Teledyneメーカー452の使用説明書/サービス説明書
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MODEL 452 PROCESS OZONE SENSOR ©Teledyne Instruments Advanced Pollution Instrumentation Division (T-API) 9480 Carroll Park Drive San Diego, CA 92121-5201 TOLL-FREE: 800-324-5190 TEL: 858-657-9800 FAX: 858-657-9816 E-MAIL: api-sales@teledyne.com W E B S I T E : www.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E i SAFETY MESSAGES NOTE The M452 contains no user serviceable parts. CAUTION There is risk of dangerous UV exposure when the cover is removed from the sensor. Take necessary precautions to avoid exposure.
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E iii T ABLE OF CONTENTS SAFETY MESSAGES ............................................................................ I TABLE OF CO NTENTS ................................................
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E iv 5 SENSOR AND SYSTEM TROUBLESHOOTING ...................... 5-1 5.1 S TATUS LED’ S ............................................................................. 5-1 5.2 S TATUS O UTPUTS .
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E v LIST OF FIGURES F IGURE 2-1: M452A H IGH P URITY O ZONE S ENSOR .............................. 2-1 F IGURE 2-2: P RESSURE D ROP VS . F LOW (H IGH P URITY V ERSION ) ........ 2-3 F IGURE 4-1: E LECTRICAL C ONNECTIONS .
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E vii W ARRANTY POLICY ADVANCED POLLUTION INSTRUMENTATION DIVISION 02024c Prior to shipme nt, Teledyne API equipm ent is thoroughly i nspected and tested. Should equipm ent failure occur, Teledyne API assures i ts customers that prompt service and support will be available.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E viii THE WARRANTIES SET FORTH IN THIS SECTION AND THE REMEDIES THEREFORE ARE EXCLUSIVE AND IN LIEU OF ANY IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR PARTICULAR PURPOSE OR OTHER WARRANTY OF QUALITY, WHETHER EXPRESSED OR IMPLIED.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 1-1 1 Product Descriptions 1.1 M452 Process Ozone Sensor The Teledyne API M452 is a m icroprocessor-based sensor for measuri ng the concentration of gaseous ozone in processes such as sem iconductor wafer fabrication, water treat ment, and ozone research.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 1-2 INTENTIONALLY BLANK.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 2-1 2 S pecifications Note: All specificat ions contained herein are subject to change wit hout notice.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 2-2 2.2 Performance Specifications Accuracy: Repeatability: 1% of Full Scale. 1% of Full Scale Response Time: 2 sec.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 2-3 2.6 Pressure Drop Figure 2-2 below shows the approxim ate pressure drop from the i nlet fitting to the outlet fittin g as a function of volumetric flow rate. Pressure Drop vs. Flow y = 0.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 2-4 2.7 Options The M452 is availabl e with the following opti ons: 2.7.1 AC Power Adapter This option consists of a Universal Input (100-240 VAC, 50-60Hz) Power Adapter with a standard IEC320 modular AC receptacle.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 3-1 3 Theory of Operation The detection of ozone m olecules is based on absorption of 254 nm UV light due to an intern al el ectronic resonance of the O 3 molecule.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 3-2 The intensity of li ght is converted into a volta ge by the detector/pream p module. The volt age is converted into a num ber by a voltage-to-frequency (V/F) converter capable of 80,000 count resolution.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-1 4 Inst allation 4.1 Unpacking Upon receiving the M452 pleas e verify that no appa rent shipping dam age has occurred. If damage has occurred please advise shipper fi rst, then Teledyne API.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-2 Analog Out - Analog Out + Power Common +15 Volt Supply +15 Volt Supply Digital In #1 Digital In #2 Digital Out # 1 RS485-A Power C.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-3 4.3.2 Analog Output The analog output is a 0-5 volt signal representing the ozone concentrati on measured by the sensor. The output is scaled to the concentration range that the sensor has been set to meas ure.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-4 4.3.4 Status Outputs The M452 has four digital st atus outputs for indicati ng error status and when operational parame ters have moved out of norm al lim its. These outputs are in the form of opt o-isolated open-collector t ransistors.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-5 4.3.5 RS232/485 Interface The M452 features a bi-directional digita l serial interface that can be used for sensor control and data acquisit i on. Please contact Tel edyne API for documentation on the use of the RS232/485 interface.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-6 4.4 Gas Connections Gas connections to the M452 are made using ¼” com pression tube fittings (M452) or ¼” VCR face seal fittings (M452A.) The ¼” com pression fittings can be used with ¼” O.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 4-7 4.5 Start-Up and Calibration Procedure 1. Verify that the proper electrical connections have been made (See Section 4.3) and apply power to the M 452. Allow the M452 to warm up for at least 15 m inutes.
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Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 5-1 5 Sensor and System T roubleshooting This chapter gives guideli nes for diagnosing system and sensor malfuncti ons using the four digital Status Outputs provided by t he M452.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 5-2 5.2 Status Outputs Table 5-1 below describes the function of the st atus outputs. More detail s as to the meaning of t he status outputs are described in the foll owing sections. Table 5-1: Status Outputs Output # Name On State Off state 1 Sensor O.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 5-3 5.4 Invalid Reading The normal stat e for the Invalid Reading output i s OFF. If this output turns on, this indicates that the M452 is still operational, but a system fault or calibration fault exi sts that may make the current ozone readi ng invalid.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 5-4 5.6 Cell Dirty The normal stat e for the Cell Dirty output is OFF. If this out put turns on, then the ratio of the measure detector to the reference detector (at zero) is < 0.5. This value is calculated wh en the zero calibration is performed.
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev . E 5-5 INTENTIONALLY BLANK.
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