3- 5 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est NOTE If Fail LED is ON after Relay T est After executing the relay test, if the Fail LED turns on, the cause is one of the following: • The Relay T est Adapter is not conn ected or a cable is still connected to input connector .
3- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est T o Execute Self-T est using External Contr oller Y ou can execute Self-T est from an ex ternal controller by using SCPI commands in a progr am.
Agilent E5250A Us er ’s Guide, Edition 8 3- 7 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est T able 3-2 SCPI Commands for Self-T est NOTE Front Pa nel Interface T est After the :DIA.
3- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Executi ng Se lf-T est and Le ak T e st Executi ng Se lf-T est Self-T est Programming Example This sample program is effective for an E5250 A that has four cards installed. If your E5250A does not have fo ur cards ins talled, delete t he Relay T est progr am lines for the empty card slots.
Agilent E5250A Us er ’s Guide, Edition 8 3- 9 Execu ting S elf-T es t and L eak T est Exec utin g Self -T est 430 ENTE R @H p525 0;A 440 IF A=0 TH EN GOTO 470 450 DISP "C ard 3 failed. Pr ess Cont inue to te st Card 4" 460 GOTO 480 470 DISP "C ard 3 passed.
3- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity Using the Self-T est U tility The Self-T est Utilit y is a Self-T est program for the E5250A, and runs on the Agilent 4155/4156's built-in IB ASIC con troller .
Agilent E5250A Us er ’s Guide, Edition 8 3- 1 1 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility T o S tart the Self-T est Utility 1. Before tur ning on the 4155/41 56 and E5250A, conn ect the GPIB cable between the E525 0A and the 415 5/4156.
3- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity T o Execute Self-T est On the MAIN MENU of the E5250A Self-T est Utility , sel.
Agilent E5250A Us er ’s Guide, Edition 8 3- 1 3 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility Exec uting th e Contr oller T est T o execute the controller test, pre ss the CONTROLLER so ftkey . If [F] result is displayed after the test, the E5250A is defective.
3- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity Executing the Relay T est T o execute the Relay T est, do the following: 1.
Agilent E5250A Us er ’s Guide, Edition 8 3- 1 5 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility T o Execute Leak T est NOTE Leak T est is for checking leakage current of the E5250A with plug- in cards installed. If leak test result is too large for your application, contact nearest Agilent T echnologies Service Center .
3- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity T o execute the Leak T e st, do the following: 1. On MAIN MENU of the E5250A Self-T est Utility , select LEAK TEST softkey . The follo wing message is displayed: Input Ag ilen t 4155 /4156 GP IB add ress (defaul t 817) :? 2.
Agilent E5250A Us er ’s Guide, Edition 8 3- 1 7 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility 4. Select des ired IVn softk ey ( n =1 to 6) f o r input p ort you want to test .
3- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity 5. Sel ect th e des ired SM Um s oftk ey ( m =1 to 6). Foll owing message is display ed dependi ng on the connect ion type: • Message for Kelvin co nnection: Discon nect Kel vin ca ble from IVn t ermi nal.
Agilent E5250A Us er ’s Guide, Edition 8 3- 1 9 Execu ting S elf-T es t and L eak T est Using th e Self-T est Ut ility 8. Connect the cable from the 4155/415 6 SMU port specified by the SMUm softke y ( m =1 to 6) in step 5 to the E5250A input port specified by the IVn softke y ( n =1 to 6) in step 4.
3- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Executi ng Se lf-T est and Le ak T e st Usin g the S elf-T est Util ity.
4 Setting up Measur e ment Envir onment.
4- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Sett ing up Measu remen t Enviro nment This chapter explains how to connect your instruments to Agilent E5250A input, and how t o connect the E52 50A output to your wafe r prober or test fixture.
Agilent E5250A Us er ’s Guide, Edition 8 4- 3 Setting u p Measur ement Env ironmen t Connecto r Plates Connector Plates A connector plate is the inter face to connect the E52 50A to your p rober or test fixture. The fo llowing connector plates are available for the E525 0A.
4- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Sett ing up Measu remen t Enviro nment Connector P lates Blank Plate 16495E Half size blank plate. This plate is us ed to cover o penings when you made too big openings for mounting the connector plate.
Agilent E5250A Us er ’s Guide, Edition 8 4- 5 Setting u p Measur ement Env ironmen t Conn ecting 8- Channe l Shield ed Coax ial Ca ble Connecting 8-Channel Shielded C oaxial Cab le This secti on introduces Agilent 16494 E wide temperat ure 8-channel s hielded coaxial cable, and ex plains how to connect the 16494E to the Devic e Under T est (DUT).
4- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Sett ing up Measu remen t Enviro nment Mounting Conn ectors Direc tly Mounting Connectors Dir ectly Previous sections descr ibed the informatio n to .
Agilent E5250A Us er ’s Guide, Edition 8 4- 7 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T able 4-1 Recommended Parts T able 4-2 Dimensions of Connector Holes Usage Agilent Part No.
4- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Sett ing up Measu remen t Enviro nment Mounting Conn ectors Direc tly T o Make Interlock Circu it The interlock circuit is to prevent el ectric shock when touching measure ment terminals.
Agilent E5250A Us er ’s Guide, Edition 8 4- 9 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly Figur e 4-3 Dimens ions of In terlock Swit ch (Agilent part number 3101-03 02) Fi.
4- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Mounting Conn ectors Direc tly T o Install LED Cir cuit The 4155/41 56 semicondu ctor parameter analyzer's I ntlk connector pr ovides the interloc k signal and a LED drive sig nal.
Agilent E5250A Us er ’s Guide, Edition 8 4- 1 1 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T o Conn ect Inte rlock Circuit to Instrument Before beginning the measurement, connect the interlock circuit to the interlock connector of the instrument as follows .
4- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Mounting Conn ectors Direc tly NOTE T o Check Interlock Circuit If you u se the 4155/41 56, you can easily check th e interlock ci rcuit as follo ws: 1. Connect t he Intlk connector of the 4155/ 4156 to y our interlock circuit.
Agilent E5250A Us er ’s Guide, Edition 8 4- 1 3 Setting u p Measur ement Env ironmen t Mounting Co nnecto rs Direc tly T o Connect Connectors to DUT Following figure shows a connection ex ample fr om the connector to DUT . Use low-nois e coaxial cabl e (Agilent part number: 812 1-1 191).
4- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Mounting Conn ectors Direc tly For highly accur ate current forcing and m easurements while m inimizing leakage, surroun d all force and sense lines fr om SMU by a guard as far as poss ible, and make cables st able by taping .
Agilent E5250A Us er ’s Guide, Edition 8 4- 1 5 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t Connecting the E5250A Input This secti on explains how to connect i nstruments to the E5250A .
4- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Inpu t T able 4-3 E5250A In put Connections Application Inst rumen t E5 250A Input Connector Cable Required Agilent Model No .
Agilent E5250A Us er ’s Guide, Edition 8 4- 1 7 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t In the table abov e, • AUX means CV1, CV2, HF1, or HF2 connector . • The E5250A does not have input conn ectors for the in terlock.
4- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Inpu t T o Connect Bias Source to the E5255A Bias Input The E5255A BIAS INPUT con nector is a BNC-type connecto r . Use BNC cable to conn ect the bias source to th e BIAS INPUT of the E5255A.
Agilent E5250A Us er ’s Guide, Edition 8 4- 1 9 Setting u p Measur ement Env ironmen t Connectin g the E 5250A Inpu t Figu re 4-7 Conne ctio n of T riax -Dua l T riax A dap ter By this connection, in put signal for SMU INPUT connectors is as follows: If you mak e non-Kelvi n connecti on for the E52 50A output s, use the od d input port only .
4- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Ou tput Connecting the E5250A Output This secti on describes how to conn ect the E525 2A and E525 5A output to connector plate, you r test fixt ure, and so on.
Agilent E5250A Us er ’s Guide, Edition 8 4- 2 1 Setting u p Measur ement Env ironmen t Connecti ng the E52 50A Outpu t T able 4 -4 E5252A Outp ut Cable For Kelvin connection, use Kelvin triaxial cable liste d in T able 4-4.
4- 22 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Connectin g the E 5250A Ou tput T o Connect the E5 255A Output The E5255A output conn ector is show n in Figur e 4-10.
Agilent E5250A Us er ’s Guide, Edition 8 4- 2 3 Setting u p Measur ement Env ironmen t Measur ement Cable Lengt h Measur ement Cable Length This section describes how to calculate the tota l guard c.
4- 24 Agilent E5250 A User ’s Guide, Edit ion 8 Sett ing up Measu remen t Enviro nment Measuremen t Cable Length T able 4-6 Guard Capacitances of E52 50A M easur ement En viron ment (T ypical) Connection Agilent Model/Part No.
5 Contr olli ng the E5250A.
5- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Controll ing the E5250 A This chapter explains how to control Agilent E5250A. • “Methods for Controlling the E5250A” introduces several methods for controlling the E5250A.
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 Control ling the E5250A Methods fo r Control ling the E5250A Methods fo r Contr olling the E 5250A This section introduces several methods for controlling the E5250A. T able 5-1 lists the E5250A co ntrol methods, and th e operating systems on which each control method c an be used.
5- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Controll ing the E5250 A Method s for Cont roll ing the E5 250A VFP Data Upload Library This subp rogr am l ibrar y is us ed to con vert the control data created by the V irtual Front Panel (VFP) Utility to data that can be used with your program runs on HP BASIC.
Agilent E5250A Us er ’s Guide, Edition 8 5- 5 Control ling the E5250A Switch Con trol Basics Switch Control Basics This section introduces basic information for controlling the relay switches on the E5252A and the E5255 A.
5- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Controll ing the E5250 A Switch Control B asics Channel List and Channel Configuration Some SCPI comm ands require the channel _list parameter , which determines the relays to close/open in the E5252A or the E5255 A to connect/disconnect the desired channels.
Agilent E5250A Us er ’s Guide, Edition 8 5- 7 Control ling the E5250A Switch Con trol Basics T able 5-2 Card Number In the chann el_list , you can specify mu ltiple channels by using comma (,) or co lon (:) as follows : Comma: use between each specified cha nnel as in following examples: • (@10101,10102,10103) means 1 0101, 1010 2 and 1010 3.
5- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Controll ing the E5250 A Switch Control B asics Channel Configu ration The E5250A al lows the fol lowing two chan nel configurat ion mode s. The way to specify the channel _list depen ds on the channel configuratio n mode.
Agilent E5250A Us er ’s Guide, Edition 8 5- 9 Control ling the E5250A Switch Con trol Basics Connection Rule Connection rule is used to specify if an input or output port can have multiple connections, and i t is specified by th e [:ROUT e]:CONNection:RULE command described in Chapter 7.
5- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Connection Sequence NOTE This is only for cards that are set to the Single Route connection rule.
Agilent E5250A Us er ’s Guide, Edition 8 5- 1 1 Control ling the E5250A Switch Con trol Basics Bias Mode NOTE Connection r ule cannot be specified fo r the input Bias Po rt, which can always be connected to multiple output po rts. Connection sequ ence (to connect input Bias Port to output ports) is always Break-Before-Mak e.
5- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Figur e 5-2 Examp le of Bias Mo de Figure 5-2 s hows an example.
Agilent E5250A Us er ’s Guide, Edition 8 5- 1 3 Control ling the E5250A Switch Con trol Basics Couple Port NOTE This function is available only for the E5252A. Bias Por t and Couple P ort cannot be s et to the same port number . This function is used for making Kelvin connections.
5- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics The two output p orts are determined by the channel_list parameter o f the :ROUT:CLOS command, a nd the lower outpu t port number i s always od d.
Agilent E5250A Us er ’s Guide, Edition 8 5- 1 5 Control ling the E5250A Switch Con trol Basics E5252A Channel Li st This secti on describes how to def ine the channel_list specifically for the E5252A. For the basic s yntax of the channel _list , see “Ch annel List and Channel Config uration” on page 5-6.
5- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Figur e 5-4 E5252A C hannel Num ber in Normal Co nfig.
Agilent E5250A Us er ’s Guide, Edition 8 5- 1 7 Control ling the E5250A Switch Con trol Basics Auto Conf igurat ion Mod e T o use this mod e, the E5252 A must be installed in the E5250 A slots co ntinuous ly from sl ot1 (slo ts 1,2; o r slots 1 ,2,3; or slots 1, 2,3,4).
5- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Figur e 5-5 E5252A C hannel Num ber in Auto Conf ig. Mode (example f or 10 × 48 matrix) Input Por t No.
Agilent E5250A Us er ’s Guide, Edition 8 5- 1 9 Control ling the E5250A Switch Con trol Basics E5255A Channel Li st This secti on describes how to def ine the channel_list specifically for the E5255A. For the basi c syntax of channel _list parameter , see “Channel List and Chann el Config uration” on page 5-6.
5- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Card Number: One digit: 1 to 4. E5250A slot number in which card is installed. Channel Numb er: Four digi ts: XXY Y . • XX: inpu t port nu mber (depends on the block n umber).
Agilent E5250A Us er ’s Guide, Edition 8 5- 2 1 Control ling the E5250A Switch Con trol Basics Auto Conf igurat ion Mod e T o use this mod e, the E5255 A must be installed in the E5250 A slots co ntinuous ly from slot 1 (slot s 1,2; or s lots 1,2, 3; or slots 1,2,3,4).
5- 22 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics In the Au to Configurati on mode, you can omit any zer os at begin ning of chann el. For example, channel 00101 can be expressed by 101. Figure 5 -7, T able 5-9 and Figu re 5-8 s how examples of the Channel Numb er .
Agilent E5250A Us er ’s Guide, Edition 8 5- 2 3 Control ling the E5250A Switch Con trol Basics T able 5-9 Example IV Input Connection and Channel Number Slo t No. Block No. IV Input to One Channel: 5 digit s Configura tion Card Number (first 1 digit ) Channel Numb er: 4 digits Input Port No.
5- 24 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Switch Control B asics Figur e 5-8 Example for E5255A Chan nel Number in Auto Config. Mod e XXXX : Chan nel Number Made from Cards in Sl ot #1 and #2. Block #1 to 3 of each card shoul d be connected in seri es.
Agilent E5250A Us er ’s Guide, Edition 8 5- 2 5 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Using V irtual Fr ont Panel Utility The V irtu al Front Panel (VFP) Utility is a control program for the E5250A. The VFP utility runs on Agilent 4155/4156 Semiconductor Parameter Analyzer's built-in IBASIC co ntroller .
5- 26 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Functions of Vi rtual F r ont Panel Utility The V irtu al Front Panel (VFP) utility is used to create the E5250A setup data and interactiv ely (from the 41 55/4156) mak e channel con nections on the E5250A plug-in cards.
Agilent E5250A Us er ’s Guide, Edition 8 5- 2 7 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Requir ements The following are required to execute the V irtual Fro nt Panel (VFP) Utility . S tarting the V irtual Front Panel Utility 1.
5- 28 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility The follo wing softk eys are display ed on righ t side of the 4155/4156 screen. Confirming the E5250A Card Co nfigurations Select SHOW CONFIG softk ey .
Agilent E5250A Us er ’s Guide, Edition 8 5- 2 9 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Changing the VFP Setup Mode Select the SETUP MODE softkey .
5- 30 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Figur e 5-9 Exampl e of SETUP M ODE MENU Agile nt E5250 A Virtua l Front Panel Ut ility .
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 1 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Defining Label s for the E5250A Input Ports Y ou can define labels to use f or the input ports o f each row in the MEMOR Y SETUP P ANEL. Select the DEFINE LABEL softkey .
5- 32 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility T o define labels for the E5255A bias input ports Select the CARD n INPUT softkey (n =1 to 4). The foll owing softkeys are displayed: Select the B IASn LABEL so ftkey (n=1 to 3 ).
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 3 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Making Connections and Changing the Setu p Data Select SETUP MEMOR Y so ftkey . Th e E5250A is initially set to connections of setup memory 1, then SETUP MEMOR Y MENU and following s oftkeys are disp layed .
5- 34 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Figur e 5-1 1 Examp le of SETU P MEMOR Y MENU Agile nt E5250 A Virtua l Front Panel Ut i.
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 5 Control ling the E5250A Usin g Virtual F ront Pane l Util ity T o dele te a se tup me mory Select the DELETE SETUP softkey . Th e following mes sage is displayed. Input se tup me mory number to be dele ted? ENTER to ca ncel .
5- 36 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility T o modify th e settings i n Current Setup Memory Select MODIFY SETUP softkey . MEMOR Y SETUP P ANEL appears as shown in examples i n Figure 5-12 t o Figure 5-14 , and softkey s shown af ter Figure 5-1 4 appear .
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 7 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Figur e 5-13 Memory Setup Panel for th e E5255A in Normal Config.
5- 38 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Y ou can define labels to use f or the input ports o f each row in the MEMOR Y SETUP P ANEL. Refer to “Defi ning Labels f or the E5250A I nput Ports” on p age 5-31.
Agilent E5250A Us er ’s Guide, Edition 8 5- 3 9 Control ling the E5250A Usin g Virtual F ront Pane l Util ity T o ente r a comment f or the set up memory Select the C OMMENT softkey . The follo wing message is displayed: Input co mmen t for th is setup m emor y.
5- 40 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Softke y Menu 1 : NOTE Moving t he Cursor Move the cursor b y using the UP , DOWN, RIGHT , LEFT softkeys . Do not use arrow k eys on the 41 55/4156 front panel .
Agilent E5250A Us er ’s Guide, Edition 8 5- 4 1 Control ling the E5250A Usin g Virtual F ront Pane l Util ity Softke y Menu 2 : For the following conditions, the following softkeys are displayed by selecting the MORE softkey on Softkey Menu 1. Cursor points to row of normal input port or to row of input Bias P ort with Bias Mode OFF .
5- 42 Agilent E5250 A User ’s Guide, Edit ion 8 Controll ing the E5250 A Using Virtual Fr ont P anel Ut ility Saving/Loading the Se tup Data Select the SA VE/LOAD softkey . The following softkeys are displaye d: T o save setu p data to diskette Select the SA V E FILE softkey .
6 Pr ogramming the E5250A.
6- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Progra mming the E5 250A Stan dard Command s for Program mable Instruments (S CPI) is a un iversal programming language f or electronic te st and measu rement instrumen ts, and based on IEEE 48 8.1 and IEEE48 8.
Agilent E5250A Us er ’s Guide, Edition 8 6- 3 Programmi ng the E5250A SCPI Prog rammi ng Basics SCPI Pr ogramming Basics This section descr ibes the structur e of SCPI commands, an d the basics of u.
6- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Progra mming the E5 250A SCPI Progr amming B asics SCPI Command Hierarchy The SCPI commands use a hierarchical structure for s ubsystem comman ds similar to a file system.
Agilent E5250A Us er ’s Guide, Edition 8 6- 5 Programmi ng the E5250A SCPI Prog rammi ng Basics Controlling E5250A by Us ing HP BASIC 1. Assign I/O path for control ling the E52 50A by usi ng the ASSI GN command. In the following example, the select code of the external comp uter is 7 and GPIB address of the E5250A i s 22.
6- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Progra mming the E5 250A Creating a Co ntrol Pr ogram Cr eating a Contr ol Pr ogram This secti on explains ho w to create a control pr ogram for the E 5250A.
Agilent E5250A Us er ’s Guide, Edition 8 6- 7 Programmi ng the E5250A Creating a Control Pr ogram T able 6-1 Programming Summary For details about these parameters, refer to Chapter 5 and Chapter 7. CAUTION Bias Por t and Couple P ort cannot be s et for the s ame input port nu mber .
6- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Progra mming the E5 250A Creating a Co ntrol Pr ogram Defining Channel Configur ation Mode Following commands are used to set the Channel Con figuration mode. For details, refer to “Channel List and Channel Configuratio n” on page 5- 6.
Agilent E5250A Us er ’s Guide, Edition 8 6- 9 Programmi ng the E5250A Creating a Control Pr ogram Defining Conne ction Sequenc e Following commands are used to spec if y the Connection Seq uence. For details, refer to “Con nection Sequence” on page 5-10.
6- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Creating a Co ntrol Pr ogram Using Bias Mode If you u se the Bias Mode, followin g comman ds are available. For details, refer to “Bias Mod e” on page 5-11. • Selects in put port to be input Bia s Port on speci fied card (fo r E5252A only ).
Agilent E5250A Us er ’s Guide, Edition 8 6- 1 1 Programmi ng the E5250A Creating a Control Pr ogram Using Coupl e Port (for E5252A onl y) If you us e Couple P ort, the followi ng comm ands are available. For details, refer to “Coupl e Port” on pag e 5-13.
6- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Creating a Co ntrol Pr ogram Controlling Relay Sw itchin g Following commands are used to contro l relay switching . For details of channel_list , see “C hannel List an d Channel Co nfiguration” on page 5-6 .
Agilent E5250A Us er ’s Guide, Edition 8 6- 1 3 Programmi ng the E5250A Program ming E xamples Pr ogramming Examples This section prov ides examples of control p rograms for the E 5250A. The programs are written in the HP BASIC language, and can be executed without any modifications.
6- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Progra mming Example s Channel Cr eation Example The following exa mple is a typical control pro gram for the E5250 A with the E5252A , which conn ects instru ment output to DUT as shown in Figure 6-1.
Agilent E5250A Us er ’s Guide, Edition 8 6- 1 5 Programmi ng the E5250A Program ming E xamples Program List: 10 ! Exampl e: Creat ing Co nnec tion Cha nnel s 20 ! 30 INTE GER Comple te 40 DIM Chan n.
6- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Progra mming Example s Bias Mode Example The following exa mple shows how to use Bi as Mode for the E5255A. Figur e 6-2 Examp le of Bias Mo de Required Conditions: This program assumes the follo wing conditions.
Agilent E5250A Us er ’s Guide, Edition 8 6- 1 7 Programmi ng the E5250A Program ming E xamples Program List: 10 ! Example: Using B ias Mode 20 ! 30 INTEGER Complete 40 DIM Channel$[100] 50 Channel$="(@10101:10108)" 60 ! 70 ! Put Instrument Initialization Ro utine here.
6- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Progra mming Example s 160 ! 170 ! Put Bias Source Control Routine here. 180 ! 190 OUTPUT @Hp5250;":ROUT:CLOS "&.
Agilent E5250A Us er ’s Guide, Edition 8 6- 1 9 Programmi ng the E5250A Program ming E xamples Couple Port Example The following exa mple shows how to use the Co uple Port. This function is available only for the E5252A. Figur e 6-3 Example of C ouple Po rt Required Conditions: This program assumes the follo wing conditions.
6- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Progra mming Example s Program List: 10 ! Example: Using C ouple Port 20 ! 30 INTEGER Complete 40 DIM Channel$[100] 50 ! (Sub.
Agilent E5250A Us er ’s Guide, Edition 8 6- 2 1 Programmi ng the E5250A Program ming E xamples 150 OUTPUT @Hp5250;":ROUT:COUP:PORT AL L,'3,5'" 160 OUTPUT @Hp5250;":ROUT:COUP.
6- 22 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Using the VFP D ata Upload Librar y This secti on introduces and explains how to use th e.
Agilent E5250A Us er ’s Guide, Edition 8 6- 2 3 Programmi ng the E5250A Using t he VFP D ata Upload L ibrary VFP Data U pload Libra ry VFP Data Upload Library is an subprogram library used for loading data (that was made and saved by the V i rtual Front Panel utility) to your program.
6- 24 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Connect_vfp subpr ogram Makes relay con nections base d on data from the specified S etup Memory . Data from all 24 S etup Memories w as loaded by t he Load_vf p_data subp rogram.
Agilent E5250A Us er ’s Guide, Edition 8 6- 2 5 Programmi ng the E5250A Using t he VFP D ata Upload L ibrary Programming Example The following pr ogram is an example f o r using the VFP Data Upload Library .
6- 26 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the VFP Data Upl oad Libr ary Befor e Executing Y our Pr ogram Before execu ting a program that uses subprograms from the VFP Data Upload Library , do the follo wing: 1. L ink t he l ibra ry to you r pr ogr am: Link the library as shown in the following example.
Agilent E5250A Us er ’s Guide, Edition 8 6- 2 7 Programmi ng the E5250A Using t he VFP D ata Upload L ibrary Err or Messages If any error related to the VFP Data Upload Library occurs in your program, one of following error messages is displayed, and the program is paused .
6- 28 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Usi ng th e Capa cita nce Co mpensa tion Rout ine This section introd uces and explains h ow to use the Capacitance Compensation Routine.
Agilent E5250A Us er ’s Guide, Edition 8 6- 2 9 Programmi ng the E5250A Using th e Capacitance Compensat ion Rou tine Capacitance Compen sation Routine This rout ine is an su bprogram us ed to compens ate for cap acitance measurement error caus ed by the E52 50A with the E5252 A matrix card installed.
6- 30 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Requir ed Conditions This subprogram requires the following conditions: • Setting of the 4284A: Option Required: 4284A-006 Fr equency: 1 kHz to 1 MH z.
Agilent E5250A Us er ’s Guide, Edition 8 6- 3 1 Programmi ng the E5250A Using th e Capacitance Compensat ion Rou tine 1. Measure R, L, C o f your cable using the 4 284A. Measurement setup is as follows: 2. Overwrite the R , L, C data i n the program lin es listed belo w .
6- 32 Agilent E5250 A User ’s Guide, Edit ion 8 Progra mming the E5 250A Using the Capacitance Comp ensation Routine Programming Example The following pr ogram is an example f or using the capacitance compensation subpr ogra m: 100 ! Examp le of Capacitanc e Comp ensati on 110 ! 120 Fre q=1.
7 Command Refer ence.
7- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Command Re ference Thi s ch apte r desc rib es th e fo llow ing f or Agil ent E525 0A: • SCPI commands available to control the E5250 A via GPIB interface. SCPI is a universal progr amming language for electronic test and measurement instrume nts, and is ba sed on IEEE 488 .
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 Command Referenc e T extual Notation for Subsystem Com mands CAPIT AL LETTE RS Capital letters are the minimally required letters of the command head er . Lowercase letters are the long for m (complete s pelling), whic h you can omi t if desired .
7- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Command Re ference Common Com mands for E5250A Common Commands This secti on describes common comman ds and queries, w hich are comman ds defined by IEEE 4 88.2 . The following table s hows some common co mmands that are suppor t ed for the E5250A .
Agilent E5250A Us er ’s Guide, Edition 8 7- 5 Command Referenc e *CLS *CLS This command clears the Status Byte R egister , the Standard Event S tatus Register , and the Error Queue. This command does not clear the enable registers. Refer to “Stat us Report ing Str ucture” on page 7-48.
7- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Command Re ference *ESE The following table shows the bits of th e Stand ard Event St atus Register and bina ry-w ei ghte d decimal value of each bit.
Agilent E5250A Us er ’s Guide, Edition 8 7- 7 Command Referenc e *ESR ? *ESR? This query comm and returns the pres ent contents of the S tandard Event Status Regis ter .
7- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Command Re ference *IDN? *IDN? This query command ret urns the ID of your E5250A. Syntax *IDN? Quer y re sponse HEWLETT -P ACKARD, model ,0, r evisio.
Agilent E5250A Us er ’s Guide, Edition 8 7- 9 Command Referenc e *OPC *OPC This command starts to monitor pending operations, and sets/clears the Operation Complete (OPC) b it in the Standard Event St atus Register as follows: • If there is no pending operation, sets the OPC bit to 1.
7- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference *RST *RST This command performs an i nstrument res et. Stat us after *RS T is shown below: Chan nel Co nfig uratio n: Normal Config.
Agilent E5250A Us er ’s Guide, Edition 8 7- 1 1 Command Referenc e *SRE *SRE This command sets the Service Request "Enable" Register b its. 1 enables, 0 masks. Syntax *SRE enable_numbe r Quer y re sponse enable_number <newline><^END> Semantics The Service Request "Enable" Register consists of 8 bits: B it0 to Bit7.
7- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference *SRE Example The following four lines enable the same bits (bit 4 and 5): OUTPUT @Hp5250;"*SRE 48" using d ecima l nume r.
Agilent E5250A Us er ’s Guide, Edition 8 7- 1 3 Command Referenc e *STB? *STB? This query comm and reads the S t atus Byte Register (reads Master Summary Status bit, not Reque st for Service Message). For bit6, this command reads MSS, not Request for Service (RQS).
7- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference *TST? *TST? This query command executes an in ternal self-test, then returns th e result. After this command execu tion, the E5250A b ecomes same status as after *RST comma nd execution.
Agilent E5250A Us er ’s Guide, Edition 8 7- 1 5 Command Referenc e :DIAGnosti c Command Tr ee :DIAGnostic Subsystem The :DIAGnostic sub system has commands for execu ting the self-test function. For more info, see C hapter 3. NOTE The :DIAG nostic subs ystem commands ignore th e E5250A chann el configurati on mode.
7- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :DIAGnosti c:TEST :CA RD:CLEar :DIAGnostic:TEST :CARD:CLEar This command clears the relay test result (pass/f ail result) of the s pecified card.
Agilent E5250A Us er ’s Guide, Edition 8 7- 1 7 Command Referenc e :DIAGnostic :TEST :CARD:ST A T e ? :DIAGnostic:TEST :CARD:ST A T e? This command retur ns the most recent relay test r esult for the specified card.
7- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :DIAGnosti c:TEST :FRAMe[:EXECu te]? :DIAGnostic:TEST :FRAMe[:EXECute]? This command execu tes the specified E5250A test, then returns the test result. For more info, see C hapter 3.
Agilent E5250A Us er ’s Guide, Edition 8 7- 1 9 Command Referenc e :DIAGno stic:TEST :FRAMe:S T A T e ? :DIAG nos tic :TES T :FRA Me: ST A T e? This command returns the most recent test result (pass/fa il) of the specified E5250A test.
7- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :ROUT e Command Tree :ROUT e Su bsystem The :ROUT e subsys tem has command s for contro lling the signal rou ting. " Open a channel ": op ens relays to disconnect the channel (th at is, disco nnects input port from outp ut po rt).
Agilent E5250A Us er ’s Guide, Edition 8 7- 2 1 Command Referenc e :ROUT e Command T ree Parameter values: card_number : Auto Config Mode: 0 Normal Co nfig Mode: 1 | 2 | 3 | 4 channel_list : Refer to Ch apter 5.
7- 22 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:BIAS:C HANnel: DISable:CA RD [:ROUT e]:BIAS:CHANnel:DISable:CARD This command bias disabl es all output ports of the specified card. When Bias Mode is ON, this command open s relays to d isconnect the in put Bias Port from all output ports.
Agilent E5250A Us er ’s Guide, Edition 8 7- 2 3 Command Referenc e [:ROUT e]:BIAS :CHANnel:DISabl e[:LIST] ? [:ROUT e]:BIAS:CHANnel:DISable[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list .
7- 24 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:BIAS:C HANnel: ENABle:C ARD [:ROUT e]:BIAS:CHANnel:ENABle:CARD This command bias enables all output ports of the specified card.
Agilent E5250A Us er ’s Guide, Edition 8 7- 2 5 Command Referenc e [:ROUT e]:BIAS:CHA Nnel:ENAB le[:LIST] [:ROUT e]:BIAS:CHANnel:ENABle[:LIST] This command bias enables the output ports sp ecified by channel_list . When Bias Mode is ON, this command closes relays to connect the input Bias Port to the output p orts specified by chann el_list .
7- 26 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:BIAS:C HANnel: ENABle[: LIST]? [:ROUT e]:BIAS:CHANnel:ENABle[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list .
Agilent E5250A Us er ’s Guide, Edition 8 7- 2 7 Command Referenc e [:ROUT e ]:BIAS:P ORT [:ROUT e]:BIAS:POR T NOTE This command app lies only to the E52 52A card. For the E5255 A card, the input Bias Port can not be selected, and is always the built-in Bi as Port.
7- 28 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:BIAS:PO RT? [:ROUT e]:BIAS:POR T? NOTE This command app lies only to th e E5252A card. For the E5255 A card, the input Bias Port can not be selected, and is always the built-in Bi as Port.
Agilent E5250A Us er ’s Guide, Edition 8 7- 2 9 Command Referenc e [:ROUT e ]:BIAS[:S T A T e ] [:ROUT e]:BIAS[:ST A T e] This command con trols the Bias Mode fo r the specified card.
7- 30 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:BIAS[:ST A T e]? [:ROUT e]:BIAS[:ST A T e]? This query comm and returns the Bias Mod e of the specified car d.
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 1 Command Referenc e [:ROUT e]:CLOSe[:LIS T] [:ROUT e]:CLOSe[:LIST] This command con nects the input ports to the o utput ports as specified in channel_list . For so me modes (such as Single Route M ode, Couple Por t Mode, and Bi as Mode), more comple x connections may occur .
7- 32 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:CONNectio n:RULE [:ROUT e]:CONNection:RULE This command sets the connection ru le (Free or Single Route) for the specified card. For details, refer to "Connection Rule" in Chapter 5.
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 3 Command Referenc e [:ROUT e]:CONNec tion:SEQ uence [:ROUT e]:CONNection:SEQuence This command s pecifies the connection se quen ce mo de, whi ch i s the ope n/cl ose sequence of the relays when connectio n route is chang ed from an existing connection to a n ew connection.
7- 34 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:CONNec tion:SEQue nce? [:ROUT e]:CONNection:SEQuence ? This query comm and returns the conn ection sequence mode o f the specified card. For details, refer to "Connection Sequence" in Chapter 5.
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 5 Command Referenc e [:ROUT e]:COUPl e:PORT [:ROUT e]:COUPle:POR T NOTE This command app lies only to the E52 52A card. The Couple Port function is not available fo r the E5255A card. The Bias P ort and Coup le Port cann ot be set to same por t number .
7- 36 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:COUPl e:PORT? [:ROUT e]:COUPle:POR T? NOTE This command app lies only to th e E5252A card. This query comm and returns the lower input port nu mber of each coupled pair . For details, refer to "Couple Ports" in Chapte r 5.
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 7 Command Referenc e [:ROUT e]:COUPle[:ST A T e] [:ROUT e]:COUPle[:ST A T e] NOTE This command app lies only to the E52 52A card. The Couple Port function is not available fo r the E5255A card. This command controls the Couple Port Mo de for the s pecified card.
7- 38 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:COUPle[:S T A T e]? [:ROUT e]:COUPle[:ST A T e]? NOTE This command app lies only to th e E5252A card. The Couple Port function is not available fo r the E5255A card. This query comm and returns the Couple Po rt Mode of the specified card.
Agilent E5250A Us er ’s Guide, Edition 8 7- 3 9 Command Referenc e [:ROUT e]:FUNCtion [:ROUT e]:FUNCtion This command sets the chann el configur ation, which det ermines how you specif y the channel_lis t or car d_number in o ther commands. Fo r details, refer to "Chan nel List and Channel Conf iguration" i n Chapter 5.
7- 40 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference [:ROUT e]:O PEN:CARD [:ROUT e]:OPEN:CARD This command disconnect s all input p orts from all output ports for the specif ied card. Then, if Bias Mode is ON, connects the in put Bias Port to all bias enab led outp ut por ts.
Agilent E5250A Us er ’s Guide, Edition 8 7- 4 1 Command Referenc e [:ROUT e]:OPEN[:LIST]? [:ROUT e]:OPEN[:LIST]? This query comm and returns 0 or 1 for each channel specified by chan nel_list , in same order as specified by channel_list . 0 : channel is closed ( connected), 1 : channel is opene d (not connected).
7- 42 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :SYST em Comma nd T ree :SYST em Subsystem The :SYST em subsystem is a collection of functions th at are not related to instrum ent performance.
Agilent E5250A Us er ’s Guide, Edition 8 7- 4 3 Command Referenc e :SYST em:CC ONfig? :S YST em: CCONf ig? This query command return s the card conf iguration i nformation. Th is command has quer y fo rm only . Syntax :SYSTem:CCONfig? card_n umber Quer y re sponse card_configuration <newline><^END> For the E5252A: n o response.
7- 44 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :SYST em:CDESc riptio n? :SYST em:CDEScription? This query comm and returns a des cription of the specified car d.
Agilent E5250A Us er ’s Guide, Edition 8 7- 4 5 Command Referenc e :SYST e m:CPON :SYST em:CPON This command res ets the specified card to the po wer-on state.
7- 46 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference :SYST e m:CTYPe ? :SYST em:CTYPe? This query comm and returns the ID of the specified card.
Agilent E5250A Us er ’s Guide, Edition 8 7- 4 7 Command Referenc e :SYS T em:E RRor? :SYST em:ERRor? This command read s the error from th e head of the error q ueue and remov es that error from the queue.
7- 48 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference S tatus Rep orting Structure S tatus Report ing S truct ure This section descr ibes the status repo rting structure u sed in the E5250A.
Agilent E5250A Us er ’s Guide, Edition 8 7- 4 9 Command Referenc e S tatus Rep ortin g S truct ure Figur e 7-1 S tatus Reporting S tructure of E5250A The above figure shows Service Request Generation.
7- 50 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference S tatus By te Regis ter S tatus B yte Register The E5250A S tatus Byte Register contains bits (ESB and MA V) for status summary messages fro m other registers. Th e status of these bits dep ends on the cond ition of the Stand ard Event Status Register and th e Output Qu eue.
Agilent E5250A Us er ’s Guide, Edition 8 7- 5 1 Command Referenc e S tatus Byte Register In ge nera l, us e ser ial p olli ng (n ot *S TB ?) inside interrupt service ro utines. Use *STB? in other cases (not in interrupt serv ice rout ine) when you want to kn ow the value of S tatus Byte.
7- 52 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference Service Request E nable R egister Service Request Enable Regis ter The Service Request Enable Register is an 8-bit register that can be used by the programmer to select which summary m essages in the S tatus Byte Register may cause serv ice requests.
Agilent E5250A Us er ’s Guide, Edition 8 7- 5 3 Command Referenc e S tandard Event S tatus Reg ister S tandard E vent S tatus Regi ster The St andard Event St atus Register has specific events assigned to specific bits. Refe r to F igur e 7-4 and T a ble 7 -2.
7- 54 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference S tandard Event S tatus E nable R egister T able 7 -2 S tandard Even t S tatus Regis ter of E525 0A S tandard E vent S tatus En abl.
Agilent E5250A Us er ’s Guide, Edition 8 7- 5 5 Command Referenc e Output Q ueue Output Qu eue The Output Queue stores response messages until they are read. If an unread message exists, Bit4 (Messag e A vailable − MA V) of the St atus Byte Regist er is set to 1.
7- 56 Agilent E5250 A User ’s Guide, Edit ion 8 Command Re ference Output Q ueue.
8 VXI plug&play Driver.
8- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 VXI plug &play Driver This chapter introdu ces the VXI plug&play dr iver available for Agilent E5 250A, and consists of the following section.
Agilent E5250A Us er ’s Guide, Edition 8 8- 3 VXI plug& play Driv er System Requirem ents System Requirements The following sys tem environments are req uired. •O p e r a t i n g S y s t e m Microsoft W i ndows XP Professional , W indows 2000, W indows NT 4.
8- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 VXI plug &play Driver Installing VX Iplug& play Driver Installing VXI plug&play Driver The installation flow is shown below . If you have already installed the GPIB interface card, VISA I/O librar y , and programm ing software on you r PC, skip steps 1 thro ugh 4.
Agilent E5250A Us er ’s Guide, Edition 8 8- 5 VXI plug& play Driv er Driver Func tions Driver Functions T able 8-1 lists all the functions for the E5250A. Y ou will see a brief descriptio n of the functions in the table. For the descrip tion, syntax and par ameters of the fun ction, refer to the r eference section following this tab le.
8- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 VXI plug &play Driver Driver Fun ctions Route Control hpe5250a_closeList Closes the chan nel list. hpe5250a_op enList Opens the channel l ist. hpe5250a_op enCard Op ens all outp ut on the card. hpe5250a_closeList_ Q Queries for the channel lis t status.
Agilent E5250A Us er ’s Guide, Edition 8 8- 7 VXI plug& play Driv er Driver Func tions hpe5250a_bia sChanCard This func tion will enable or disable bias on all the output ports of the specified card.
8- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 VXI plug &play Driver Driver Fun ctions hpe5250a_bia sChanList_Q This function will query the instrument for the bias status for the channels given in the list. The parameter ’b iaschan_list’ is an array of integers with each integer rep resenting one channel.
Agilent E5250A Us er ’s Guide, Edition 8 8- 9 VXI plug& play Driv er Driver Func tions hpe5250a_bia sPort This function will select which input port is the bias port o n the specified card. For each card, yo u can specify the same or diff erent Bias Port.
8- 10 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_clo se This function terminates the softwa re conn ection to the in strument and deallocates system res ources. It is generally a g ood programmi ng habit to close the instrumen t handle wh en the program i s done usi ng the inst rument.
Agilent E5250A Us er ’s Guide, Edition 8 8- 1 1 VXI plug& play Driv er Driver Func tions hpe5250a_clo seList This function will conn ect the input ports to the o utput ports specified by t he channel list. The parameter ’closechan_ list’ is an array of integers with each integer representing one channel.
8- 12 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_clo seList_Q This function will query the instrument for the channels closed given in the ’closechan_list’. The parameter ’closechan_ list’ is an array of integers with each integer representing one channel.
Agilent E5250A Us er ’s Guide, Edition 8 8- 1 3 VXI plug& play Driv er Driver Func tions hpe5250a_cmdData_ Q This function passes the cmd_str string to the instrumen t. This entry point will wait for a response which may be any data. Y ou specify the cmd_str and size parameters , and get r esult[ ].
8- 14 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_cmdInt16A rr_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response t hat is a def i nite arbit rary block of 16 bit integers.
Agilent E5250A Us er ’s Guide, Edition 8 8- 1 5 VXI plug& play Driv er Driver Func tions hpe5250a_cmdInt32A rr_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response t hat is a def inite arbitrar y block of 32 bi t integers .
8- 16 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_cmdReal This funct ion passes the cmd_str st ring to the in strument. Thi s entry poin t passes the string in cmd_ str followed by a space and th en the real in value.
Agilent E5250A Us er ’s Guide, Edition 8 8- 1 7 VXI plug& play Driv er Driver Func tions hpe5250a_cmdReal6 4_Q This funct ion passes the cmd_str st ring to the instr ument. This command ex pects a response that can be r eturned as a 64 bit real.
8- 18 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_compenC This funct ion compensa tes capacitance/con ductance dat a measured by us ing Agi- lent 4284A C meter , and returns compensa tion results.
Agilent E5250A Us er ’s Guide, Edition 8 8- 1 9 VXI plug& play Driv er Driver Func tions hpe5250a_connRuleSeq The function s ets connection rule and co nnection sequence for the specified card.
8- 20 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_couplePo rt This function sets the couple ports which ar e u sed for m aki ng kel vin conn ect ions on the specified card . The specified input port numbe r wil l be co upl ed w ith t he ne xt input port and two output por ts.
Agilent E5250A Us er ’s Guide, Edition 8 8- 2 1 VXI plug& play Driv er Driver Func tions hpe5250a_coupleS tate This function controls the couple port mode for the specified card.
8- 22 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_error_message This function translates the error return value fr om an instrument driver function to a readable string .
Agilent E5250A Us er ’s Guide, Edition 8 8- 2 3 VXI plug& play Driv er Driver Func tions hpe5250a_errorQueryDetect This funct ion enables o r disables autom atic instrument error checking. If automatic error checking is enabled then the driver will query the instrument for an error at the end of each function call.
8- 24 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_esr_Q This function returns the contents of the ESR register .
Agilent E5250A Us er ’s Guide, Edition 8 8- 2 5 VXI plug& play Driv er Driver Func tions hpe5250a_ini t This function initializes the software connection to the instrument and optionally verifies that instrumen t is in the system. In add ition, it may perform any necessary actions to place the instrument in its reset state.
8- 26 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_openCard This function will disconnect all input ports from all output ports for the sp ecified card. Then if bias mode is ON, connects the input bias port to all bias enabled output ports.
Agilent E5250A Us er ’s Guide, Edition 8 8- 2 7 VXI plug& play Driv er Driver Func tions hpe5250a_openL ist_Q This function will query the instrument for the channels open given in the ’openchan_ l ist’. The parameter ’open chan_list’ is an array of integer s with each integer representing one channel.
8- 28 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_reset This function p laces the instrument in a default state. Before is suing this function, it may be n ecessary to send a device clear to ensure that the instrum ent can execute a reset.
Agilent E5250A Us er ’s Guide, Edition 8 8- 2 9 VXI plug& play Driv er Driver Func tions hpe5250a_sel ectCompenFile This function specifies capacitance/conducta nce compensa tion data file used to compensat e C/G by usi ng hpe5250a_ compenC.
8- 30 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions hpe5250a_sel f_test This function causes the instrument to perform a self-test and returns the result of that self-test. This is used to verify that an instrument is operating properly .
Agilent E5250A Us er ’s Guide, Edition 8 8- 3 1 VXI plug& play Driv er Driver Func tions hpe5250a_testE xec_Q This function executes the controller test, the front panel tes t, or the relay test for the specified card. Y ou mus t attach the relay te st adapter b efore executing the relay test.
8- 32 Agilent E5250 A User ’s Guide, Edit ion 8 VXI plug &play Driver Driver Fun ctions.
9 Executing Sample Pr ograms.
9- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Executin g Sampl e Pro grams This chapt er explains ho w to use the following sam ple programs: • “Vth and Capacitance Measur ement Program” • “HCI Measurement Pr ogram” The sampl e programs are saved in t he E5250A Prog ram Disk (LIF for matted, 3.
Agilent E5250A Us er ’s Guide, Edition 8 9- 3 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Vth and Capacitance Measurement Program This secti on introduces and explains how to use and m odify the Vt h and Capacitance measurement p rogram.
9- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T able 9-2 Vth and Capacitance Measurement Flow S tep D escription 1 Initializes the Instruments: 1. Resets the 4155/ 4156. 2. Resets the 428 4A.
Agilent E5250A Us er ’s Guide, Edition 8 9- 5 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Vth M easur ement Setup Measurement s etup of the E5250A and 41 55/4156 fo r this program is as follows: • E5250 A/E5252A S etup: • 4155 /4156 Set up: Below is summary of measurement setup s aved in E5252.
9- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Display Setup: Also the DA T A V AR IA VLES fields set VTH and BET A.
Agilent E5250A Us er ’s Guide, Edition 8 9- 7 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Setting up the Measur ement Environment Before execu ting the program, you need to set up the measur ement environment. T able 9-3 li sts the required equipment.
9- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Figure 9-1 Vth and C Measu rement Setup and DUT Con nection T able 9-4 Instrument and DU T Connectio n Instrum ent E 5250A DUT T erminal (via Connector Plate) Model No.
Agilent E5250A Us er ’s Guide, Edition 8 9- 9 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Executin g the Pr ogram Before execu ting the program, do the follo wing: 1. Set the GPIB address for each instrument as follows: • 4155 /4156: 71 7 • 4284A: 7 24 • E5250 A: 722 2.
9- 10 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program Execute the program as follows: 1. LOAD the Vth and C measurement program as following example. LOAD "P _MAT" 2. Link the Capacitance Compensatio n Routine by using the LOADSUB ALL statement as in following example.
Agilent E5250A Us er ’s Guide, Edition 8 9- 1 1 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m Modifying the Program This secti on explains how to modi fy the sample program: .
9- 12 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T o output the measurement r eport to printer Y ou can EDIT to change the following parameters in the Init_setti ng subprogram. Printer must be con nected to computer by u sing GPIB cable.
Agilent E5250A Us er ’s Guide, Edition 8 9- 1 3 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m T o change the Vth m easurement setup Y ou can EDIT the program to ch ange the following parameters in th e "Constant Defi niti on" b lock of th e Meas_vth subprogr am.
9- 14 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program T o change the capacit ance measurement setup Y ou can EDIT the program to ch ange the following parameters in th e "Constant Defi niti on" b lock of th e Meas_c subprogr am.
Agilent E5250A Us er ’s Guide, Edition 8 9- 1 5 Executi ng Sample Pro grams Vth and Capacitance Meas urement Progra m T o use the VFP data upload library If you w ant to use yo ur VFP data in the progr am, change the pr ogram as follow s. Before execu ting the program, you need to create the VFP data and save it to a file on diskett e.
9- 16 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams Vth and Ca pacitance Measu reme nt Program 2. Remove the ex clamation marks from pr ogram lines shown in the following table, and enter the lines.
Agilent E5250A Us er ’s Guide, Edition 8 9- 1 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram HCI M easurement P rogram This section explain s how to use and mo dify the HCI measur ement sample pro gram.
9- 18 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T able 9-5 HCI De grad atio n Me asuremen t Flow S tep 2. Determ ines S tress Condition This step determines the gate stress voltage ( Vgstr ) from the Ib -Vgs measurement test result.
Agilent E5250A Us er ’s Guide, Edition 8 9- 1 9 Executi ng Sample Pro grams HCI Measur ement Pr ogram S tep 3. Selects devices valid for the HCI test This step judges whether each device is va lid ac cording to the cur rent leak test result. The IGLEAK.
9- 20 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Use r Func tio n Set up: Display Setup: Also the DA T A V AR IA VLES fields set Vtext and Idlin.
Agilent E5250A Us er ’s Guide, Edition 8 9- 2 1 Executi ng Sample Pro grams HCI Measur ement Pr ogram S tep 5. Applies stress an d characterizes the parameter s This step p erforms the following: 1. Ap plies th e stress, Vdstr and Vgstr , t o the va li d devic es .
9- 22 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram The measurement data is saved to the di skette in disk dr ive connected to the computer with the foll owing file names .
Agilent E5250A Us er ’s Guide, Edition 8 9- 2 3 Executi ng Sample Pro grams HCI Measur ement Pr ogram Adding the Bias Sour ce Contro l Routine This sample prog ram requires bi as sources to apply stres s to DUT . So, you must modify t he following bias sou rce control su bprograms to match y our bias sou rces or create new subp rograms.
9- 24 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Setting up the Measur ement Environment Before execu ting the program, you need to set up the meas urement environment as follows: 1. Prepare the equipment shown in T able 9- 6, which lists the required equipment to execute the prog ram.
Agilent E5250A Us er ’s Guide, Edition 8 9- 2 5 Executi ng Sample Pro grams HCI Measur ement Pr ogram Figu re 9-3 Inter nal Co nne ctions and D IP SW Settin gs fo r E525 5As T able 9-7 E5250A In put.
9- 26 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram Figure 9-4 DC HCI Degrad ation T e st Equip ment Connectio ns NOTE Device used to Determine S tress Conditions HCI test program (SP_MUX _M) uses Dev ice1 above to det ermine stre ss voltages ( Vdstr and Vgstr ).
Agilent E5250A Us er ’s Guide, Edition 8 9- 2 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram Executin g the Pr ogram Y ou should have alread y added the bi as source contr o l routi ne and set up the measurement en vironment as desc ribe d pre vio usly .
9- 28 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram !-- Drai n stre ss vol tage sho uld be d eter mined by I d-Vd c hara ct eristi cs Vdstr= 5 ! Drain st ress v oltage After defining the value, re-store the program.
Agilent E5250A Us er ’s Guide, Edition 8 9- 2 9 Executi ng Sample Pro grams HCI Measur ement Pr ogram T o Execute HCI T est Program 1. Load the HCI test program (SP_MUX in this ex ample), and press RUN f unction key . Then the following message is displayed on the computer screen.
9- 30 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram After each interim character ization, the fr actional chang e in a parameter vers us the stres s time is d isplayed o n GRAPHIC S page of the 4155/4156 a s shown i n Figur e 9-8.
Agilent E5250A Us er ’s Guide, Edition 8 9- 3 1 Executi ng Sample Pro grams HCI Measur ement Pr ogram Figure 9- 7 Initial/Interim Characterization Example Figu re 9-8 HCI De grad atio n T est R esul.
9- 32 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o Execute Analysis Pr ogram Before running the program, do the following: 1. Insert the E5 250A Program Disk into th e computer's disk drive.
Agilent E5250A Us er ’s Guide, Edition 8 9- 3 3 Executi ng Sample Pro grams HCI Measur ement Pr ogram 3. Select softkey for parameter for which you want to extract Tdc . Analysis result and Tdc will be disp layed on the 4155/4156 screen as shown in Figure 9- 9.
9- 34 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram NOTE If you don' t want progr am to pause, change the param eter in SP_MUX_A prog ram to Pause_to_save=0 before you r un the SP_MUX_A program .
Agilent E5250A Us er ’s Guide, Edition 8 9- 3 5 Executi ng Sample Pro grams HCI Measur ement Pr ogram Modifying the Program This secti on explains how to modify the SP_MUX_M samp le program and P A RAM.
9- 36 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o change the 4155/4156 setup file used T o change the 4155/4156's setup file used for the HCI test program, modify the setting of the setup file and save it as a new setup file.
Agilent E5250A Us er ’s Guide, Edition 8 9- 3 7 Executi ng Sample Pro grams HCI Measur ement Pr ogram T o change Idlin and Gmmax extraction conditio n T o change Gate voltage and Su bstrate voltage required for Idlin and Gmm ax extraction, do follows.
9- 38 Agilent E5250 A User ’s Guide, Edit ion 8 Executin g Sampl e Pro grams HCI Measur ement Pr ogram T o change the test limits Each test device is judged to be valid or not by measuring the gate and drain leakage currents. Change the following parameters in "Limits for leakage tests" block.
10 Specifications.
10- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 Specifi catio ns This chapter lists specifications, typical data and supplemental data for the Agilent E5250A Low Leak age Switch Mainframe with the Agilent E5252 A 10 × 12 Matrix Switch and the Agilent E525 5A 24 (8 × 3) Channel Multiplexer .
Agilent E5250A Us er ’s Guide, Edition 8 10- 3 Specif icati ons General Specif icati ons General Specifications T emp erature Range: Operating: 5 ° C to 40 ° C Sto rage: − 40 ° C to 70 ° C Hum.
10- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 Specifi catio ns Agilent E5252A 10x1 2 Matrix Switch Agilent E525 2A 10x12 Mat rix Switch Switch Speci fications These are specifications when the E5252A is installed in mainfr ame.
Agilent E5250A Us er ’s Guide, Edition 8 10- 5 Specif icati ons Agilent E 5252A 10x12 Mat rix Switc h Ty p i c a l D a t a Offset Curr ent < 0.1 pA *1 (Low Leakage I- V Port) < 1000 pA *1 (General I-V Port) Channe l Cros stalk Capaci tance < 0.
10- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 Specifi catio ns Agilent E5255A 24 (8x 3) Channel Multipl exer Agilent E525 5A 24 (8 x3) Channel Multiple xer Switch Speci fications These are specifications when the E5255A is installed in mainfr ame.
Agilent E5250A Us er ’s Guide, Edition 8 10- 7 Specif icati ons Agilent E5255 A 24 ( 8x3) Cha nnel M ultipl exer Channe l Cros stalk Capaci tance: < 0.
10- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 Specifi catio ns Access ories Accessories The following specifications ar e app lied for the accessories listed b elow .
Agilent E5250A Us er ’s Guide, Edition 8 10- 9 Specif icati ons Supplem ental Data when used with Agilent 4 155/415 6 Supplemental Data when used with Agilent 4155/415 6 The below d ata shows degradation of A gilent 41 55/4156 when used wi th Low Leakage I-V Port.
10- 10 Agilent E5250 A User ’s Guide, Ed ition 8 Specifi catio ns Suppleme ntal Data when used with Agil ent 41 55/4156.
1 1 Err or Messages.
1 1- 2 Agilent E5250 A User ’s Guide, Edit ion 8 Error Messa ges This chapter lists an d describes th e error messages for Agilent E5250A. An er ror message cons ists of an error n umber and message.
Agilent E5250A Us er ’s Guide, Edition 8 1 1- 3 Error Mess a ges S tandard SCPI Error Messa ges S tandard SCPI Erro r Messages Stan dard SCPI error mess ages have negative erro r numbers. The f ollowing are the standard SCPI error messages for the E5250A: Command Error If synt ax of SCP I command i s not valid, a -1 XX error occurs.
1 1- 4 Agilent E5250 A User ’s Guide, Edit ion 8 Error Messa ges S tandard SCPI Er ror Mess ages - 103 Invalid separator An illegal ch aracter was received when a separator was expected; for example, the semicolon was omitted between multip le commands in a program mes sage.
Agilent E5250A Us er ’s Guide, Edition 8 1 1- 5 Error Mess a ges S tandard SCPI Error Messa ges - 120 Numeric data error An error was detected in a numeric parameter (including the non-decimal numeric types ). This erro r message is repor ted when the E5250A canno t determine the more specific er rors - 121 th rough - 128.
1 1- 6 Agilent E5250 A User ’s Guide, Edit ion 8 Error Messa ges S tandard SCPI Er ror Mess ages - 148 Character data not allowed A character parameter is not allowed for this position. - 150 S trin g data erro r An error was detected in a s tring parameter .
Agilent E5250A Us er ’s Guide, Edition 8 1 1- 7 Error Mess a ges S tandard SCPI Error Messa ges Execution Err or If syntax of a SCPI command header and param eter is valid, but the comman d cannot be executed due to some conditio n of the E5250A, a -2 XX erro r occurs.
1 1- 8 Agilent E5250 A User ’s Guide, Edit ion 8 Error Messa ges S tandard SCPI Er ror Mess ages Device-Dependent E rrors -3 XX errors indicate that an E5250A operat ion did not properly co mplete, possib ly due to an abn ormal hardware or firmware condition.
Agilent E5250A Us er ’s Guide, Edition 8 1 1- 9 Error Mess a ges S tandard SCPI Error Messa ges Query Err ors If the out put queue con trol of the E5 250A detects one of following problems, a -4 XX error occurs:. • An attempt was made t o read data from the output queue when no output data is present or pending.
1 1- 1 0 Agilent E5250 A User ’s Guide, Ed ition 8 Error Messa ges E5250 A Speci fic Err or Mes sages E5250A Specific Error Messages These are the E525 0A-specific errors that ar e not defined by SCPI. Th ese errors indicate t hat an E5250A op eration di d not proper ly complete du e to card, channel , port, or mo de errors.
Agilent E5250A Us er ’s Guide, Edition 8 1 1- 1 1 Error Mess a ges E5250 A Speci fic E rror Mes sages E5250A Channel R elated Err ors Error Number E rr or Message and Description 2000 Invalid card number W rong card number is specified in card number or channel list parameter .
1 1- 1 2 Agilent E5250 A User ’s Guide, Ed ition 8 Error Messa ges E5250 A Speci fic Err or Mes sages E5250A Ca rd/Mode/Po rt Related Errors Err or Number Error Message and Description 3000 Card0 initia lization fail The E5250A may be defective. Contact your nearest Agilent T echnologies service center .
Agilent E5250A Us er ’s Guide, Edition 8 1 1 - 13 Error Mess a ges E5250 A Speci fic E rror Mes sages 3013 Canno t con nect multipl e chan nels in SROUT e mode Incorrect channel list for Singl e connection ru le.
1 1- 1 4 Agilent E5250 A User ’s Guide, Ed ition 8 Error Messa ges E5250 A Speci fic Err or Mes sages.
12 SCPI Com mand Summary.
12- 2 Agilent E 5250A User ’ s G uide, Ed ition 8 SCPI Comm and Su mmary This chapter is a quick reference for the SCPI subsystem commands available for Agilent E5250A. The comm ands are in alph abetical order . For details about these commands, see Chapter 7.
Agilent E5250A Us er ’s Guide, Edition 8 12- 3 SCPI Comm and Sum mary Comm and Descriptio n :DIAG:TEST:CARD:CLE ca r d_num ber Clears re lay test result (pass/fail) of specified c ard.
12- 4 Agilent E 5250A User ’ s G uide, Ed ition 8 SCPI Comm and Su mmary [ :ROUT ] :BIAS:CHAN:ENAB:CARD car d _number Bi as enables all channels in th e specified card .
Agilent E5250A Us er ’s Guide, Edition 8 12- 5 SCPI Comm and Sum mary [: ROUT ] :CLOS:CARD? ca r d_numb er Returns channel_list of all closed channe ls for th e specified ca rd. "Close d channel" me ans an inpu t port connec ted to a n outp ut port.
12- 6 Agilent E 5250A User ’ s G uide, Ed ition 8 SCPI Comm and Su mmary [ :ROUT ] :CONN:SEQ? car d_n umber Returns the connection s sequenc e mode of the specified ca rd: NSEQ : No-S equenc e mode BBM : Break-Before-Make mo de MBBR : Mak e-Before -Bre ak mode.
Agilent E5250A Us er ’s Guide, Edition 8 12- 7 SCPI Comm and Sum mary [ :ROUT ] :COUP [ :STAT]? ca r d_num ber Returns Couple Mode of s pecified card.
12- 8 Agilent E 5250A User ’ s G uide, Ed ition 8 SCPI Comm and Su mmary :SYST:CDES? car d_numb er Returns a de scription of the specified c ard: mode l number and inp ut/outp ut port info .
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